Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same
US-2024019311-A1 · Jan 18, 2024 · US
US9835497B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9835497-B2 |
| Application number | US-201314436508-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 16, 2013 |
| Priority date | Oct 17, 2012 |
| Publication date | Dec 5, 2017 |
| Grant date | Dec 5, 2017 |
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The invention relates to rod thermometer device for detecting a temperature, including a plurality of temperature-sensitive elements and a protective sheath having an axis X in which the sensitive elements are partially inserted. The sheath is made of a metal constituting one of the two metals of a thermocouple, and the sensitive elements of a plurality of wires made of a metal other than that of the sheath and constituting the other one of the two metals of a thermocouple, one of the ends of each one of the wires being welded inside the sheath forming a junction for measuring a given thermocouple, the welded ends of the wires being distributed along a plurality of axial and azimuth positions relative to the axis X inside the sheath, each one of the wires extending out of the sheath by at least one of the ends thereof.
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The invention claimed is: 1. A device for detecting temperature, forming a rod thermometer, comprising: a plurality of elements sensitive to temperature; and a protective cladding of longitudinal axis X in which the sensitive elements are partially housed, characterized in that the protective cladding is made of a metal constituting one of the two metals of a thermocouple, and in that the sensitive elements consist in a plurality of wires made of a metal different from that of the cladding and constituting the other of the two metals of a thermocouple, one of the ends of each of the wires being welded to the interior of the cladding so as to form a measurement junction of a given thermocouple, the welded ends of the wires being distributed in a plurality of axial and azimuthal positions relative to the axis X in the interior of the cladding, each of the wires exiting from the cladding via at least one of its ends. 2. The rod thermometer as claimed in claim 1 , wherein the metal of the cladding is a type-K material. 3. The rod thermometer as claimed in claim 1 , wherein the metal of the wires is a type-K material. 4. The rod thermometer as claimed in claim 2 , wherein the cladding is either made of chromel or of a nickel/chromium alloy, and the wires are made of alumel. 5. The rod thermometer as claimed in claim 1 , wherein the wires are entirely covered with an electrical insulator except for their junction ends. 6. The rod thermometer as claimed in claim 5 , wherein the wires made of alumel are covered with an alumina deposit. 7. The rod thermometer as claimed in claim 1 , wherein a thickness of the protective cladding is smaller than or equal to 0.1 mm. 8. The rod thermometer as claimed in claim 1 , wherein an outside diameter of the wires is smaller than or equal to 0.1 mm. 9. The rod thermometer as claimed in claim 1 , comprising at least one adapter-tube made from the same metal as the cladding and of larger outside diameter than that of the cladding, the adapter tube being brazed around the cladding at the end where the metal wires exit. 10. A process for manufacturing the rod thermometer as claimed in claim 1 , comprising the following steps: cutting longitudinally along two opposite generatrices a tube made of a metal constituting one of the two metals of a thermocouple, so as to form two half tubes; welding one end of each of the plurality of wires made of a metal constituting one of the two metals of a thermocouple to the interior of at least one half tube, the ends of the welded wires being distributed in a plurality of axial and azimuthal positions; and joining the two half tubes to make the metal tube forming the protective cladding by welding along each generatrix while leaving the plurality of metal wires to exit via at least one of its ends. 11. The manufacturing process as claimed in claim 10 , wherein the welding of one of the ends of the wires to one half tube is achieved by arc welding. 12. The manufacturing process as claimed in claim 10 , wherein the welding joining the two half tubes is spot welding. 13. A method for installing the temperature detecting device according to claim 1 in a device for simulating electrically a nuclear fuel rod comprising at least one tube made of an electrically conductive material, referred to as the heated tube, that is intended to heat a liquid, in order to detect the occurrence of a boiling crisis in the liquid, in which: the cladding forming the common metal of the thermocouples is arranged in the interior of the electrical simulating device and at a distance from the heated tube, the space between the cladding and the heated tube is filled with a pressurized insulating gas and the space filled with pressurized insulating gas is sealed. 14. The installing method as claimed in claim 13 , in which the arrangement at distance is achieved by means of spacers made of an electrically insulating material that are fastened to the exterior of the cladding housing the welded wires and fitted so that there is clearance with the interior of the heated tube, in zones devoid of wires. 15. The installing method as claimed in claim 13 , in which, before the arrangement, the interior of the heated tube and/or the exterior of the cladding is treated so as to provide it/them with a thermal emissivity at least equal to 0.8. 16. The installing method as claimed in claim 15 , in which the treatment consists either of controlled oxidation of the tube or of coating with a material having a high thermal emissivity.
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