Coupled heterogeneous devices for pH sensing

Patent metadata

Field	Value
Publication number	US-9835634-B2
Application number	US-201314075557-A
Country	US
Kind code	B2
Filing date	Nov 8, 2013
Priority date	May 17, 2012
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

Provided herein are methods and devices for measuring pH and for amplifying a pH signal to obtain ultrasensitive detection of changes in pH. This is achieved by providing a sensor and a transducer, wherein the sensor transconductance is sensitive to changes in pH and the transducer transconductance is not affected by pH change. The transducer instead compensates for changes in the sensor transconductance arising from pH change. The unique configuration of the sensor and transducer with respect to each other provides substantial increases in a pH amplification factor, thereby providing pH sensing devices with a giant Nernst response and, therefore, effectively increased pH sensitivity.

First claim

We claim:

1. A method of amplifying a pH signal, the method comprising the steps of:
providing a sensor comprising a source electrode, a drain electrode, a sensor channel provided between the source and drain electrodes, and a sensing surface over at least a portion of the sensor channel, wherein the sensor channel has a first transconductance;
providing a transducer comprising a source electrode, a drain electrode, and a transducer channel provided between the source and drain electrodes, wherein the transducer channel has a second transconductance, and the second transconductance is greater than the first transconductance;
applying a material to the sensing surface, wherein a change in pH generates a conductance modulation of the sensor channel; and
adjusting a bias of the transducer to counterbalance the conductance modulation of the sensor channel; thereby amplifying the pH signal of the material;
wherein the amplifying corresponds to an amplification factor defined by:

(

μ
1

μ
2

⁢

(

W
/
L

)

1

(

W
/
L

)

2

⁢

V

DS
,
1

V

DS
,
2

)

⁢

C

OX
,
1

C

OX
,
2

wherein μ is the channel mobility, W is the channel width, L is the channel length, V DS is the drain bias, C OX is the gate oxide capacitance, and the subscripts 1 and 2 refer to the sensor and the transducer, respectively;
the method further comprising the step of selecting an amplification factor that is greater than or equal to 10.

2. The method of claim 1 , wherein the
amplification factor is greater than or equal to 20.

3. The method of claim 2 , wherein the selecting step comprises selecting a width and/or a length of: the transducer channel, the sensor channel, or both, so that (W/L) 1 /(W/L) 2 is greater than or equal to 20.

4. The method of claim 3 , wherein the sensor channel is a nanoplate and the transducer channel is a nanowire.

5. The method of claim 2 , wherein the selecting step comprises mobility scaling so that the sensor channel has a higher mobility than a transducer channel mobility, and wherein the mobility scaling comprises:
providing a first material for the sensor channel and a second material for the transducer channel, wherein the first material has a higher mobility than the second material; or
providing the sensor as part of an n-channel metal-oxide-semiconductor field-effect transistor (nMOS) and the transducer as part of a p-channel metal-oxide-semiconductor field-effect transistor (pMOS).

6. The method of claim 2 , wherein the selecting step comprises oxide thickness scaling so that C OX,1 is greater than C OX,2 by at least a factor of 20.

7. The method of claim 6 , wherein the oxide thickness scaling comprises:
a dual oxide process to provide an oxide layer thickness of the sensor that is greater than an oxide layer thickness of the transducer; or
providing a sensor channel material having a higher k-dielectric than a transducer channel material k-dielectric; or
providing an oxide layer thickness of the sensor that is greater than an oxide layer thickness of the transducer by a dual oxide process and providing a sensor channel material that is a higher k-dielectric than the transducer channel material.

8. The method of claim 2 , wherein the selecting step comprises bias scaling so that V DS,1 is greater than or equal to V DS,2 by a factor of at least 20; and wherein the bias scaling provides real-time tunability of sensor performance.

9. The method of claim 1 , wherein:
the transducer channel is biased to a top gate or to a bottom gate; or
the sensor channel is biased to a fluid gate that is at least partially immersed in the material.

10. The method of claim 1 , wherein the transducer further comprises a transducer surface and the material is provided on the transducer surface, wherein the second transconductance is substantially independent of pH.

11. The method of claim 1 , wherein the transducer is positioned outside of a well in which the material is confined.

12. The method of claim 1 , used in an application selected from the group consisting of nucleotide sequencing, environmental toxic monitoring, pharmaceutical testing, food testing, cancer monitoring, and detection of enzyme activity.

13. The method of claim 1 , wherein the material comprises a fluid electrolyte.

14. The method of claim 1 , wherein the material comprises a biological cell and intracellular pH is measured, extracellular pH is measured, or both intracellular and extracellular pH is measured.

15. The method of claim 1 , wherein the sensing surface comprises an oxide surface and wherein:
the oxide surface interacts with a proton; or
the oxide surface comprises OH surface groups that react with protons to provide a sensor channel transconductance modulation that is pH dependent.

Assignees

• Bashir Rashid
• Reddy Bobby
• Alam Muhammad A
• Nair Pradeep R
• Go Jonghyun
• Univ Illinois
• Purdue Research Foundation

Inventors

• Bashir Rashid
• Reddy Bobby
• Alam Muhammad A
• Nair Pradeep R
• Go Jonghyun

Classifications

• G01N33/575

  for cancer · CPC title

• G01N27/414

  Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS · CPC title

• G01N33/94

  involving narcotics {or drugs or pharmaceuticals, neurotransmitters or associated receptors} · CPC title

• G01N33/573

  for enzymes or isoenzymes · CPC title

• G01N33/5438

  Electrodes · CPC title