Deposition apparatus
US-2024052477-A1 · Feb 15, 2024 · US
US9840766B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9840766-B2 |
| Application number | US-201314437943-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 23, 2013 |
| Priority date | Oct 23, 2012 |
| Publication date | Dec 12, 2017 |
| Grant date | Dec 12, 2017 |
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The invention relates to a component having a coating containing chromium, nitrogen and carbon. According to the invention the coating comprises a sliding layer having a ceramic phase and a carbon phase, the ceramic phase forms a crystalline ceramic phase from Crx(C 1-y N y ) with 0.8=x=1.2 and y>0.7, and the crystalline ceramic phase and the carbon phase form a layer system of alternating individual layers (A, B), wherein the carbon phase has interstices that are filled with the crystalline ceramic phase.
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The invention claimed is: 1. A component ( 10 ) having a coating ( 13 ) containing chromium, nitrogen, and carbon, wherein the coating ( 13 ) has a lubricating layer ( 16 ) having a ceramic phase ( 17 ) and a carbon phase ( 18 ), wherein the ceramic phase ( 17 ) forms a crystalline ceramic phase composed of Cr x (C 1-y N y ) with 0.8≦x≦1.2 and y>0.7, wherein the crystalline ceramic phase ( 17 ) and the carbon phase ( 18 ) form a layer system composed of alternating individual layers (A, B), wherein the carbon phase ( 18 ) has gaps that are filled with the crystalline ceramic phase ( 17 ), wherein the lubricating layer ( 16 ) has a total carbon content of 12 to 20 atom-%, and wherein the crystalline ceramic phase does not have gaps that are filled with the carbon phase. 2. The component according to claim 1 , wherein it holds true for the crystalline ceramic matrix ( 17 ) composed of Cr x (C 1-y N y ): 0.9≦x≦1.1 and y>0.8. 3. The component according to claim 1 , wherein the crystalline ceramic phase ( 17 ) forms bridges between its individual layers (A). 4. The component according to claim 1 , wherein the crystalline ceramic phase ( 17 ) and the carbon phase ( 18 ) are present in the form of lamellae. 5. The component according to claim 4 , wherein the lamellae of the carbon phase ( 18 ) are disposed parallel to the surface ( 19 ) of the lubricating layer ( 16 ). 6. The component according to claim 1 , wherein the thickness of the lubricating layer ( 16 ) amounts to 1 to 50 μm. 7. The component according to claim 1 , wherein the thickness of each individual layer (A, B) amounts to between 1.0 nm and 4.0 nm. 8. The component according to claim 1 , wherein the Vickers hardness of the lubricating layer ( 16 ) amounts to 1000 HV to 2000 HV 0.05. 9. The component according to claim 1 , wherein the modulus of elasticity of the lubricating layer ( 16 ) amounts to 100 GPa to 200 GPa. 10. The component according to claim 1 , wherein the lubricating layer ( 16 ) has an average roughness depth Rz of less than 1 μm at its surface and/or that the material proportion Rmr(02) amounts to more than 50% and/or that the material proportion Rmr(03) amounts to more than 70%. 11. The component according to claim 1 , wherein an adhesion layer ( 14 ) composed of a metallic material is applied between a body ( 11 ) of the component and the lubricating layer ( 16 ). 12. The component according to claim 11 , wherein an intermediate layer ( 15 ) composed of a metal nitride material is applied between the adhesion layer ( 14 ) and the lubricating layer ( 16 ). 13. The component according to claim 1 for an internal combustion engine, wherein the component is a piston ring, a piston pin, a cam of a camshaft, a valve, a valve tappet or a rocker arm. 14. A method for coating a component ( 10 ) with the lubricating layer ( 16 ) of claim 1 , wherein at least one component ( 10 ) is mounted on a spindle ( 30 ) disposed on a turntable ( 28 ), so as to rotate, in a vacuum chamber ( 21 ), wherein for the production of the lubricating layer ( 16 ), a PVD method with arc vaporization, having the following parameters, is used: Material sources: at least one metal target ( 24 ) and at least one carbon target ( 25 ); Ratio of the target streams of metal to carbon: 2 to 7; Deposition temperature at the component ( 10 ): 350° C. to 500° C.; Bias voltage: −50 V to −150 V; Pressure in the vacuum chamber: 0.2 Pa to 1.0 Pa; Atmosphere in the vacuum chamber: nitrogen and inert gas having a ratio of the nitrogen partial pressure to the total pressure of 0.6 to 1.0; Rotation of the turntable ( 28 ): 20 to 40 revolutions per minute; Rotation of the at least one spindle ( 30 ): 5 to 7 revolutions per revolution of the turntable ( 28 ).
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