Method for producing group III nitride crystal, group III nitride crystal, and semiconductor device

Patent metadata

Field	Value
Publication number	US-9834859-B2
Application number	US-201314371607-A
Country	US
Kind code	B2
Filing date	Jan 10, 2013
Priority date	Jan 11, 2012
Publication date	Dec 5, 2017
Grant date	Dec 5, 2017

Abstract

The present invention provides a method for producing a Group III nitride crystal, capable of producing a Group III nitride crystal in a large size with few defects and high quality. The method is a method for producing a Group III nitride crystal ( 13 ), including: a seed crystal selection step of selecting plural parts of a Group III nitride crystal layer ( 11 ) as seed crystals for generation and growth of Group III nitride crystals ( 13 ); a contact step of causing the surfaces of the seed crystals to be in contact with an alkali metal melt; a crystal growth step of causing a Group III element and nitrogen to react with each other under a nitrogen-containing atmosphere in the alkali metal melt to generate and grow the Group III nitride crystals ( 13 ), wherein the seed crystals are hexagonal crystals, in the seed crystal selection step, the seed crystals are arranged so that m-planes of the respective crystals grown from the seed crystals that are adjacent to each other do not substantially coincide with each other, and in the crystal growth step, the plural Group III nitride crystals ( 13 ) grown from the plural seed crystals by the growth of the Group III nitride crystals ( 13 ) are bound.

First claim

The invention claimed is:

1. A method for producing a Group III nitride crystal, comprising:
a seed crystal selection step of selecting plural parts of previously-provided Group III nitride as seed crystals for generation and growth of Group III nitride crystals;
a contact step of causing the surfaces of the seed crystals to be in contact with an alkali metal melt;
a crystal growth step of causing a Group III element and nitrogen to react with each other under a nitrogen-containing atmosphere in the alkali metal melt to generate and grow Group III nitride crystals, wherein
the seed crystals are hexagonal crystals,
in the seed crystal selection step, the seed crystals are arranged so that a-axes or c-axes of the respective seed crystals that are adjacent to each other almost coincide with each other, and the angle formed between the a-axes or the c-axes is 5° or less, and
in the crystal growth step, the plural Group III nitride crystals grown from the plural seed crystals by the growth of the Group III nitride crystals are bound, wherein the dislocation density of the produced Group III nitride crystal is 1.0×10 4 cm −2 or less.

2. The method according to claim 1 , wherein
the seed crystals have the respective c-planes,
in the seed crystal selection step, the c-planes are selected as crystal growth planes of the respective seed crystals, and
the seed crystals are arranged so that a-axes of the seed crystals that are adjacent to each other almost coincide with each other.

3. The method according to claim 1 , wherein
in the seed crystal selection step, the previously-provided Group III nitride is a Group III nitride crystal layer, and the step of selecting plural parts of previously-provided Group III nitride as seed crystals includes:
arranging a mask having plural through holes on the Group III nitride crystal layer, and selecting planes of the Group III nitride crystal layer exposed from the through holes as the seed crystals, or

in the seed crystal selection step, the previously-provided Group III nitride comprises plural Group III nitride crystals arranged on a substrate, and the plural Group III nitride crystals are selected as the seed crystals.

4. The method according to claim 3 , wherein
in the seed crystal selection step,
the previously-provided Group III nitride is a Group III nitride crystal layer,
a mask having plural through holes is arranged on the Group III nitride crystal layer,
planes of the Group III nitride crystal layer exposed from the through holes are selected as the seed crystals, and
the mask does not adhere to the Group III nitride crystal layer.

5. The method according to claim 3 , wherein
in the seed crystal selection step, the contact step, and the crystal growth step, plural units each composed of the Group III nitride crystal layer and the mask or plural units each composed of the substrate and the Group III nitride layer are adjacently arranged in parallel, and
in the crystal growth step, the Group III nitride crystals grown from the respective units that are adjacent to each other are bound by the growth of the Group III nitride crystals.

6. The method according to claim 3 , wherein
the mask or the substrate comprises at least one selected from the group consisting of Al x Ga 1−x N (0<x≦1), an oxide of the Al x Ga 1−x N (0<x≦1), diamond-like carbon, silicon nitride, silicon oxide, silicon oxynitride, aluminum oxide, aluminum oxynitride, silicon carbide, yttrium oxide, yttrium aluminum garnet (YAG), tantalum, rhenium, and tungsten.

7. The method according to claim 3 , wherein
the through holes of the mask or convex portions of the substrate each has a dot shape.

8. The method according to claim 7 , wherein
the diameter of the dot is in the range from 0.01 to 10 mm.

9. The method according to claim 3 , wherein
a distance between the through holes of the mask adjacent to each other or a distance between convexes of the substrate adjacent to each other is 0.05 mm or more.

10. The method according to claim 1 , wherein
the Group III nitride crystals generated and grown in the crystal growth step are Group III nitride crystals represented by Al x Ga y In 1−x−y N (0≦x≦1, 0≦y≦1, x+y≦1).

11. The method according to claim 1 , wherein
the diameter of the produced Group III nitride crystal is 15 cm or more.

Assignees

• Univ Osaka

Inventors

• Mori Yusuke
• Imade Mamoru
• Yoshimura Masashi
• Hirao Mihoko
• Imanishi Masayuki

Classifications

• H10P14/3466

  Crystal orientation · CPC title

• H10P14/3416

  Nitrides · CPC title

• H10P14/2921

  being crystalline insulating materials · CPC title

• H10P14/276

  Lateral overgrowth · CPC title

• H10P14/274

  using seed materials · CPC title