Spark gap x-ray source

Patent metadata

Field	Value
Publication number	US-9824787-B2
Application number	US-201715618458-A
Country	US
Kind code	B2
Filing date	Jun 9, 2017
Priority date	Jul 23, 2014
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

In one embodiment, the invention includes an x-ray source having a cathode with an elongated blade oriented substantially transverse with respect to a longitudinal axis of the cathode. The blade can be pointed towards an anode. In another embodiment, the invention includes an x-ray source having a window with an annular-shape, forming a hollow-ring. A convex portion of a half-ball-shape of an anode can extend into a hollow of the annular-shape of the window. In another embodiment, the invention includes an x-ray source having an anode with a dome shape having a concave side facing the electron emitter.

First claim

What is claimed is:

1. An x-ray source comprising:
a) an enclosure including an internal cavity;
b) an anode and a cathode attached to the enclosure, the anode and the cathode:
i) being electrically-conductive;
ii) spaced apart from each other; and
iii) electrically insulated from each other;

c) an axis of the enclosure extending from the cathode to a target material of the anode, the target material, configured to emit x-rays in response to impinging electrons from the cathode;
d) a distal free-end of the cathode having an elongated blade, the elongated blade:
i) having a length of at least 10 centimeters;
ii) oriented substantially transverse with respect to the axis of the enclosure;
iii) the elongated blade disposed within the cavity and directed towards the anode with a gap between the blade and the anode; and

e) an electrically-conductive window:
i) associated with and connected to the anode;
ii) being substantially transmissive to x-rays;
iii) forming at least part of a wall of the enclosure; and
iv) separating at least a portion of the cavity from an exterior of the enclosure.

2. The x-ray source of claim 1 , wherein the blade has the length of at least 80 centimeters.

3. The x-ray source of claim 1 , further comprising:
a) a power supply electrically connected to the anode and the cathode;
b) the power supply configured to provide pulses of voltage between the anode and the cathode having a magnitude sufficiently high to cause periodic arcs between the cathode and the anode; and
c) electrons in the arc, impinging on the anode, cause an emission of x-rays outward from the x-ray source.

4. An x-ray source comprising:
a) an enclosure including an internal cavity;
b) an anode and an electron emitter attached to the enclosure;
c) the anode and the electron emitter being spaced apart from each other and electrically insulated from each other;
d) a window:
i) including an annular-shape;
ii) being electrically-conductive;
iii) being substantially transmissive to x-rays; and
iv) separating at least a portion of the cavity from an exterior of the enclosure;

e) the electron emitter configured to emit electrons towards the anode;
f) the anode including a half-ball-shape having a convex portion extending into the cavity, the convex portion including a target material configured to emit x-rays in response to impinging electrons from the electron emitter.

5. The x-ray source of claim 4 , wherein the convex portion of the anode extends into a hollow of the annular-shape of the window.

6. The x-ray source of claim 4 , wherein the half-ball-shape of the anode is a single half-ball-shape without a matching half-ball shape.

7. The x-ray source of claim 4 , wherein the anode including the half-ball-shape comprises a metal boride, a metal carbon nitride, or combinations thereof.

8. The x-ray source of claim 4 , wherein the x-ray source is configured to emit x-rays in a 360° circle outward from the x-ray source.

9. The x-ray source of claim 4 , wherein the window comprises carbon fiber composite.

10. The x-ray source of claim 4 , wherein the window comprises graphite, plastic, glass, or combinations thereof.

11. The x-ray source of claim 4 , wherein the window comprises beryllium.

12. The x-ray source of claim 4 , wherein the window comprises boron carbide.

13. The x-ray source of claim 4 , wherein the window comprises tungsten.

14. The method of claim 4 , further comprising;
a) associating the x-ray source with a lift pin, the lift pin configured to apply force against a flat panel display to lift the flat panel display off of a table during manufacture of the flat panel display; and
b) emitting x-rays from the x-ray source between the flat panel display and the table while lifting or holding the flat panel display off of the table.

15. An x-ray source comprising:
a) an enclosure including an internal cavity;
b) an electron emitter and an anode electrically insulated from each other and attached to the enclosure;
c) the anode having a dome shape with a concave side facing the electron emitter and the internal cavity of the enclosure, the concave side including a target material configured to emit x-rays in response to impinging electrons from the electron emitter;
d) associating the x-ray source with a lift pin, the lift pin configured to apply force against a flat panel display to lift the flat panel display off of a table during manufacture of the flat panel display; and
e) emitting x-rays from the x-ray source between the flat panel display and the table while lifting or holding the flat panel display off of the table.

16. The x-ray source of claim 15 , wherein the electron emitter is disposed inside of the dome shape.

17. The x-ray source of claim 15 , wherein the anode having the dome shape comprises beryllium.

18. The x-ray source of claim 15 , wherein the anode having the dome shape comprises a composite material.

19. The x-ray source of claim 18 , wherein the anode having the dome shape comprises carbon fiber composite.

20. The x-ray source of claim 15 , wherein the anode having the dome shape comprises a sheet of a single material.

Assignees

• Moxtek Inc

Inventors

• Miller Eric
• Hansen Bill

Classifications

• G21K5/08 Primary

  Holders for targets or for other objects to be irradiated · CPC title

• H01J35/06

  Cathodes · CPC title

• H01J35/08

  Anodes; Anti cathodes · CPC title

• H01J2235/086

  Target geometry · CPC title

• G21K5/10

  with provision for relative movement of beam source and object to be irradiated · CPC title