Conveying system, conveying robot and teaching method of the same

Patent metadata

Field	Value
Publication number	US-9824908-B2
Application number	US-201514704536-A
Country	US
Kind code	B2
Filing date	May 5, 2015
Priority date	May 5, 2015
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

In this system, regarding an conveyance object placed on a rotary table, based on positions temporarily set previously as a taking position of the disk-shaped conveyance object in a storing container and a reference position of the rotary table, information of the taking position of the conveyance object in the storing container and of the reference position of the rotary table is acquired based on information of the deviation of the conveyance object placed on the rotary table with respect to the reference position of the rotary table acquired by a sensor portion so as to teach a conveying operation of the conveyance object from the storing container to the rotary table by the robot based on the acquired position information.

First claim

The invention claimed is:

1. A conveying system comprising:
a conveyance object placing device comprising:
a rotary table configured to rotate in a horizontal plane; and
a sensor portion configured to acquire an information of a deviation of a disk-shaped conveyance object placed on the rotary table with respect to a reference position of the rotary table; and

a robot configured to take the disk-shaped conveyance object from a conveyance object storing container so as to convey and place the disk-shaped conveyance object on the rotary table,
wherein an information of a position where the disk-shaped conveyance object is to be taken in the conveyance object storing container and of a position where the disk-shaped conveyance object is to be placed on the rotary table is acquired based on an information of the deviation of the disk-shaped conveyance object placed on the rotary table with respect to the reference position of the rotary table acquired by the sensor portion based on a taking position of the disk-shaped conveyance object in the conveyance object storing container and a position previously and temporarily set as the reference position of the rotary table so that an information of the taking position of the disk-shaped conveyance object in the conveyance object storing container by the robot and of the reference position of the rotary table is acquired based on the information of the positions thus acquired.

2. The conveying system according to claim 1 ,
wherein the reference position of the rotary table is a rotation center of the rotary table, and
wherein the deviation of the disk-shaped conveyance object with respect to the reference position of the rotary table is a distance and a direction from the rotation center of the rotary table to the center of the disk-shaped conveyance object.

3. The conveying system according to claim 1 ,
wherein the information of the deviation of the disk-shaped conveyance object placed on the rotary table with respect to the reference position of the rotary table acquired by the sensor portion comprises:
a deviation of a first placing position, where the disk-shaped conveyance object is placed on the rotary table, with respect to the reference position of the rotary table, based on a previously and temporarily set position as the reference position of the rotary table,
a deviation of the disk-shaped conveyance object with respect to the reference position of the rotary table in a second placing position where the disk-shaped conveyance object is moved by the robot horizontally and linearly in a distance previously set from the first placing position and placed on the rotary table, and
a deviation of the disk-shaped conveyance object with respect to the reference position of the rotary table in a third placing position where the disk-shaped conveyance object is moved by the robot horizontally and turningly at an angle previously set from the first placing position and placed on the rotary table.

4. The conveying system according to claim 3 ,
wherein the reference position of the rotary table is a rotation center of the rotary table, and
wherein the deviation of the disk-shaped conveyance object with respect to the reference position of the rotary table is a distance and a direction from the rotation center of the rotary table to the center of the disk-shaped conveyance object.

5. A teaching method of a conveying operation of a robot in a conveying system, the system comprising:
a conveyance object placing device comprising:
a rotary table configured to rotate in a horizontal plane; and
a sensor portion configured to acquire an information of a deviation of a disk-shaped conveyance object placed on the rotary table with respect to a reference position of the rotary table; and

a robot configured to take the disk-shaped conveyance object from a conveyance object storing container so as to convey and place the disk-shaped conveyance object on the rotary table,
the method comprising:
a first deviation acquiring step of acquiring a deviation of the disk-shaped conveyance object with respect to the reference position of the rotary table in a first placing position of the disk-shaped conveyance object;
a second deviation acquiring step of acquiring a deviation of the disk-shaped conveyance object with respect to the reference position of the rotary table in a second placing position where the disk-shaped conveyance object is moved by a robot linearly in a distance previously set in a horizontal plane from the first placing position and placed on the rotary table;
a third deviation acquiring step of acquiring a deviation of the disk-shaped conveyance object with respect to the reference position of the rotary table in a third placing position where the disk-shaped conveyance object is moved by the robot horizontally and turningly at a previously set angle from the first placing position and placed on the rotary table; and
a step of acquiring an information of a taking position of the disk-shaped conveyance object in the conveyance object storing container and of a reference position of the rotary table based on the deviation acquired in the first deviation acquiring step and the deviation acquired in the third deviation acquiring step.

6. The teaching method of the robot in the conveying system according to claim 5 ,
wherein the reference position of the rotary table is a rotation center of the rotary table, and
wherein the deviation of the disk-shaped conveyance object with respect to the reference position of the rotary table is a distance and a direction from the rotation center of the rotary table to a center of the disk-shaped conveyance object.

7. A conveying robot configured to take a disk-shaped conveyance object from a conveyance object storing container so as to convey and place the disk-shaped conveyance object on a rotary table of a conveyance object placing device including a rotary table which rotates in a horizontal plane and a sensor portion which acquires an information of a deviation of the disk-shaped conveyance object placed on the rotary table, the conveying robot comprising:
a base portion; and
an arm portion,
wherein an information of a position where the disk-shaped conveyance object is to be taken in the conveyance object storing container and of a position where the disk-shaped conveyance object is to be placed on the rotary table is acquired based on an information of the deviation of the disk-shaped conveyance object placed on the rotary table with respect to the reference position of the rotary table acquired by the sensor portion based on a taking position of the disk-shaped conveyance object in the conveyance object storing container and a position previously and temporarily set as the reference position of the rotary table so that an information of the taking position of the disk-shaped conveyance object in the conveyance object storing container by the robot and of the reference position of the rotary table is acquired based on the information of the positions thus acquired.

8. The conveying robot according to claim 7 ,
wherein the reference position of the rotary table is a rotation center of the rotary table, and
wherein the deviation of the disk-shaped conveyance object with respect to the reference position of the rotary table is a distance and a direction from the rotation center of the rotary table to a center of the disk-shaped conveyance object.

9. The conveying robot according to claim 7 ,
wherein the information of the deviation of the disk-shaped conveyance object placed on the rotary table with respect to the reference position of the rotary table acquired by the sensor portion comprises following three pieces of information;

Assignees

• Kawasaki Heavy Ind Ltd
• Kawasaki Robotics (Usa) Inc

Inventors

• Yoshida Hiroyuki
• Yoshida Masaya
• Yamaguchi Takao
• Chan Daniel

Classifications

• B25J9/1664

  characterised by motion, path, trajectory planning · CPC title

• G05B2219/45031

  Manufacturing semiconductor wafers · CPC title

• G05B2219/40519

  Motion, trajectory planning · CPC title

• Y10S901/03

  Teaching system · CPC title

• H10P72/3402 Primary

  Mechanical parts of transfer devices · CPC title