Substrate Processing Method, Apparatus, and System
US-2024363405-A1 · Oct 31, 2024 · US
US9834842B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9834842-B2 |
| Application number | US-201514713377-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 15, 2015 |
| Priority date | May 15, 2015 |
| Publication date | Dec 5, 2017 |
| Grant date | Dec 5, 2017 |
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A method of making a fibrous part is provided. The method may comprise forming a porous structure with an annular geometry. A first entrance channel and a second entrance channel may be formed with the entrance channels defined by a surface of the preform. The entrance channels may also extend in a radial direction from an inner diameter of the annular porous structure partially across the surface. An exit channel may be formed between the entrance channels and defined by the surface. The exit channel may extend in a radial direction from an outer diameter of the annular porous structure partially across the surface.
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What is claimed is: 1. A method of making a fibrous part, comprising: forming a porous structure with an annular geometry; forming an entrance channel defined by a surface of the porous structure and extending in a radial direction from an inner diameter of the porous structure only partially across the surface; forming an exit channel defined by the surface and extending in the radial direction from an outer diameter of the porous structure only partially across the surface; and densifying the porous structure using a pressure gradient chemical vapor infiltration process. 2. The method of claim 1 , wherein the forming the entrance channel comprises pressing the entrance channel into the surface of the porous structure. 3. The method of claim 1 , further comprising stacking a second porous structure over the porous structure. 4. The method of claim 3 , further comprising disposing a seal plate between the porous structure and the second porous structure. 5. The method of claim 3 , further comprising: forming a second exit channel in a surface of the second porous structure; and stacking the surface of the porous structure against the surface of the second porous structure with the second exit channel and the entrance channel staggered. 6. The method of claim 1 , further comprising urging a gas into the entrance channel, through the porous structure, and out the exit channel. 7. A method of making a fibrous part, claim 1 , further comprising: forming a porous structure with an annular geometry; forming an entrance channel defined by a surface of the porous structure and extending in a radial direction from an inner diameter of the porous structure only partially across the surface; forming an exit channel defined by the surface and extending in the radial direction from an outer diameter of the porous structure only partially across the surface; and densifying the porous structure using a thermal gradient chemical deposition process. 8. The method of claim 7 , wherein the forming the entrance channel comprises pressing the entrance channel into the surface of the porous structure. 9. The method of claim 7 , further comprising stacking a second porous structure over the porous structure. 10. The method of claim 9 , further comprising disposing a seal plate between the porous structure and the second porous structure. 11. The method of claim 9 , further comprising: forming a second exit channel in a surface of the second porous structure; and stacking the surface of the porous structure against the surface of the second porous structure with the second exit channel and the entrance channel staggered. 12. A method of making a fibrous part, comprising: forming a porous structure with an annular geometry; forming an entrance channel defined by a surface of the porous structure and extending in a radial direction from an inner diameter of the porous structure only partially across the surface; forming an exit channel defined by the surface and extending in the radial direction from an outer diameter of the porous structure only partially across the surface; and stacking a second porous structure over the porous structure. 13. The method of claim 12 , further comprising disposing a seal plate between the porous structure and the second porous structure. 14. The method of claim 12 , further comprising: forming a second exit channel in a surface of the second porous structure; and stacking the surface of the porous structure against the surface of the second porous structure with the second exit channel and the entrance channel staggered. 15. The method of claim 12 , further comprising urging a gas into the entrance channel, through the porous structure, and out the exit channel. 16. The method of claim 12 , further comprising using a chemical infiltration process to densify the porous structure. 17. The method of claim 12 , further comprising densifying the porous structure and the second porous structure using a thermal gradient chemical deposition process. 18. The method of claim 12 , further comprising densifying the porous structure and the second porous structure using a pressure gradient chemical vapor infiltration process.
Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title
the material being of low mechanical strength, e.g. carbon, beryllium; Torque transmitting members therefor · CPC title
layered · CPC title
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