Systems for Providing Illumination in Optical Metrology
US-2017146399-A1 · May 25, 2017 · US
US9829636B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9829636-B2 |
| Application number | US-201414784761-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 15, 2014 |
| Priority date | Apr 17, 2013 |
| Publication date | Nov 28, 2017 |
| Grant date | Nov 28, 2017 |
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Apparatus and method are disclosed for co-aligning a number of laterally displaced radiation beams from respective radiation source outputs, each beam having a respective waveband. The apparatus comprises a collimating element for receiving each of said radiation beams with respective lateral displacements and a combining element for receiving each of said radiation beams passed by said collimating element. The apparatus further comprises a radiation source mount for positioning the radiation source outputs relative to the collimating element. The method comprises longitudinally positioning the radiation source outputs upon the mount, relative to the collimating element, in dependence upon the waveband of each beam, to cause the radiation beams passed by the combining element to be co-aligned.
Opening claim text (preview).
The invention claimed is: 1. An apparatus for co-aligning a number of laterally displaced radiation beams from respective radiation source outputs, each beam having a respective waveband, the apparatus comprising: a collimating element for receiving each of said radiation beams with respective lateral displacements; a combining element for receiving each of said radiation beams passed by said collimating element; and a radiation source mount for positioning the radiation source outputs relative to the collimating element; wherein the radiation source outputs are longitudinally positionable upon the mount relative to the collimating element in dependence upon the waveband of each beam to cause the radiation beams passed by the combining element to be co-aligned, wherein the radiation source mount is arranged to support a number of waveguides, each being arranged to guide a different wavelength of radiation from a respective radiation source, wherein each waveguide includes an output end located at a different distance from the collimating element, the distance being based upon each of the different wavelengths being guided in each respective waveguide, and wherein the radiation source mount comprises a translation stage for longitudinally displacing the radiation source outputs from the collimating element. 2. The apparatus according to claim 1 , wherein the radiation source mount comprises a number of longitudinal channels disposed therein, each for separately receiving one of the waveguides. 3. The apparatus according to claim 2 , wherein the channels are orientated substantially parallel to each other and to an optical axis of the collimating element. 4. The apparatus according to claim 3 , wherein the relative lateral separation of the channels within the radiation source mount from the optical axis of the collimating element is based on the waveband of the respective radiation source. 5. The apparatus according to claim 2 , wherein the radiation source mount further comprises a clamp for clamping the waveguides within their respective channels. 6. The apparatus according to claim 1 , wherein the collimating element comprises a lens or a lens arrangement. 7. The apparatus according to claim 1 , wherein the combining element comprises a diffraction grating or a prism. 8. A method of co-aligning a number of laterally displaced radiation beams output from respective radiation sources, each beam having a respective waveband, the method comprising: longitudinally positioning the output of the radiation sources upon a mount relative to a collimating element, in dependence upon the waveband of the respective beam; collimating the radiation beams output from the radiation sources at the collimating element; and combining the collimated radiation beams at a combining element, such that the radiation beams passed by the combining element become co-aligned, wherein the radiation source outputs are longitudinally positionable upon the mount relative to the collimating element in dependence upon the waveband of each beam, wherein the mount is arranged to support a number of waveguides, each being arranged to guide a different wavelength of radiation from a respective radiation source, wherein each waveguide includes an output end located at a different distance from the collimating element, the distance being based upon each of the different wavelengths being guided in each respective waveguide, and wherein the mount comprises a translation stage for longitudinally displacing the radiation source outputs from the collimating element. 9. The method according to claim 8 , further comprising fixing the position of the output of the radiation sources once the beams passed by the combining element become co-aligned. 10. The A method according to claim 8 , wherein the mount comprises a number of longitudinal channels disposed therein, each for separately receiving one of the waveguides. 11. The method according to claim 10 , wherein the channels are orientated substantially parallel to each other and to an optical axis of the collimating element. 12. The method according to claim 11 , wherein the relative lateral separation of the channels within the radiation source mount from the optical axis of the collimating element is based on the waveband of the respective radiation source. 13. An apparatus for co-aligning a number of laterally displaced radiation beams from respective radiation source outputs, each beam having a respective waveband, the apparatus comprising: a collimating element for receiving each of said radiation beams with respective lateral displacements, wherein the collimating element comprises a lens or a lens arrangement; a combining element for receiving each of said radiation beams passed by said collimating element, wherein the combining element comprises a diffraction grating or a prism; and a radiation source mount for positioning the radiation source outputs relative to the collimating element, wherein the radiation source mount comprises a translation stage for longitudinally displacing the radiation source outputs from the collimating element; wherein the radiation source outputs are longitudinally positionable upon the mount relative to the collimating element in dependence upon the waveband of each beam, such that each radiation source output is in a different longitudinal position relative to the other radiation source outputs, to cause the radiation beams passed by the combining element to be co-aligned. 14. The apparatus according to claim 13 , wherein the radiation source mount is arranged to support a number of waveguides, each being arranged to guide radiation from a respective radiation source. 15. The apparatus according to claim 14 , wherein the radiation source mount comprises a number of longitudinal channels disposed therein, each for separately receiving one of the waveguides. 16. The apparatus according to claim 15 , wherein the channels are orientated substantially parallel to each other and to an optical axis of the collimating element, and wherein the relative lateral separation of the channels within the radiation source mount from the optical axis of the collimating element is based on the waveband of the respective radiation source. 17. The apparatus according to claim 15 , wherein the radiation source mount further comprises a lid for clamping the waveguides within their respective channels.
utilising a bulk dispersive element, e.g. prism · CPC title
for splitting or combining different wavelengths (G02B27/1086, G02B27/141 take precedence) · CPC title
operating by diffraction only · CPC title
the mechanical coupling means being grooves (G02B6/3652 takes precedence) · CPC title
Diffractive element operating in reflection · CPC title
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