Liquid metal interconnects

Patent metadata

Field	Value
Publication number	US-9835648-B2
Application number	US-201113173933-A
Country	US
Kind code	B2
Filing date	Jun 30, 2011
Priority date	Jun 30, 2011
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

Embodiments of the invention provide methods for forming electrical connections using liquid metals. Electrical connections that employ liquid metals are useful for testing and validation of semiconductor devices. Electrical connections are formed between the probes of a testing interface and the electronic interface of a device under test through a liquid metal region. In embodiments of the invention, liquid metal interconnects are comprised of gallium or liquid metal alloys of gallium. The use of liquid metal contacts does not require a predetermined amount of force be applied in order to reliably make an electrical connection.

First claim

We claim:

1. A method for testing a die, the method comprising:
providing a die to be tested comprising a surface, wherein the surface comprises an insulating material disposed thereon and electrical interface regions to be used for testing, and wherein the insulating material comprises wells wherein the electrical interface regions are each located in a well;
placing a liquid metal into the wells on the die to be tested;
forming an electrical connection between probes of a testing interface and the electrical interface regions by contacting the probes of the testing interface with the liquid metal that is in the wells on the die to be tested; and
electrically testing the die to be tested after forming the electrical connection between the probes of the testing interface and the electrical interface regions.

2. The method of claim 1 wherein the insulating material is a photoresist material.

3. The method of claim 1 wherein the liquid metal is comprised of gallium.

4. The method of claim 1 wherein the liquid metal is an alloy of gallium selected from the group consisting of alloys of gallium and indium, alloys of gallium, indium and tin, and alloys of gallium, indium, and zinc.

5. The method of claim 1 wherein the liquid metal is a liquid metal emulsion.

6. The method of claim 1 wherein the liquid metal is a liquid metal emulsion and the solvent is selected from the group consisting of liquid alkanes, liquid alcohols, liquid polyethers, and liquid polyols.

7. The method of claim 1 wherein the liquid metal is a liquid metal emulsion having metal micro-particles with an average diameter between 4 μm and 100 μm.

8. The method of claim 1 wherein forming an electrical connection between probes of a testing interface and the electrical interface regions occurs without the application of pressure between the testing interface and the die to be tested.

9. The method of claim 1 wherein electronically testing occurs through a computer operably connected to the testing interface.

10. The method of claim 7 also including removing the liquid metal and photoresist material from the die to be tested after electronically testing the die to be tested.

11. The method of claim 1 also including removing the liquid metal and the insulating material.

12. The method of claim 1 , wherein the die to be tested is a packaged die.

13. The method of claim 1 , wherein the die to be tested is a portion of a wafer.

Assignees

• Baskaran Rajashree
• Jun Kimin
• Zhong Ting
• Swart Roy E
• Fischer Paul B
• Intel Corp

Inventors

• Baskaran Rajashree
• Jun Kimin
• Zhong Ting
• Swart Roy E
• Fischer Paul B

Classifications

• G01R1/06783

  containing liquids · CPC title

• Y10T29/49204

  Contact or terminal manufacturing · CPC title

• G01R1/0416 Primary

  Connectors, terminals (G01R1/0425 and G01R1/0433 take precedence; with measurement function for battery poles G01R31/364) · CPC title

• H01R3/08

  for making connection to a liquid {(slip rings with liquid contacts H01R39/30, H01R39/646)} · CPC title