Treatment liquid production device and treatment liquid production method
US-2015352516-A1 · Dec 10, 2015 · US
US9828261B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9828261-B2 |
| Application number | US-201715428481-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 9, 2017 |
| Priority date | Nov 18, 2013 |
| Publication date | Nov 28, 2017 |
| Grant date | Nov 28, 2017 |
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A liquid treatment unit includes: a treatment tank provided with an inlet and an outlet, the treatment tank having a shape that allows a portion of liquid to be retained; a controller that controls supply of liquid into the treatment tank and ejection of liquid from the treatment tank; and a plasma generator generates plasma in the liquid inside the treatment tank. The plasma generator generates plasma while the controller stops supply of liquid and ejection of liquid. After the liquid has been treated, the controller resumes the supply of liquid, and causes the liquid to be ejected from the treatment tank while allowing a portion of the treated liquid to be retained inside the treatment tank.
Opening claim text (preview).
What is claimed is: 1. A method comprising: supplying a liquid into a treatment tank; generating plasma in the liquid inside the treatment tank to treat the liquid, while stopping supply of a new liquid into the treatment tank; while the treated liquid remains inside the treatment tank, starting supply of a new liquid into the treatment tank and ejection of the treated liquid from the treatment tank to mix the supplied new liquid with the treated liquid in the treatment tank; controlling at least one of a flow rate of the supply of the new liquid into the treatment tank and a flow rate of the ejection of the mixed liquid from the treatment tank to allow the mixed liquid to be partially retained inside the treatment tank; stopping the supply of the new liquid and the ejection of the mixed liquid, and repeating the generating step, the starting step, the controlling step, and the stopping step. 2. The method according to claim 1 , wherein the plasma is generated in the liquid inside the treatment tank while the new liquid is supplied into the treatment tank. 3. The method according to claim 1 , wherein: the supply of the new liquid and the ejection of the mixed liquid are continuously performed; and a total quantity of liquid ejected from the treatment tank is equal or greater than a volume of the treatment tank. 4. The method according to claim 1 , further comprising: causing a part of the mixed liquid ejected from the treatment tank to recirculate as circulated liquid to the treatment tank through a circulation passage. 5. The method according to claim 4 , wherein gas contained in the circulated liquid is separated from the circulated liquid in the recirculating. 6. The method according to claim 1 , wherein the generating of the plasma includes applying a voltage between a first electrode and a second electrode, each of which is at least partially disposed in the treatment tank. 7. The method according to claim 6 , wherein: the generating of the plasma further includes, before the applying of the voltage, supplying gas into a space between the first electrode and an insulator that surrounds the first electrode in the treatment tank; and the applying of the voltage is performed when a portion of the first electrode is covered with the supplied gas. 8. The method according to claim 6 , wherein the voltage causes the liquid to be partially vaporized to produce gas, and causes discharge when a portion of the first electrode is covered with the produced gas to generate the plasma. 9. The method according to claim 1 , wherein the starting the supply of the new liquid and the ejection of the mixed liquid are performed in response to an instruction from a user. 10. The method according to claim 1 , wherein the stopping of the supply and the ejection is performed in response to an instruction from a user.
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