Apparatus and method for extending analog front end sense range of a high-Q MEMS sensor

Patent metadata

Field	Value
Publication number	US-9835647-B2
Application number	US-201514661426-A
Country	US
Kind code	B2
Filing date	Mar 18, 2015
Priority date	Mar 18, 2014
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

Apparatus and methods for interfacing with a micro-electromechanical system (MEMS) sensor are provided. In an example, an apparatus can interface circuit including an integrator circuit, a sample switch circuit, a saturation detector and a controller. The saturation detector can be configured to receive a signal indicative of an integration of charge of the sensor, to compare the signal indicative of the integration of charge to an integrator saturation threshold and to modulate a divide parameter using the comparison of the signal indicative of the integration of charge and the integrator saturation threshold. The controller can be configured to receive a clock signal and to control the sample switch circuit based on a phase of the clock signal and the divide parameter.

First claim

What is claimed is:

1. An apparatus comprising:
an integrator circuit configured to provide a signal indicative of an integration of charge on a sense capacitor of a MEMS sensor;
a sample switch circuit configured to selectively couple the sense capacitor with an input of the integrator circuit;
a comparator configured to compare an output of the integrator circuit to a threshold and to provide an output pulse stream indicative of the charge on the sense capacitor;
a feedback circuit having a feedback capacitor, the feedback circuit coupled between an output of the comparator and the input of the integrator circuit;
a saturation detector configured to receive the signal indicative of the integration of charge, to compare the signal indicative of the integration of charge to an integrator saturation threshold and to modulate a divide parameter using the comparison of the signal indicative of the integration of charge and the integrator saturation threshold; and
a controller configured receive a clock signal and to control the sample switch circuit based on a phase of the clock signal and the divide parameter.

2. The apparatus of claim 1 , wherein the saturation detector is configured to increment the divide parameter when the integration of the charge is greater than the integrator saturation threshold.

3. The apparatus of claim 2 , wherein the saturation detector is configured to decrement the divide parameter when the integration of the charge is less than the integrator saturation threshold.

4. The apparatus of claim 1 , wherein the saturation detector includes a charge amplitude estimator and configured to provide an indication of an amplitude of the charge on the sense capacitor of the MEMS sensor.

5. The apparatus of claim 4 , wherein the charge amplitude estimator includes an input coupled to an input of the integrator circuit.

6. The apparatus of claim 4 , wherein the charge amplitude estimator includes an input coupled to an output of the integrator circuit.

7. The apparatus of claim 4 , wherein the charge amplitude estimator includes:
an amplifier; and
a switched capacitor coupled between an input of the amplifier and an output of the amplifier.

8. The apparatus of claim 7 , wherein the switched capacitor is programmable.

9. The apparatus of claim 1 , including a damping circuit configured to provide a damping signal to the sense capacitor of the MEMS sensor.

10. The apparatus of claim 9 , wherein the damping circuit includes a derivative estimator and a driver.

11. The apparatus of claim 10 , wherein the derivative estimator is configured to receive motion information of a proof mass of the MEMS sensor using the sense capacitor and to provide trigger information to the driver, the trigger information indicative of when to apply a damping signal to the sense capacitor to dampen oscillatory motion of the proof mass.

12. The apparatus of claim 11 , wherein the driver is configured to apply the damping signal to the sense capacitor using the sample switch circuit.

13. A method comprising:
providing a signal indicative of an integration of charge on a sense capacitor of a MEMS sensor using an integrator circuit;
receiving the signal indicative of the integration of charge at a saturation detector;
comparing the signal indicative of the integration of charge to an integrator saturation threshold;
modulating a divide parameter using the comparison of the signal indicative of the integration of charge and the integrator saturation threshold; and
controlling a sample switch coupled to the sense capacitor and an input of the integrator circuit based on a phase of a clock signal and the divide parameter.

14. The method of claim 13 , including:
selectively coupling the sense capacitor with an input of the integrator circuit using the sample switch;
comparing an output of the integrator circuit to a threshold using a comparator; and
providing an output pulse stream from the comparator indicative of the charge on the sense capacitor.

15. The method of claim 13 , including selectively shorting the sense capacitor with a reference voltage using the sample switch.

16. The method of claim 15 including:
comparing an output of the integrator circuit to a threshold using a comparator;
providing an output pulse stream from the comparator indicative of the charge on the sense capacitor; and
receiving the signal indicative of the integration of charge at a saturation detector.

17. The method of claim 13 , including providing a damping signal to the sense capacitor of the MEMS sensor using a damping circuit.

18. The method of claim 17 , wherein the providing a damping signal includes receiving motion information of a proof mass of the MEMS sensor at the damping circuit using the sense capacitor; and
providing trigger information to a driver, the trigger information indicative of when to apply the damping signal to the sense capacitor to dampen oscillatory motion of the proof mass.

19. The method of claim 18 , wherein the providing a damping signal includes applying the damping signal to the sense capacitor using the sample switch.

20. The method of claim 18 , wherein the providing a damping signal includes electrically coupling an output of the driver the sense capacitor using the sample switch.

Assignees

• Fairchild Semiconductor

Inventors

• Opris Ion
• Seng Justin
• Pavan Shanthi
• Ashkar Marwan
• Lee Michelle

Classifications

• G01P2015/0882

  for providing damping of vibrations · CPC title

• G01P15/125 Primary

  by capacitive pick-up · CPC title