X-ray fluorescence analyzer and method of displaying sample thereof

Patent metadata

Field	Value
Publication number	US-9829447-B2
Application number	US-201514833665-A
Country	US
Kind code	B2
Filing date	Aug 24, 2015
Priority date	Aug 28, 2014
Publication date	Nov 28, 2017
Grant date	Nov 28, 2017

Abstract

An X-ray fluorescence analyzer includes a sample stage, a sample moving mechanism, an X-ray source, a detector detecting a fluorescent X-ray generated from the sample irradiated with a primary X-ray, an imaging device imaging the sample, a display device displaying the image on a screen, a pointing device designating a specific position on the screen for allowing an input at the specific position, an image processing device displaying a mark at the input position on the screen by the pointing device and a control device controlling the sample moving mechanism and the image processing device and, when the sample stage is moved, controlling the image processing device to display the mark on the screen with moving the mark in the same moving direction as that of the sample stage by the same moving distance.

First claim

What is claimed is:

1. An X-ray fluorescence analyzer comprising:
a sample stage on which a sample is placed;
a sample moving mechanism configured to move the sample stage;
an X-ray source configured to irradiate the sample with a primary X-ray;
a detector configured to detect a fluorescent X-ray generated from the sample irradiated with the primary X-ray;
an imaging device configured to image the sample on the sample stage;
a display device which displays the image obtained by the imaging device on a screen;
a pointing device configured to designate a specific position on the screen for allowing an input at the specific position;
an image processing device configured to display a mark at the input position on the screen by the pointing device; and
a control device configured to:
control the sample moving mechanism and the image processing device; and
when the sample stage is moved by the sample moving mechanism, control the image processing device to display the mark on the screen with moving the mark in the same moving direction as that of the sample stage by the same moving distance;

wherein the control device has a function of storing position data of the mark corresponding onto the sample stage based on the input position and the image on the screen, and
wherein after the mark is moved out of a display area of the screen due to the movement of the sample stage, when the mark based on the position data of the mark is positioned within the display area again due to a further movement of the sample stage, the image processing device displays the mark in the display area again based on the position data of the mark.

2. The X-ray fluorescence analyzer according to claim 1 ,
wherein the control device is configured to control the image processing device to display a number as the mark in a case where a plurality of the samples are placed in a line on the sample stage.

3. The X-ray fluorescence analyzer according to claim 1 ,
wherein the imaging device has a function of changing display magnification of an image to a certain display magnification by changing imaging magnification of the sample, and
wherein the image processing device is configured to display the mark at the input position corresponding to the imaging magnification.

4. The X-ray fluorescence analyzer according to claim 1 ,
wherein the control device has a function of storing a screen on which the mark is displayed as image data.

5. The X-ray fluorescence analyzer according to claim 1 , wherein the control device has:
a function of storing the position data of the sample on the sample stage based on the image and the position data of the mark corresponding onto the sample stage based on the input position on the screen; and
a function of displaying the mark at the same position on the screen based on the position data of the mark when new samples are placed at the same position as that of the previously measured sample on the sample stage based on the position data of the sample.

6. A method of displaying a sample of an X-ray fluorescence analyzer comprising imaging a sample which is placed on a sample stage by an imaging device, displaying the obtained image on a display device, performing positioning of X-ray irradiation with respect to the sample by moving the sample stage, and then performing measurement or analysis, the method comprising:
obtaining an image of the sample by the imaging device;
displaying the image on the screen of the display device by an image processing device;
receiving an input of a mark to a certain position on the screen by a pointing device; and
displaying the mark on the screen synchronized with the movement of the sample stage, in which the mark is moved by the same moving distance and in the same moving direction as that of the sample stage by the image processing device;
storing position data of the mark corresponding onto the sample stage based on the input position and the image on the screen; and
after the mark is moved out of a display area of the screen due to the movement of the sample stage, when the mark based on the position data of the mark is positioned within the display area again due to a further movement of the sample stage, controlling the image processing device to display the mark in the display area again based on the position data of the mark.

7. The method of displaying a sample of an X-ray fluorescence analyzer according to claim 6 , further comprising:
displaying the mark on the input position corresponding to image magnification by the image processing device when the imaging device changes display magnification of an image to a certain display magnification by changing the imaging magnification of the sample.

8. The method of displaying a sample of an X-ray fluorescence analyzer according to claim 6 , further comprising:
storing the position data of the sample on the sample stage based on the image and the position data of the mark corresponding onto the sample stage based on the input position on the screen; and
re-displaying the mark at the same position on the screen based on the position data of the mark when new samples are placed at the same position as that of the previously measured sample on the sample stage based on the position data of the sample.

Assignees

• Hitachi High-Tech Science Corp

Inventors

• Yagi Isao

Classifications

• G01N2223/633

  thickness, density, surface weight (unit area) · CPC title

• G01N23/223 Primary

  by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence · CPC title

• G01N2223/61

  thin films, coatings · CPC title