Micro wideband spectroscopic analysis device
US-12163834-B2 · Dec 10, 2024 · US
US9841323B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9841323-B2 |
| Application number | US-201415104206-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 17, 2014 |
| Priority date | Dec 13, 2013 |
| Publication date | Dec 12, 2017 |
| Grant date | Dec 12, 2017 |
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A spectroscopic unit and spectroscopic device according to the present invention are provided with a filter that is provided with a plurality of optical filter elements disposed in order from the entrance side to the exit side of light under measurement and has different transmission wavelengths corresponding to entrance positions along a first direction. A first optical filter element from among the plurality of optical filter elements is tilted with respect to a second optical filter element disposed adjacently to the first optical filter element as a result of the first optical filter element being rotated by a prescribed angle with a third direction that is perpendicular to both the first direction and s second direction from the entrance side to the exit side as the axis of rotation thereof or being rotated by a prescribed angle with the first direction as the axis of rotation thereof.
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The invention claimed is: 1. A spectroscopic unit comprising: a filter for spectrally dispersing target light to be measured, on a wavelength-by-wavelength basis, the filter having a transmission wavelength which varies depending on an incident position along a first direction; and a light-receiving section for receiving wavelength-separated light components spectrally dispersed by the filter, and outputting signals corresponding to respective intensities of the received wavelength-separated light components, wherein the filter comprises a plurality of optical filter elements sequentially arranged in a direction from an incident side to an output side of the target light, wherein the plurality of optical filter elements comprises a first optical filter element and a second optical filter element disposed adjacent to the first optical filter element, and wherein the first optical filter is rotated, by a given angle, about a rotational axis defined along a third direction orthogonal to each of the first direction and a second direction extending from the incident side toward the output side of the target light, or rotated, by a given angle, about a rotational axis defined along the first direction, and thereby disposed inclinedly with respect to the second optical filter element. 2. The spectroscopic unit as recited in claim 1 , wherein the first optical filter element is disposed inclinedly with respect to the second optical filter element and a light-receiving surface of the light-receiving section. 3. The spectroscopic unit as recited in claim 1 , wherein the first optical filter element is a bandpass filter-type linear variable filter element. 4. The spectroscopic unit as recited in claim 1 , wherein the filter comprises two optical filter elements consisting of first and second optical filter elements sequentially arranged in the direction from the incident side to the output side of the target light, and wherein, in order to eliminate multiple-reflection in which the target light travels back and forth between the first and second optical filter elements N times or more, the given angle is set to satisfy the following conditional formulas (1) and (2): L 1 tan ϕ + 2 L 1 ∑ n = 1 N - 1 tan ( 2 n θ + ϕ ) + L 2 tan ( 2 N θ + ϕ ) > x 1 2 + x 2 2 ( 1 ) L 2 ( tan ϕ + tan ( 2 θ + ϕ ) ) > x 2 ( 2 ) where: L1 denotes a distance (air conversion length) between the first and second optical filter elem
Investigating two or more bands of a spectrum by separate detectors · CPC title
Measuring the intensity of spectral lines directly on the spectrum itself (G01J3/42, G01J3/44 take precedence) · CPC title
Interference filters · CPC title
based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26) · CPC title
Pivoting IF or other position variation · CPC title
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