Piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device

Patent metadata

Field	Value
Publication number	US-9825213-B2
Application number	US-201113977915-A
Country	US
Kind code	B2
Filing date	Dec 22, 2011
Priority date	Jan 7, 2011
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

A piezoelectric element having an improved piezoelectric constant is provided, and a liquid discharge head, an ultrasonic motor, and a dust removing device, each of which uses the above piezoelectric element, are also provided. A piezoelectric element at least includes a pair of electrodes and a piezoelectric material provided in contact with the pair of electrodes, the piezoelectric material is formed of an aggregate of crystal grains containing barium titanate as a primary component, and among the crystal grains of the aggregate, crystal grains at least in contact with the electrodes have dislocation layers in the grains. A liquid discharge head, an ultrasonic motor, and a dust removing device each use the above piezoelectric element.

First claim

The invention claimed is:

1. A piezoelectric element comprising:
a pair of electrodes; and
a piezoelectric material,
wherein the piezoelectric material includes crystal grains containing barium titanate as a primary component,
wherein crystal grains among the crystal grains which are in contact with the electrodes have a linear crystal defect, and
wherein the crystal grains having the linear crystal defect include crystal grains having a grain diameter R of 2 μm or more in a direction perpendicular to the electrodes, a region in which the linear crystal defectexist at high density relative to the other region having a thickness D in a direction perpendicular to the electrodes equal to or less than R.

2. The piezoelectric element according to claim 1 ,
wherein the linear crystal defect is polarized in the same direction in each of the crystal grains.

3. The piezoelectric element according to claim 1 ,
wherein Young's modulus of a surface portion of the piezoelectric material in contact with each of the electrodes is lower than Young's modulus of the whole piezoelectric material.

4. The piezoelectric element according to claim 1 ,
wherein the piezoelectric material contains a manganese component.

5. The piezoelectric element according to claim 1 ,
wherein the piezoelectric material has a thickness in a range of 50 μm to 10 mm.

6. A liquid discharge head using the piezoelectric element according to claim 1 .

7. An ultrasonic motor using the piezoelectric element according to claim 1 .

8. A dust removing device using the piezoelectric element according to claim 1 .

9. The piezoelectric element according to claim 4 , further comprising a bismuth component, a calcium component, and a zirconium component.

10. A device comprising the piezoelectric element according to claim 1 .

Assignees

• Shimada Mikio
• Aiba Toshiaki
• Ifuku Toshihiro
• Matsuda Takanori
• Watanabe Takayuki
• Canon Kk

Inventors

• Shimada Mikio
• Aiba Toshiaki
• Ifuku Toshihiro
• Matsuda Takanori
• Watanabe Takayuki

Classifications

• B08B7/028

  Using ultrasounds · CPC title

• H01L41/0973

  Electricity · mapped topic

• H01L41/43

  Electricity · mapped topic

• H01L41/1871 Primary

  Electricity · mapped topic

• B41J2/14233

  of film type, deformed by bending and disposed on a diaphragm · CPC title