Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US9839933B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9839933-B2 |
| Application number | US-201615351583-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 15, 2016 |
| Priority date | May 6, 2009 |
| Publication date | Dec 12, 2017 |
| Grant date | Dec 12, 2017 |
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Official abstract text for this publication.
Various exemplary illustrations of a coating agent device are disclosed. In one example, a coating agent device may be a coating agent valve, e.g., for influencing the discharge of a coating agent. The coating agent device may include a plug-in or pluggable fastening base configured to facilitate a plug-in or pluggable mounting of the coating agent device. In some examples, the coating agent device may prevent relative rotation of the device relative to a mating component.
Opening claim text (preview).
The invention claimed is: 1. A coating agent valve device comprising: a housing having a plurality of ducts; a plurality of mounting sockets plugged to the respective ducts; a plurality of outwardly guided valve needles, the valve needles disposed within the respective mounting sockets and arranged to be received in respective valve seats of a coating device; and a plurality of piston elements fixed to the respective valve needles and positioned in the respective ducts. 2. The coating agent valve device of claim 1 , wherein the plurality of valve needles consists of two valve needles. 3. The coating agent valve device of claim 1 , further comprising a plurality of seals fixed to the respective piston elements. 4. The coating agent valve device of claim 3 , wherein the seals secure the respective valve needles within the respective ducts. 5. The coating agent valve device of claim 1 , further comprising a drive interface for coupling a drive device, the drive interface attached to the housing. 6. The coating agent valve device of claim 5 , wherein the drive interface includes at least one control input for receiving a drive signal of the drive device for driving a valve needle of the coating agent device. 7. The coating agent valve device of claim 6 , wherein the drive interface includes a plurality of control inputs for receiving a plurality of respective drive signals of the drive device for driving the respective valve needles of the coating agent device. 8. The coating agent valve device of claim 5 , wherein the drive interface is elongate. 9. The coating agent valve device of claim 8 , wherein the drive interface has an oval cross-sectional shape. 10. The coating agent valve device of claim 9 , wherein a cross section of the housing arranged downstream of the drive interface at least partially takes up the cross section of the drive interface. 11. The coating agent valve device of claim 5 , wherein a cross section of the drive interface is at least partially oval and is formed to arrange a plurality of coating agent devices of the same type next to each other in an at least partially form-fitting manner. 12. The coating agent valve device of claim 5 , wherein the drive interface has at least two convex fastening regions arranged in a diagonally mirrored manner for mechanically holding the coating agent device. 13. A coating agent valve device comprising: a housing having a plurality of ducts; a plurality of mounting sockets plugged to the respective ducts; a plurality of outwardly guided valve needles, the valve needles disposed within the respective mounting sockets and arranged to be received in respective valve seats of a coating device; and a drive interface attached to the housing for coupling a drive device. 14. The coating agent valve device of claim 13 , wherein the drive interface includes at least one control input for receiving a drive signal of the drive device for driving a valve needle of the coating agent device. 15. The coating agent valve device of claim 14 , wherein the drive interface includes a plurality of control inputs for receiving a plurality of respective drive signals of the drive device for driving the respective valve needles of the coating agent device. 16. The coating agent valve device of claim 13 , wherein the drive interface is elongate. 17. The coating agent valve device of claim 16 , wherein the drive interface has an oval cross-sectional shape. 18. The coating agent valve device of claim 17 , wherein a cross section of the housing arranged downstream of the drive interface at least partially takes up the cross section of the drive interface. 19. The coating agent valve device of claim 13 , wherein a cross section of the drive interface is at least partially oval and is formed to arrange a plurality of coating agent devices of the same type next to each other in an at least partially form-fitting manner. 20. The coating agent valve device of claim 13 , wherein the drive interface has at least two convex fastening regions arranged in a diagonally mirrored manner for mechanically holding the coating agent device.
Particular materials for seats or closure elements · CPC title
Outlet valves actuated by the pressure of the fluid to be sprayed (fluid-actuated pump outlet valve arrangements B05B11/1016, B05B11/1022, B05B11/1033, B05B11/1036, B05B11/104, B05B11/1064, B05B11/1097) · CPC title
characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title
using bayonet connections · CPC title
with conical shaped valve members · CPC title
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