Optical module, optical apparatus, method for fabricating optical module

Patent metadata

Field	Value
Publication number	US-9825426-B2
Application number	US-201615217791-A
Country	US
Kind code	B2
Filing date	Jul 22, 2016
Priority date	Jul 27, 2015
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

An optical module includes a bench part and a cap on the bench part. The bench part includes a bench, an electrode, a semiconductor optical device and a lens. The electrode is disposed on the first and second areas of the bench. The semiconductor optical device is disposed on the electrode in the first area. The cap includes a base, a pad electrode, a conductor, a ceiling, a front wall, and a rear wall. The pad electrode is disposed on the base. The conductor is disposed on the base and connected to the pad electrode. The electrode is electrically connected to the conductor on the second area. The ceiling extends along a first plane. The front wall has a front outer face extending along a second plane intersecting the first plane. The rear wall extends from the ceiling in a direction from the cap to the bench.

First claim

What is claimed is:

1. An optical module including:
a bench part including a bench, an electrode, a semiconductor optical device, and a lens, the bench having a principal surface with a first area and a second area, the electrode being disposed on the first area and the second area, the semiconductor optical device being disposed on the electrode in the first area, and the lens being supported by the first area; and
a cap disposed on the bench part,
the cap including a base, a pad electrode and a conductor, the cap having a cavity, a ceiling, a front wall, a first side wall, a second side wall, and a rear wall, the cavity containing the semiconductor optical device and the lens, the pad electrode being disposed on the base, and the conductor being disposed on the base and connected to the pad electrode,
the second area of the bench surrounding the first area,
on the second area, the electrode being electrically connected to the conductor,
the semiconductor optical device, the lens and the front wall and the rear wall of the cap being arranged on the principal surface of the bench along an optical reference plane extending in a direction of a first axis, and
the ceiling extending along a first plane, the front wall having a front outer face extending along a second plane, the second plane intersecting with the first plane, and the rear wall extending from the ceiling in a direction from the cap to the bench.

2. The optical module according to claim 1 , wherein
the first side wall and the second side wall of the cap extend in the direction of the first axis,
the front wall, the first side wall, the second side wall, and the rear wall are disposed on the second area of the bench, and
the semiconductor optical device and the lens are hermetically sealed by the cap and the bench part.

3. The optical module according to claim 1 , wherein
the bench includes a silicon base, and
the silicon base of the bench has a recess for positioning the lens.

4. The optical module according to claim 1 , wherein the bench part includes an insulating layer disposed on the electrode in the second area, the electrode includes a first portion, a second portion and a third portion, the first portion of the electrode extends on the first area to be connected to the second portion of the electrode, the insulating layer extends across the second portion of the electrode, and the third portion of the electrode connects the second portion of the electrode to the conductor.

5. The optical module according to claim 1 , wherein the cap includes an insulating layer, the conductor includes a first portion, a second portion and a third portion, the first portion of the conductor connects the pad electrode to the second portion of the conductor, the insulating layer extends across the second portion of the conductor, and the third portion of the conductor connects the second portion of the conductor to the electrode.

6. An optical apparatus including;
an optical module; and
an optical part,
the optical module including:
a bench part including a bench, an electrode, a semiconductor optical device, and a lens, the bench having a principal surface with a first area and a second area, the electrode being disposed on the first area and the second area, the semiconductor optical device being disposed on the electrode in the first area, and the lens being supported by the first area; and
a cap disposed on the bench part,
the cap including a base, a pad electrode and a conductor, the cap having a cavity, a ceiling, a front wall, a first side wall, a second side wall, and a rear wall, the cavity containing the semiconductor optical device and the lens, the pad electrode being disposed on the base, and the conductor being disposed on the base and connected to the pad electrode,
the second area of the bench surrounding the first area,
on the second area, the electrode being electrically connected to the conductor,
the semiconductor optical device, the lens and the front wall and the rear wall of the cap being arranged on the principal surface of the bench along an optical reference plane extending in a direction of a first axis, and
the ceiling extending along a first plane, the front wall having a front outer face extending along a second plane intersecting the first plane, the rear wall extending from the ceiling in a direction from the cap to the bench,
the optical part supporting the front wall, and
the optical part being optically coupled to the semiconductor optical device through the front wall, and the front wall being made of a material allowing light of the semiconductor optical device to pass therethrough.

7. The optical apparatus according to claim 6 , wherein the optical part includes a semiconductor integrated device having an optical grating coupler, the optical grating coupler being optically coupled to the semiconductor optical device.

Assignees

• Sumitomo Electric Industries

Inventors

• Furuya Akira

Classifications

• H01S5/02208

  characterised by the shape of the housings · CPC title

• H01S5/0064

  Anti-reflection components, e.g. optical isolators · CPC title

• H01S5/005

  Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping (H01S5/026, H01S5/18388 take precedence) · CPC title

• H01S5/02252 Primary

  Electricity · mapped topic

• H01S5/0425

  Electrodes, e.g. characterised by the structure · CPC title