High-Q MEMS gyroscope

Patent metadata

Field	Value
Publication number	US-9835454-B2
Application number	US-201514617391-A
Country	US
Kind code	B2
Filing date	Feb 9, 2015
Priority date	Feb 9, 2015
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

A system and/or method for efficiently operating a MEMS gyroscope without drive circuitry and/or with drive circuitry and a non-constant oscillating amplitude. In a non-limiting example, drive circuitry may be utilized to drive the MEMS gyroscope proof mass to a desired oscillating amplitude, and then the drive circuitry may be powered off. Rotational velocity may be sensed while the proof mass is being driven to a desired oscillating amplitude, while the proof mass is being maintained at a desired oscillating amplitude, and/or while the proof mass amplitude decays.

First claim

The invention claimed is:

1. A MEMS gyroscope comprising:
a proof mass;
a proof mass drive circuit operable to increase an oscillation amplitude of the proof mass during a first time period and allow the oscillation amplitude of the proof mass to decrease during a second time period; and
a first sense circuit operable to determine a rotational velocity value during at least a portion of the second time period and during at least a portion of the first time period, when the MEMS gyroscope is in a low power mode.

2. The MEMS gyroscope of claim 1 , wherein the proof mass drive circuit is operable to allow the oscillation amplitude of the proof mass to decrease during the second time period by, at least in part, refraining from driving the proof mass.

3. The MEMS gyroscope of claim 1 , wherein:
the proof mass drive circuit is operable to increase the oscillation amplitude of the proof mass during the first time period by, at least in part, operating to generate a first drive signal characterized by a first drive signal amplitude; and
the proof mass drive circuit is operable to allow the oscillation amplitude of the proof mass to decrease during the second time period by, at least in part, operating to generate a second drive signal characterized by a second drive signal amplitude that is less than the first drive signal amplitude.

4. The MEMS gyroscope of claim 3 , wherein the second drive signal amplitude is non-zero.

5. The MEMS gyroscope of claim 1 , wherein the first sense circuit comprises a first sense amplifier, a gain of which is adjusted during the second time period based, at least in part, on the oscillation amplitude of the proof mass.

6. The MEMS gyroscope of claim 5 , comprising a drive sense circuit operable to sense the oscillation amplitude of the proof mass.

7. The MEMS gyroscope of claim 6 , wherein the first sense circuit and the drive sense circuit utilize different respective electrodes to sense motion of the proof mass.

8. The MEMS gyroscope of claim 7 , wherein the drive sense circuit is operable to sense the oscillation amplitude of the proof mass based, at least in part, on a quadrature component of a sensor signal.

9. The MEMS gyroscope of claim 1 , wherein the first sense circuit is operable to sense rotational velocity during at least a portion of the first time period.

10. The MEMS gyroscope of claim 1 , comprising at least one module operable to determine whether to sense rotational velocity based, at least in part, on the oscillation amplitude of the proof mass.

11. The MEMS gyroscope of claim 1 , comprising at least one module operable to select a proof mass drive trajectory from a plurality of proof mass drive trajectories.

12. The MEMS gyroscope of claim 11 , wherein the at least one module is operable to select the proof mass drive trajectory from the plurality of proof mass drive trajectories based, at least in part, on gyroscope requirements.

13. The MEMS gyroscope of claim 11 , wherein the at least one module is operable to select the proof mass drive trajectory from the plurality of proof mass drive trajectories based, at least in part, on power supply characteristics.

14. A MEMS gyroscope comprising:
a proof mass;
a proof mass drive circuit operable to drive the proof mass during a first time period and refrain from driving the proof mass during a second time period; and
a first sense circuit operable to determine a rotational velocity value during at least a portion of the second time period and during at least a portion of the first time period, when the MEMS gyroscope is in a low power mode.

15. The MEMS gyroscope of claim 14 , wherein the first sense circuit is operable to sense rotational velocity during at least a portion of the first time period.

16. The MEMS gyroscope of claim 14 , wherein the first sense circuit comprises a first sense amplifier, a gain of which is adjusted during the second time period based, at least in part, on the oscillation amplitude of the proof mass.

17. The MEMS gyroscope of claim 16 , comprising a drive sense circuit operable to sense the oscillation amplitude of the proof mass.

18. The MEMS gyroscope of claim 14 , comprising at least one module operable to determine whether to sense rotational velocity based, at least in part, on an oscillation amplitude of the proof mass.

19. The MEMS gyroscope of claim 14 , comprising a drive sense amplifier and wherein, during at least a portion of the second time period, the drive sense amplifier operates to output a signal utilized by the first sense circuit to demodulate a Coriolis sense signal.

20. The MEMS gyroscope of claim 14 , comprising a drive sense amplifier and an oscillator, and wherein, during at least a portion of the second time period, the drive sense amplifier is turned off and the oscillator operates to output a signal utilized by the first sense circuit to demodulate a Coriolis sense signal.

21. A MEMS gyroscope comprising:
a proof mass;
a proof mass drive circuit operable to increase an oscillation amplitude of the proof mass during a first time period, maintain the oscillation amplitude of the proof mass during a second time period, and allow the oscillation amplitude of the proof mass to decrease during a third time period; and
a sense circuit operable to determine a rotational velocity value during at least a portion of the first time period, during the second time period, and during at least a portion of the third time period, when the MEMS gyroscope is in a low power mode.

22. The MEMS gyroscope of claim 21 , wherein the first sense circuit comprises a first sense amplifier, a gain of which is adjusted during at least a portion of the first time period and during at least a portion of the third time period based, at least in part, on the oscillation amplitude of the proof mass.

23. A MEMS gyroscope comprising:
a proof mass;
a proof mass drive circuit operable to increase an oscillation amplitude of the proof mass during a first time period and allow the oscillation amplitude of the proof mass to decrease during a second time period; and
a first sense circuit operable to determine a rotational velocity value during at least a portion of the first time period when the MEMS gyroscope is in a low power mode.

Assignees

• Invensense Inc

Inventors

• Lloyd Stephen

Classifications

• G01C19/5614

  Signal processing · CPC title

• G01C19/5719 Primary

  using planar vibrating masses driven in a translation vibration along an axis · CPC title

• G01C19/5776 Primary

  Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719 · CPC title

• G01C19/5726

  Signal processing · CPC title