Magnetic measurement system and apparatus utilizing X-ray to measure comparatively thick magnetic materials

Patent metadata

Field	Value
Publication number	US-9835569-B2
Application number	US-201715471412-A
Country	US
Kind code	B2
Filing date	Mar 28, 2017
Priority date	Sep 25, 2013
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

A magnetic measurement system includes an X-ray source, a monochromator that converts right- and left-polarization X-ray into right- and left-monochromatic X-ray, an aperture slit that allows the right- and left-monochromatic X-ray to pass through, an analytical section, and piezoelectric scanning devices. The analytical section has a Fresnel zone plate that receives and focuses the right- and left-monochromatic X-ray on a single point being 10 nm or less wide of a magnetic sample, an order-sorting aperture that allows the focused X-ray to selectively pass through, a sample-stage that sets a comparatively thick magnetic sample that is more than 150 nm thick and less than or equal to 1000 nm thick to be irradiated with the X-ray, and an X-ray-detector that detects transmittance of transmission X-ray passing through the comparatively thick sample and that generates X-ray magnetic circular dichroism (XMCD) data by directly measuring the detected transmittance of the transmission X-ray.

First claim

The invention claimed is:

1. A magnetic measurement system, comprising:
an X-ray source;
a monochromator that converts right- and left-polarization X-ray of the X-ray source into right- and left-monochromatic X-ray;
an aperture slit that allows the right- and left-monochromatic X-ray converted by the monochromator to pass through;
an analytical section having a combination of a Fresnel zone plate (FZP) that receives and focuses the right- and left-monochromatic X-ray on a single point being 10 nm or less wide of a magnetic sample, an order-sorting aperture (OSA) that allows the X-ray focused by the FZP to selectively pass through, a sample-stage that sets the comparatively thick magnetic sample that is more than 150 nm thick and less than or equal to 1000 nm thick to be irradiated with the X-ray, and an X-ray-detector that detects transmittance of transmission X-ray passing through the comparatively thick sample set by the sample-stage and that generates X-ray magnetic circular dichroism (XMCD) data by directly measuring the detected transmittance of the transmission X-ray;
piezoelectric scanning devices that accurately control X-, Y- and Z-stages of the analytical section with an accuracy in nanometers which includes the sample-stage of the analytical section; wherein,
the system accurately generates XMCD data by directly measuring transmittance of transmission X-ray passing through the comparatively thick magnetic sample even within an external magnet field.

2. A magnetic measurement apparatus, comprising:
an analytical section having a combination of a Fresnel zone plate (FZP) that focuses right- and left-polarization X-ray on a single point being 10 nm or less wide of a polycrystalline magnetic sample, an order-sorting aperture (OSA) that allows the X-ray focused by the FZP to selectively path through, a sample-stage that is configured to set the polycrystalline magnetic sample that is more than 150 nm thick and less than or equal to 1000 nm thick to be irradiated with the X-ray passing the OSA, an X-ray-detector that, using an Avalanche photodiode, detects transmittance of transmission X-ray passing through the polycrystalline magnetic sample, and that generates two-dimensional X-ray magnetic circular dichroism (XMCD) data based on the detected transmittance of the transmission X-ray;
piezoelectric devices that control X-, Y- and Z-stages of the analytical section with an accuracy in nanometers which includes the sample-stage of the analytical section; wherein, the apparatus accurately generates two-dimensional XMCD data of each single crystalline-grain contained in the polycrystalline sample by directly measuring transmittance of transmission X-ray passing through the polycrystalline sample even within an external magnet field.

Assignees

• Toyota Motor Co Ltd
• Inter-University Res Institute Corporation High Energy Accelerator Res Organization

Inventors

• Yano Masao
• Ono Kanta

Classifications

• G01N2223/315

  monochromators · CPC title

• G01R33/12

  Measuring magnetic properties of articles or specimens of solids or fluids (involving magnetic resonance G01R33/20) · CPC title

• G01N23/04

  and forming images of the material · CPC title

• G01N2223/405

  mapping of a material property · CPC title

• G01N23/083 Primary

  the radiation being X-rays · CPC title