Method for analyzing evolved gas and evolved gas analyzer

Patent metadata

Field	Value
Publication number	US-9831077-B2
Application number	US-201615356580-A
Country	US
Kind code	B2
Filing date	Nov 19, 2016
Priority date	Nov 20, 2015
Publication date	Nov 28, 2017
Grant date	Nov 28, 2017

Abstract

Disclosed herein is an evolved gas analyzer and a method for analyzing evolved gas, the apparatus enhancing detection accuracy for gas component without providing the apparatus in a large size. The apparatus includes a heating unit evolving a gas component by heating a sample, a detecting means detecting the gas component, a gas channel connecting the heating unit to the detecting means, the gas channel through which mixed gas of the gas component and carrier gas flows, wherein the gas channel includes a branching channel being open to outside and including a discharge flow rate controlling device, and a flow rate control device controlling the discharge flow rate controlling device based on a detection signal received from the detecting means so as to control the detection signal to be within a predetermined range.

First claim

What is claimed is:

1. An evolved gas analyzer comprising:
a heating unit evolving a gas component by heating a sample,
a detecting means detecting the gas component evolved by the heating unit, and
a gas channel making connection between the heating unit and the detecting means in which mixed gas of the gas component and carrier gas, carrying the gas component to the detecting means, flows,
wherein the gas channel comprises a branching channel open to outside, the branching channel comprises a discharge flow rate controlling device, adjusting flow rate of the mixed gas discharged to outside, and the evolved gas analyzer further comprises a flow rate control device controlling the discharge flow rate controlling device based on a detection signal from the detecting means so as to bring the detection signal to be within a given range.

2. The apparatus of claim 1 , further comprising a heat retaining unit, heating or retaining heat of the gas channel or the branching channel.

3. The apparatus of claim 1 , further comprising:
a forced discharge unit, discharging the mixed gas flowing in the branching channel by force, on a discharge side of the branching channel.

4. The apparatus of claim 1 , wherein an angle between a first axis of the gas channel at a point of contact with the branching channel and a second axis of the branching channel at a point of contact with the gas channel is between 30 to 60 degrees and the branching channel discharges naturally.

5. The apparatus of claim 2 , wherein an angle between a first axis of the gas channel at a point of contact with the branching channel and a second axis of the branching channel at a point of contact with the gas channel is between 30 to 60 degrees and the branching channel discharges naturally.

6. The apparatus of claim 1 , further comprising a heating control device maintaining the heating unit at a certain temperature, wherein the detecting means is a mass spectrometer.

7. The apparatus of claim 2 , further comprising a heating control device maintaining the heating unit at a certain temperature, wherein the detecting means is a mass spectrometer.

8. The apparatus of claim 3 , further comprising a heating control device maintaining the heating unit at a certain temperature, wherein the detecting means is a mass spectrometer.

9. The apparatus of claim 4 , further comprising a heating control device maintaining the heating unit at a certain temperature, wherein the detecting means is a mass spectrometer.

10. The apparatus of claim 5 , further comprising a heating control device maintaining the heating unit at a certain temperature, wherein the detecting means is a mass spectrometer.

11. The apparatus of claim 1 , wherein the detecting means is a mass spectrometer, the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

12. The apparatus of claim 2 , wherein the detecting means is a mass spectrometer, the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

13. The apparatus of claim 3 , wherein the detecting means is a mass spectrometer, the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

14. The apparatus of claim 4 , wherein the detecting means is a mass spectrometer, the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

15. The apparatus of claim 5 , wherein the detecting means is a mass spectrometer, the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

16. The apparatus of claim 6 , wherein the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

17. The apparatus of claim 7 , wherein the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

18. The apparatus of claim 8 , wherein the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

19. The apparatus of claim 9 , wherein the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

20. The apparatus of claim 10 , wherein the evolved gas analyzer further comprises an ion source between the gas channel and the mass spectrometer, ionizing the gas component of the mixed gas, and the flow rate control device controls the discharge flow rate controlling device to increase the discharge flow rate of the mixed gas when a detection signal from the detecting means is outside the given range.

21. A method for analyzing evolved gas, comprising:
generating mixed gas by mixing a gas component evolved by heating a sample with carrier gas,
introducing the mixed gas into a detecting means through a gas channel,
detecting the gas component with the detecting means, and
discharging a portion of the mixed gas to outside from a branching channel installed on the gas channel and open to outside based on a detection signal from the detecting means so as to bring the detection signal to be within a given range.

Assignees

• Hitachi High-Tech Science Corp

Inventors

• Akiyama Hideyuki
• Watanabe Masafumi
• Maruoka Kantaro

Classifications

• H01J49/0422 Primary

  for gaseous samples (interfaces to gas chromatographs G01N30/7206) · CPC title

• H01J49/10

  Ion sources; Ion guns · CPC title

• G01N30/7206

  interfaced to gas chromatograph (interfaces in general for introducing or extracting samples to be analysed with specially adapted mass spectrometer, see H01J49/04) · CPC title

• H01J49/0468

  with means for heating or cooling the sample · CPC title

• G01N33/0009

  General constructional details of gas analysers, e.g. portable test equipment (devices for withdrawing samples in the gaseous state G01N1/22) · CPC title