Method of forming thin film and method of manufacturing organic light-emitting display device

Patent metadata

Field	Value
Publication number	US-9837641-B2
Application number	US-201715402223-A
Country	US
Kind code	B2
Filing date	Jan 9, 2017
Priority date	Mar 27, 2015
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

A method of forming a thin film, the method including: disposing a resist portion on a substrate, the resist portion including: a first region including a first upper surface; and a second region including a second upper surface, the first upper surface disposed higher than the second upper surface and forming a step; disposing a first protection layer covering the resist portion; exposing the first upper surface; removing the first region; disposing a first thin film on the substrate; disposing a second protection layer covering the first thin film; exposing the second upper surface; removing the second region; disposing a second thin film on the substrate; and removing the first protection layer and the second protection layer.

First claim

What is claimed is:

1. A method of forming a thin film, the method comprising:
disposing a resist portion on a substrate, the resist portion comprising:
a first region comprising a first upper surface; and
a second region comprising a second upper surface,
the first upper surface disposed higher than the second upper surface and forming a step;

disposing a first protection layer covering the resist portion;
exposing the first upper surface;
removing the first region;
disposing a first thin film on the substrate;
disposing a second protection layer covering the first thin film;
exposing the second upper surface;
removing the second region;
disposing a second thin film on the substrate; and
removing the first protection layer and the second protection layer.

2. The method of claim 1 , wherein the second protection layer is formed by filling the same material as the first protection layer in an area where the first region is removed.

3. The method of claim 1 , wherein the exposing the first upper surface comprises removing a first upper portion of the first protection layer to form an upper surface of the first protection layer placed in a same plane with the first upper portion, and
wherein the exposing the second upper surface comprises removing a second upper portion of the first protection layer and the second protection layer to form an upper surface of the first protection layer and the second protection layer placed in a same plane with the second upper portion.

4. The method of claim 3 , wherein the first upper portion of the first protection layer and the second upper portion of the first protection layer and the second protection layer may be removed by etching or polishing.

5. The method of claim 1 , wherein the first region and the second region are disposed not contacting each other.

6. The method of claim 1 , the disposing of the resist portion comprising:
disposing a first layer on the substrate, the first layer having a thickness corresponding to a distance from an upper surface of the substrate to the second upper surface; and
disposing a second layer on the first layer, the second layer having a thickness corresponding to a distance from the second upper surface to the first upper surface,
wherein an area of the first layer is larger than an area of the second layer.

7. The method of claim 1 , wherein the first region and the second region are formed in one body by imprinting.

8. The method of claim 1 , disposing the resist portion comprising:
coating a material for forming the resist portion on the substrate;
exposing the first region and the second region differently using a multi-tone mask; and
etching to form the resist portion.

9. The method of claim 1 , disposing the first thin film on the substrate comprises:
depositing or coating a material for forming the first thin film on an exposed area of the substrate where the first region is removed, and
disposing the second thin film on the substrate comprise: depositing or coating a material for forming the second thin film on an exposed area of the substrate where the second region is removed.

10. The method of claim 1 , further comprising:
forming a first thin film layer and a second thin film layer sequentially on the substrate, before the forming of the resist portion,
the removing of the first region comprises:
removing at least a portion of the second thin film with the first region; and
exposing at least a portion of the first thin film layer to form the first thin film, and

the removing of the second region comprises:
exposing other portion of the second thin film layer to form the second thin film.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Hanjun

Classifications

• G03F7/16

  Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title

• H01L51/56 Primary

  Electricity · mapped topic

• H01L2227/323

  Electricity · mapped topic

• G03F7/095

  having more than one photosensitive layer (G03F7/075 takes precedence) · CPC title

• H01L51/5237

  Electricity · mapped topic