Embedded metallic structures in glass

Patent metadata

Field	Value
Publication number	US-9832867-B2
Application number	US-201514949277-A
Country	US
Kind code	B2
Filing date	Nov 23, 2015
Priority date	Nov 23, 2015
Publication date	Nov 28, 2017
Grant date	Nov 28, 2017

Abstract

A device having embedded metallic structures in a glass is provided. The device includes a first wafer, at least one conductive trace, a planarized insulation layer and a second wafer. The first wafer has at least one first wafer via that is filled with conductive material. The at least one conductive trace is formed on the first wafer. The at least one conductive trace is in contact with the at least one first wafer via that is filled with the conductive material. The planarized insulation layer is formed over the first wafer and at least one conductive trace. The planarized insulation layer further has at least one insulation layer via that provides a path to a portion of the at least one conductive trace. The second wafer is bonded to the planarized insulation layer.

First claim

The invention claimed is:

1. A device having embedded metallic structures in a glass comprising: a first wafer having at least one first wafer via filled with conductive material; at least one conductive trace formed on the first wafer, the at least one conductive trace being in contact with the at least one first wafer via filled with the conductive material; a planarized insulation layer formed over the first wafer and at least one conductive trace, the planarized insulation layer further having at least one insulation layer via that provides a path to a portion of the at least one conductive trace, at least one conductive contact layer within at least a portion of the at least one insulation layer via, the at least one conductive contact layer being in contact with the at least one conductive trace: and a second wafer fusion bonded to the planarized insulation layer, the second wafer having at least one non-filled via aligned with the at least one conductive contact layer, and at least one antennal structure in the first wafer, the antenna structure comprising a metal filled channel in the first wafer in contact with a second first wafer via filled with conductive material.

2. The device having embedded metallic structures in a glass of claim 1 , wherein the first wafer and the second wafer are made of at least one from a group including silica, borosilicate glass, sapphire and quartz.

3. The device having embedded metallic structures in a glass of claim 1 , wherein the conductive trace comprises at least one of titanium nitride, titanium, niobium, tantalum, platinum, platinum, iridium, titanium nitride alloy, titanium alloy, niobium alloy, tantalum alloy, platinum alloy, platinum alloy and iridium alloy and the conductive material that fills the first wafer via comprises at least one of copper, tungsten, copper glass composite, platinum glass composite, silver, silver filled epoxy and silver filled glass.

4. The device having embedded metallic structures in a glass of claim 1 , wherein the planarized insulation layer is at least one layer of silicon dioxide.

5. The device having embedded metallic structures in a glass of claim 1 , wherein the planarized insulation layer is made up of a plurality of sub-layers of silicon dioxide and silicon nitride.

6. The device having embedded metallic structures in a glass of claim 1 , wherein the embedded metallic structure in glass is part of a package of an implantable medical device.

7. The device having embedded metallic structures in glass of claim 1 , wherein the at least one conductive contact layer is a layer comprising titanium, titanium nitride, niobium or tantalum.

8. The device of claim 1 , wherein the second wafer has a thickness that is greater than 25 μm.

9. The device having embedded metallic structures in glass of claim 1 , wherein the at least one conductive trace is at least partially positioned within at least one trench in a surface of the first wafer.

10. A device having embedded metallic structures in a glass comprising: a first wafer having at least one first wafer via filled with conductive material; at least one conductive trace formed on the first wafer, the at least one conductive trace being in contact with the at least one first wafer via filled with the conductive material; a planarized insulation layer formed over the first wafer and at least one conductive trace, the planarized insulation layer further having at least one insulation layer via that provides a path to a portion of the at least one conductive trace, at least one conductive contact layer within at least a portion of the at least one insulation layer via, the at least one conductive contact layer being in contact with the at least one conductive trace: and a second wafer laser bonded to the planarized insulation layer, the second wafer having at least one non-filled via aligned with the at least one conductive contact layer, and at least one antennal structure in the first wafer, the antenna structure comprising a metal filled channel in the first wafer in contact with a second first wafer via filled with conductive material.

Assignees

• Medtronic Inc

Inventors

• Day John K
• Ruben David A
• Sandlin Michael S

Classifications

• H10P72/7424

  used as a support during the manufacture of self-supporting substrates · CPC title

• H10P72/74

  using temporarily an auxiliary support · CPC title

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W70/685

  comprising multiple insulating layers · CPC title

• H10W70/692 Primary

  Ceramics or glasses · CPC title