Semiconductor device and manufacturing method of semiconductor device
US-2015349496-A1 · Dec 3, 2015 · US
US9831631B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9831631-B2 |
| Application number | US-201514737026-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 11, 2015 |
| Priority date | May 17, 2012 |
| Publication date | Nov 28, 2017 |
| Grant date | Nov 28, 2017 |
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In an embodiment, a laser includes a gain section. The gain section includes an active region, an upper separate confinement heterostructure (SCH), and a lower SCH. The upper SCH is above the active region and has a thickness of at least 60 nanometers (nm). The lower SCH is below the active region and has a thickness of at least 60 nm.
Opening claim text (preview).
What is claimed is: 1. A laser comprising: a gain section comprising: an active region; an upper separate confinement heterostructure (SCH) above the active region having a thickness of at least 60 nanometers (nm); and a lower SCH below the active region having a thickness of at least 60 nm; and a gain electrode coupled to the gain section and configured to be coupled to a direct modulation source that is configured to provide a modulation signal having a data rate of about 10 gigabits per second or higher; wherein in response to application of the modulation signal to the gain electrode, the laser is configured to generate an optical signal having a frequency modulation profile exhibiting both transient chirp and adiabatic chirp, and a ratio of transient chirp to adiabatic chirp is in a range from 1:3 to 1:4. 2. The laser of claim 1 , wherein the modulation signal applied to the gain section has a modulation swing of at least 40 milliamps peak-to-peak (mApp). 3. The laser of claim 2 , wherein the gain section has a length of 300 micrometers (μm) or less. 4. The laser of claim 3 , wherein the modulation signal applied to the gain section has a modulation swing of about 60 mApp and the gain section has a length of about 200 μm. 5. The laser of claim 1 , wherein the laser has a reach of 21 kilometers or more with a bit error rate of about 1×10−3. 6. The laser of claim 1 , wherein the thickness of the upper SCH is less than 125 nm and the thickness of the lower SCH is less than 125 nm. 7. The laser of claim 1 , wherein the laser comprises a distributed Bragg reflector (DBR) laser and the DBR laser is tuned toward a long wavelength side of a Bragg peak associated with the DBR laser. 8. The laser of claim 1 , wherein the laser comprises a distributed Bragg reflector (DBR) laser and the DBR laser comprises a front DBR laser in which a passive section of the DBR laser is positioned between the gain section and a front side of the front DBR laser having an antireflection (AR) coating. 9. The laser of claim 1 , wherein the laser comprises a distributed Bragg reflector (DBR) laser and the DBR laser comprises a rear DBR laser in which the gain section is positioned between a passive section of the DBR laser and a front side of the rear DBR laser having an antireflection (AR) coating. 10. The laser of claim 1 , further comprising a passive section coupled to the gain section, the passive section comprising a Bragg filter in optical communication with the active region such that the laser comprises a distributed Bragg reflector (DBR) laser, wherein: the passive section comprises a first passive section; the Bragg filter comprises a first Bragg filter; the DBR laser further comprises a second passive section including a second Bragg filter in optical communication with the active region; and the gain section is positioned between the first passive section and the second passive section such that the DBR laser comprises a front/rear DBR laser. 11. The laser of claim 1 , wherein a relaxation oscillation frequency of the laser is at least 12 gigahertz (GHz) and a damping caused by carrier transport effect in the gain section is at least 12 GHz. 12. The laser of claim 11 , wherein the relaxation oscillation frequency of the laser is at least 16 GHz. 13. The laser of claim 1 , wherein: the thickness of the upper SCH is about 100 nanometers (nm); the thickness of the lower SCH is about 100 nm; and a K factor of the laser is 0.32 nanoseconds (ns). 14. An optical transmitter comprising: a direct modulation source; a high-pass electrical filter coupled to the direct modulation source, the high-pass electrical filter having a time constant on the order of 1 nanosecond (ns); and a laser coupled to the high-pass electrical filter, the laser comprising: a gain section including: an active region; an upper separate confinement heterostructure (SCH) above the active region having a thickness of at least 60 nanometers (nm); and a lower SCH below the active region having a thickness of at least 60 nm. 15. The optical transmitter of claim 14 , wherein the high-pass electrical filter comprises a capacitor coupled in parallel with a first resistor, the parallel-coupled capacitor and first resistor being coupled in series with a second resistor. 16. The optical transmitter of claim 15 , wherein the capacitor has a capacitance of about 50 picofarads (pF), the first resistor has a resistance of about 15 Ohms (Ω), and the second resistor has a resistance of about 45 Ω. 17. The optical transmitter of claim 14 , wherein: the thickness of the upper SCH is about 125 nanometers (nm); the thickness of the lower SCH is about 125 nm; and a K factor of the laser is 0.34 nanoseconds (ns). 18. The optical transmitter of claim 14 , wherein the gain section is biased with a relatively high bias current density of at least 0.2 milliamps (mA) per micrometer (μm). 19. A laser comprising: a gain section comprising: an active region; an upper separate confinement heterostructure (SCH) above the active region having a thickness of at least 60 nanometers (nm); and a lower SCH below the active region having a thickness of at least 60 nm; and a gain electrode coupled to the gain section and configured to be coupled to a direct modulation source that is configured to provide a modulation signal having a data rate of about 10 gigabits per second or higher; wherein a relaxation oscillation frequency of the laser is at least 12 gigahertz (GHz) and a damping caused by carrier transport effect in the gain section is at least 12 GHz.
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