Film thickness measuring device and film thickness measuring method

Patent metadata

Field	Value
Publication number	US-9841272-B2
Application number	US-201514847208-A
Country	US
Kind code	B2
Filing date	Sep 8, 2015
Priority date	Sep 9, 2014
Publication date	Dec 12, 2017
Grant date	Dec 12, 2017

Abstract

A film thickness measuring device including: a terahertz wave generator; a prism that has an entrance surface, an abutment surface capable of abutting a surface of a sample including a first film on a side where the first film is formed, and an emission surface; a terahertz wave detector that detects an S-polarization component and a P-polarization component of a reflected wave from the sample, emitted from the emission surface of the prism; and a control section configured to determine a thickness of the first film formed in the sample, based on a difference between a time waveform of the S-polarization component of the reflected wave and a time waveform of the P-polarization component of the reflected wave.

First claim

What is claimed is:

1. A film thickness measuring device comprising:
a terahertz wave generator that generates a terahertz wave;
a prism that has an entrance surface through which the terahertz wave emitted from the terahertz wave generator is caused to enter, an abutment surface capable of abutting a surface of a sample including a first film, and an emission surface from which a reflected wave from the sample is emitted;
a terahertz wave detector that detects an S-polarization component and a P-polarization component of the reflected wave emitted from the emission surface of the prism; and
a control section configured to determine a thickness of the first film formed in the sample, based on a difference between a time waveform of the S-polarization component of the reflected wave and a time waveform of the P-polarization component of the reflected wave, wherein
the sample further includes a second film that is formed on the first film and contains one of a conductive particle and a pore,
the sample further includes a third film formed on the second film,
an incident angle of the terahertz wave at an interface between the abutment surface and the third film is set to a value that is smaller than a critical angle such that total reflection of the terahertz wave does not occur,
an angle of the entrance surface is set such that an optical axis of the terahertz wave caused to enter through the entrance surface is directed in a direction of a normal to the entrance surface, and
an angle of the emission surface is set such that an optical axis of a reflected wave reflected at an interface between the prism and the third film is directed in a direction of a normal to the emission surface.

2. The film thickness measuring device according to claim 1 , wherein:
the control section is configured to determine a thickness of the second film based on a peak in a time waveform obtained by performing a deconvolution process on one of time waveform data on the S-polarization component of the reflected wave and time waveform data on the P-polarization component of the reflected wave by using a first window function; and
the control section is configured to determine the thickness of the first film based on a difference between the time waveform of the S-polarization component obtained by performing the deconvolution process on the time waveform data on the S-polarization component of the reflected wave by using a second window function different from the first window function and the time waveform of the P-polarization component obtained by performing the deconvolution process on the time waveform data on the P-polarization component of the reflected wave by using the second window function.

3. The film thickness measuring device according to claim 1 , wherein:
the control section is configured to determine a thickness of the third film based on a peak in a time waveform obtained by performing a deconvolution process on one of time waveform data on the S-polarization component of the reflected wave and time waveform data on the P-polarization component of the reflected wave by using a first window function; and
the control section is configured to determine the thickness of the first film based on a difference between the time waveform of the S-polarization component obtained by performing the deconvolution process on the time waveform data on the S-polarization component of the reflected wave by using a second window function different from the first window function and the time waveform of the P-polarization component obtained by performing the deconvolution process on the time waveform data on the P-polarization component of the reflected wave by using the second window function.

4. The film thickness measuring device according to claim 1 , wherein the second film is a metallic base layer.

5. The film thickness measuring device according to claim 1 , wherein the third film is a clear layer.

6. The film thickness measuring device according to claim 1 , wherein the first film is a conductive primer layer.

7. The film thickness measuring device according to claim 1 , wherein the second film is a porous ceramic layer.

8. The film thickness measuring device according to claim 1 , wherein the prism includes a refractive index matching member.

9. A film thickness measuring method comprising:
causing an abutment surface of a prism to abut a surface of a sample, the sample including a first film, a second film formed on the first film and containing one of a conductive particle and a pore, and a third film formed on the second film, and the prism having an entrance surface through which a terahertz wave emitted from a terahertz wave generator is caused to enter, the abutment surface, and an emission surface from which a reflected wave from the sample is emitted;
setting an incident angle of the terahertz wave at an interface between the abutment surface and the third film to a value that is smaller than a critical angle such that total reflection of the terahertz wave does not occur;
detecting an S-polarization component and a P-polarization component of the reflected wave emitted from the emission surface of the prism using a terahertz wave detector; and
determining a thickness of the first film formed in the sample, based on a difference between a time waveform of the S-polarization component of the reflected wave and a time waveform of the P-polarization component of the reflected wave, wherein
an angle of the entrance surface is set such that an optical axis of the terahertz wave caused to enter through the entrance surface is directed in a direction of a normal to the entrance surface, and
an angle of the emission surface is set such that an optical axis of a reflected wave reflected at an interface between the prism and the third film is directed in a direction of a normal to the emission surface.

Assignees

• Toyota Motor Co Ltd

Inventors

• Takayanagi Jun
• Ohtake Hideyuki
• Aikyo Hideyuki
• Fujisawa Yasunari
• Nabeshima Atsuo

Classifications

• G01B11/0641 Primary

  with measurement of polarization · CPC title