Biosensor device and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-9829485-B2
Application number	US-74302608-A
Country	US
Kind code	B2
Filing date	Nov 12, 2008
Priority date	Nov 16, 2007
Publication date	Nov 28, 2017
Grant date	Nov 28, 2017

Abstract

A biosensor device for detecting biological particles, the biosensor device comprising a substrate, a regular pattern of pores formed in the substrate, and a plurality of sensor active structures each of which being arranged on a surface of a corresponding one of the pores, wherein each of the plurality of sensor active structures is sensitive to specific biological particles and is adapted to modify electromagnetic radiation interaction properties in the event of the presence of the respective biological particles.

First claim

The invention claimed is:

1. A biosensor device for detecting biological particles, the biosensor device comprising
a substrate;
a regular pattern of pores formed in, and defined by, recesses formed in a surface of the substrate and including sub-groups of pores having different sized-based biosensing characteristics, relative to other sub-groups of pores, each of the pores having sidewalls defining an opening at a common surface of the substrate and extending into the substrate, wherein the regular pattern follows an ordering rule; and
a plurality of sensor active structures each of which include a material and are-arranged on a surface of a corresponding one of the pores, wherein each of the plurality of sensor active structures on the substrate is sensitive to specific biological particles and is adapted to modify electromagnetic radiation reflection properties of the biosensor device in an event of a presence of the respective biological particles, wherein
the regular pattern of pores comprises one of the group consisting of a matrix-like pattern, a pattern in which the pores are arranged in rows and columns perpendicular to the rows, and a hexagonal pattern,
the regular pattern includes at least one hydrophobic section of pores and at least one hydrophilic section of pores, wherein the at least one hydrophobic and hydrophilic section of pores includes pores with a hydrophobic or hydrophilic coating on an inner surface of the pores and
the regular pattern which follows an ordering rule includes at least one of:
a pattern in which adjacent pores have the same distance from one another in one or two dimensions,
pores having a fixedly controlled correlation of sizes, dimensions, and shapes,
pores arranged parallel to one another,
pores having the same geometrical shape,
pores extending with the same depth into a substrate,
pores having the same cross-sectional area or shape at a main surface of the substrate, and
deterministically-defined pores.

2. The biosensor device of claim 1 , wherein the pores are micropores or nanopores defined by the recesses formed in the surface of substrate, and wherein
a first one of the sub-groups of pores includes a first type of the sensor active structures that is responsive to a first type of the biological particles by modifying the electromagnetic radiation reflection properties in a first manner, and
a second one of the sub-groups of pores includes a second type of the sensor active structures that is responsive to a second type of the biological particles that is different than the first type of the biological particles, by modifying the electromagnetic radiation reflection properties in a second manner that is different than and detectable relative to the first manner.

3. The biosensor device of claim 1 , wherein the pores defined by the recesses formed in the surface of substrate have a diameter at a surface of the substrate in a range of about 5 nm to about 5 μm.

4. The biosensor device of claim 1 , wherein the pores defined by the recesses formed in the surface of substrate extend into a surface of the substrate to a depth in a range of about 10 nm to about 100 μm.

5. The biosensor device of claim 1 , wherein the sub-groups of pores differ regarding at least one biosensing property, wherein the electromagnetic radiation reflection properties include electromagnetic radiation beams after reflection by the sensor active structures of the substrate.

6. The biosensor device of claim 5 , wherein the at least one biosensing property comprises at least one of the group consisting of a diameter of the pores, a depth of the pores, a volume of the pores, and probes of the sensor active structures arranged in the pores.

7. The biosensor device of claim 1 , wherein the substrate comprises a photonic band gap structure, and wherein the pores are arranged in a pattern in which the center of each pore is at a regularly-spaced location in a pattern of the pores, relative to the center of the other pores, and wherein the biosensor device is further configured and arranged to detect the presence of the respective biological particles using label-free detection.

8. The biosensor device of claim 1 , wherein each of the plurality of sensor active structures is adapted to further modify, in the event of the presence of the respective biological particles, at least one of the group consisting of, electromagnetic radiation transmission properties, electromagnetic radiation absorption properties, and electromagnetic radiation wavelength properties.

9. The biosensor device of claim 1 , wherein the substrate comprises one of the group consisting of a semiconductor substrate, a silicon substrate, a germanium substrate, a group IV semiconductor substrate, a group III-group V semiconductor substrate, a glass substrate, and a plastics substrate.

10. The biosensor device of claim 1 , comprising an electromagnetic radiation source adapted for generating electromagnetic radiation to be directed towards the regular pattern of pores.

11. The biosensor device of claim 1 , comprising an electromagnetic radiation detector adapted for detecting electromagnetic radiation after interaction with the regular pattern of pores.

12. The biosensor device of claim 1 , comprising one or more capture molecules arranged at a surface of each of the plurality of sensor active structures and being adapted for interacting with the biological particles.

13. The biosensor device according to claim 1 , comprising an evaluation unit, including a processing circuit, and adapted for evaluating the detection to thereby identify the biological particles.

14. The biosensor device according to claim 1 , manufactured in CMOS technology and including a label-free biosensor device configured and arranged to detect the presence of the respective biological particles using label-free detection.

15. The biosensor device of claim 1 , wherein pores defined by the recesses formed in the surface of the substrate in at least one of the sub-groups of pores have a different pore diameter than a pore diameter of pores in another one of the sub-groups of pores.

16. The biosensor device of claim 1 , wherein pores defined by the recesses formed in the surface of substrate in at least one of the sub-groups of pores have a different pore volume than a pore volume of pores in another one of the sub-groups of pores.

17. An apparatus comprising:
a substrate configured and arranged with sets of recessed pores, and defined by, recesses or indentations formed in a surface of the substrate, at least one of the sets of recessed pores having differing sized-based biosensing properties than another set of recessed pores, each of the pores having an opening at a common surface of the substrate;
an electromagnetic radiation source configured and arranged to generate electromagnetic radiation directed towards the sets of recessed pores;
a plurality of sensor active structures, each of which include a material and are on sidewalls of the sets of recessed pores, the plurality of sensor active structures configured and arranged to exhibit electromagnetic radiation reflection properties that are responsive to respective biological particles; and
an electromagnetic radiation detector configured and arranged to detect different ones of the respective biological particles based on differently-modified electromagnetic radiation reflection properties of the sensor active structures, wherein the electromagnetic radiation reflection properties include electromagnetic radiation beams after reflection by the sensor active structures

Assignees

• Garcia Tello Pablo
• Roozeboom Freddy
• Nxp Bv

Inventors

• Garcia Tello Pablo
• Roozeboom Freddy

Classifications

• G01N33/54326

  Magnetic particles · CPC title

• G01N33/54373 Primary

  involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings · CPC title

• G01N21/59

  Transmissivity (G01N21/25 takes precedence) · CPC title

• C40B60/12

  for screening libraries · CPC title

• G01N21/17

  Systems in which incident light is modified in accordance with the properties of the material investigated (where the material investigated is optically excited causing a change in wavelength of the incident light G01N21/63) · CPC title