EUV focus monitoring systems and methods

Patent metadata

Field	Value
Publication number	US-9823585-B2
Application number	US-201514852805-A
Country	US
Kind code	B2
Filing date	Sep 14, 2015
Priority date	Mar 31, 2015
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

Systems and methods for monitoring the focus of an EUV lithography system are disclosed. Another aspect includes a method having operations of measuring a first shift value for a first patterned set of sub-structures of a focus test structure on a wafer and measuring a second shift value for a second patterned set of sub-structures of the test structure on the wafer. The test structure may be formed on the wafer using asymmetric illumination, with the first patterned set of sub-structures having a first pitch and the second patterned set of sub-structures having a second pitch that is different from the first pitch. The method may further include determining a focus shift compensation for an illumination system based on a difference between the first shift value and the second shift value.

First claim

What is claimed is:

1. A method of monitoring focus of an EUV lithography system, the method comprising:
inserting a photomask into an illumination system, the photomask comprising a test structure having a first set of sub-structures having a first pitch and arranged to define a first box and a second set of sub-structures having a second pitch and arranged to define a second box within the first box;
illuminating, with a first focus, the photomask with asymmetric illumination and thereby patterning a layer over a wafer with the test structure;
measuring a first shift value for a first patterned set of sub-structures of the wafer by determining a center point of the first box, wherein the first shift value corresponds to the center point of the first box;
measuring a second shift value for a second patterned set of sub-structures of the wafer by determining a center point of the second box, wherein the second shift value corresponds to the center point of the second box; and
compensating a focus shift of the illumination system based on a difference between the first shift value and the second shift value.

2. The method of claim 1 , wherein the first pitch is about double the second pitch.

3. The method of claim 2 , wherein the first pitch is about 65 nanometers.

4. The method of claim 1 , wherein a line-space ratio of the first and second sets of sub-structures is about 1:1.

5. The method of claim 1 , further comprising:
illuminating, with a second focus, the photomask with asymmetric illumination and thereby patterning a layer over an additional wafer;
measuring a third shift value for a first patterned set of sub-structures of the additional wafer;
measuring a fourth shift value for a second patterned set of sub-structures of the additional wafer; and
determining a difference between the third shift value and the fourth shift value, and
wherein compensating the focus shift of the illumination system further comprises adjusting the illumination system based on the difference between the third shift value and the second shift value.

6. The method of claim 1 , wherein compensating the focus shift of the illumination system based on the difference between the first shift value and the second shift value further comprises compensating the focus shift of the illumination system based on a plurality of differences between shift values from a plurality of wafers patterned using different focuses.

7. The method of claim 1 , wherein the measuring the first shift value and the measuring the second shift value are performed off of a wafer production line.

8. The method of claim 1 , wherein illumination system comprises an illuminator with an asymmetric arrangement of radiation-transmitting regions.

9. The method of claim 1 , wherein the first set of sub-structures having the first pitch causes an asymmetry in the illumination directed to the wafer to pattern the first set and the second set of sub-structures having the second pitch, causes a symmetry in the illumination directed to the wafer to pattern the second set.

10. A method of monitoring focus of an EUV lithography system, the method comprising:
measuring a first shift value for a first patterned set of sub-structures of a focus test structure on a wafer, wherein the first patterned set of sub-structures includes opposing first and second surfaces extending in a first direction and opposing third and fourth surfaces extending in a second direction perpendicular to the first direction;
measuring a second shift value for a second patterned set of sub-structures of the test structure on the wafer, wherein:
the second patterned set of sub-structures includes opposing fifth and sixth surfaces extending in the first direction and opposing seventh and eighth surfaces extending in the second direction;
the test structure is formed on the wafer using asymmetric illumination; and
the first patterned set of sub-structures has a first pitch and the second patterned set of sub-structures has a second pitch that is different from the first pitch; and

determining a focus shift compensation for an illumination system based on a difference between the first shift value and the second shift value.

11. The method of claim 10 , further comprising communication the focus shift compensation to the illumination system over a network.

12. The method of claim 10 , wherein the first set of sub-structures of the test structure surrounds the second set of sub-structures.

13. The method of claim 10 , wherein the first pitch is about 65 nanometers and the second pitch is about 32 nanometers.

14. The method of claim 10 , further comprising:
measuring a third shift value for a first patterned set of sub-structures of an additional test structure on an additional wafer;
measuring a fourth shift value for a second patterned set of sub-structures of the additional test structure on the additional wafer; and
determining a difference between the third shift value and the fourth shift value, and
wherein determining a focus system modification for the illumination system further comprises determining the focus system modification based on the difference between the third shift value and the second shift value.

15. The method of claim 10 , wherein determining the focus shift compensation for the illumination system further comprises compensating the focus shift of the illumination system based on a plurality of differences between shift values from a plurality of wafers patterned using different focuses.

16. The method of claim 10 , wherein the focus test structure is a box-in-box test structure.

17. The method of claim 10 , wherein illumination system comprises an asymmetric illuminator with an asymmetrical arrangement of at least one radiation-transmitting region.

18. The method of claim 17 , wherein the at least one radiation transmitting region is characterized by an inner radius and an outer radius.

19. The method of claim 1 , wherein:
the determining of the center point of the first box includes a comparison of a group consisting of: an outer-edge-to-outer-edge comparison of the first box; an inner-edge-to-inner-edge comparison of the first box; and a midpoint-to-midpoint comparison of the first box; and
the determining of the center point of the second box includes a comparison of a group consisting of: an outer-edge-to-outer-edge comparison of the second box; an inner-edge-to-inner-edge comparison of the second box; and a midpoint-to-midpoint comparison of the second box.

20. The method of claim 1 , wherein:
the determining of the center point of the first box includes a comparison of a first surface of the first box to a second surface of the first box that is opposite the first surface of the first box with the second box disposed therebetween; and
the determining of the center point of the second box includes a comparison of a first surface of the second box to a second surface of the second box that is opposite the first surface of the second box.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Shih Chih-Tsung
• Cheng Chieh-Jen
• Chen Jeng-Horng
• Chen Chia-Chen
• Yu Shinn-Sheng
• Yen Anthony
• Lai Wei-Chih

Classifications

• G03F7/70641 Primary

  Focus · CPC title

• G03F7/7085

  Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load · CPC title