Performance improvement of mems devices
US-2016097789-A1 · Apr 7, 2016 · US
US9825610B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-9825610-B1 |
| Application number | US-201514634565-A |
| Country | US |
| Kind code | B1 |
| Filing date | Feb 27, 2015 |
| Priority date | Feb 28, 2014 |
| Publication date | Nov 21, 2017 |
| Grant date | Nov 21, 2017 |
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In an embodiment, a tunable stiffness mechanical filter is provided including an input coupler to a negative stiffness structure with a negative stiffness characteristic, and further including a tuner for tuning the negative stiffness structure. An output sensor is located along the negative stiffness structure. The filter may include an amplifier and/or a driver coupled between the output sensor and the negative stiffness structure.
Opening claim text (preview).
What is claimed is: 1. A tunable stiffness mechanical filter comprising: a) a negative stiffness structure comprising an elastic negative stiffness characteristic; b) an input coupler to the negative stiffness structure; c) a tuner for the negative stiffness structure; d) an output sensor located along the negative stiffness structure; and e) wherein the tuner is configured to apply an axial force along a tuning axis of the negative stiffness structure, and wherein the input coupler is configured to apply an input transverse to the tuning axis. 2. The filter of claim 1 further comprising an amplifier coupled between the output sensor and the negative stiffness structure. 3. The filter of claim 2 further comprising a driver coupled between the sensor and the negative stiffness structure. 4. The filter of claim 3 , wherein the driver has an adjustable gain. 5. The filter of claim 1 further comprising a driver coupled between the output sensor and the negative stiffness structure. 6. The filter of claim 1 further comprising: a) wherein the negative stiffness structure comprises a negative stiffness member comprising a first end and a second end; b) wherein the tuner is coupled to at least one of the first end or the second end of the negative stiffness member to allow application of a compressive tuning force to the negative stiffness member axially along the tuning axis; c) wherein the input coupler is adapted to receive an input signal, transverse to the tuning axis, for causing displacement of the negative stiffness member; and d) wherein the output sensor is positioned to sense at least one of: (1) a displacement; (2) a velocity; or (3) an acceleration of the negative stiffness member. 7. The filter of claim 6 further comprising a drive amplifier coupled to amplify the least one of: (1) a displacement; (2) a velocity; or (3) an acceleration of the negative stiffness member. 8. The filter of claim 6 , wherein the tuner further comprises at least one of: (a) an electrostatic actuator; (b) an electromagnetic actuator; (c) a magnetostrictive actuator; (d) a thermal actuator; (d) an electrochemical actuator; e) ionic actuator; or (f) a piezoelectric. 9. The filter of claim 8 , wherein at least one of the first end or the second end of the negative stiffness member is secured to a piezoelectric substrate. 10. The filter of claim 6 further comprising a lever system. 11. The filter of claim 6 , wherein the negative stiffness member is fixed at the first end, and wherein the tuner is coupled to the second end. 12. The filter of claim 11 , wherein the second end is clamped to inhibit rotation of the negative stiffness member while allowing compression of the negative stiffness member along the tuning axis. 13. The filter of claim 11 , wherein the negative stiffness member further comprises flexure features. 14. The filter of claim 11 , further comprising a positive stiffness member coupled in parallel with the negative stiffness member. 15. The filter of claim 14 , wherein the positive stiffness positive stiffness member comprises flexure features. 16. A tunable stiffness mechanical filter comprising: a) an elastic negative stiffness member; b) an input coupler adapted to couple an input force to the negative stiffness member; c) an output sensor is positioned to sense a response of the negative stiffness member to the input force; d) a tuning actuator coupled to the negative stiffness member so as to adjust the response of the negative stiffness member to the input force; e) a drive portion coupled to provide feedback from the output sensor to the negative stiffness structure; and f) wherein the negative stiffness member is secured at one end such that application of a tuning force by the tuning actuator at an other end of the negative stiffness member compresses the negative stiffness member axially to adjust the response of the negative stiffness member to the input force, and wherein the drive portion amplifies and feeds back the response of the negative stiffness member. 17. The filter of claim 16 , wherein the tuning actuator comprises a piezoelectric. 18. A tunable stiffness mechanical filter comprising: a) a variable stiffness beam comprising a variable stiffness characteristic tuned through axial application of compressive force to at least one end of the variable stiffness beam; b) an input coupler to supply an input to the variable stiffness beam; c) a tuner coupled to a first end of the variable stiffness beam; and d) a sensor adapted to sense at least one of: (1) a displacement; (2) a velocity; or (3) an acceleration of the variable stiffness beam. 19. The filter of claim 18 , wherein the variable stiffness beam comprises an elastic negative stiffness characteristic in response to the application of the compressive force. 20. The filter of claim 19 further comprising a static positive stiffness beam coupled in parallel with the variable stiffness beam. 21. The filter of claim 19 , wherein the tuner is capable of application of sufficient force to change the stiffness of the variable stiffness beam more than about 5% to up to about 200%. 22. The filter of claim 19 further comprising a driver coupled between the sensor and the variable stiffness beam, wherein the driver has an adjustable gain. 23. The filter of claim 19 further comprising a driver coupled so as to amplify a motion of the variable stiffness beam by feeding back a sensor signal in-phase with an oscillation of the variable stiffness beam and wherein the driver is tuned below a level of self-excitation so as to inhibit spontaneous excitation. 24. The filter of claim 19 further comprising a driver coupled between the sensor and the variable stiffness beam, wherein the driver is tuned to provide in-phase amplification of a known frequency input signal. 25. A tunable stiffness mechanical filter comprising: a) a negative stiffness structure comprising a negative stiffness characteristic; b) an input coupler to the negative stiffness structure; c) a tuner for the negative stiffness structure; d) an output sensor located along the negative stiffness structure; e) wherein the negative stiffness structure comprises a negative stiffness member comprising a first end and a second end; f) wherein the tuner is coupled to at least one of the first end or the second end of the negative stiffness member to allow application of a compressive tuning force to the negative stiffness member along a tuning axis; g) wherein the input coupler is adapted to receive an input signal, transverse to the tuning axis, for causing displacement of the negative stiffness member; h) wherein the output sensor is positioned to sense at least one of: (1) a displacement; (2) a velocity; or (3) an acceleration of the negative stiffness member; i) wherein the tuner further comprises at least one of: (1) an electrostatic actuator; (2) an electromagnetic actuator; (3) a magnetostrictive actuator; (4) a thermal actuator; (5) an electrochemical actuator; (6) an ionic actuator; or (7) a piezoelectric; and j) wherein at least one of the first end or the second end of the negative stiffness member is secured to a piezoelectric substrate.
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