Methods and systems for forming optical modulators using micro-contact lithography

Patent metadata

Field	Value
Publication number	US-9823539-B2
Application number	US-201314901676-A
Country	US
Kind code	B2
Filing date	Jun 26, 2013
Priority date	Jun 26, 2013
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

Optical modulators, one or more components of various optical modulators, and methods of forming optical modulators and/or one or more components are disclosed. A substrate may be provided and a precursor material may be applied to the substrate with a micro-contact printing stamp. The precursor material may be cured on the substrate and the waveguide may be formed into a micro-ring resonator. The micro-contact printing stamp may be configured to create a waveguide on the substrate.

First claim

What is claimed is:

1. A method of forming an optical apparatus, the method comprising:
providing a substrate;
applying a first precursor material to the substrate with a first micro-contact printing stamp, wherein the first micro-contact printing stamp is configured to apply the first precursor material in the form of a first micro-ring waveguide on the substrate;
curing the first precursor material on the substrate to form the first micro-ring waveguide;
providing a source waveguide in optical communication with the first micro-ring waveguide, wherein providing the source waveguide comprises coupling the source waveguide to the first micro-ring waveguide and configuring the source waveguide to carry an input signal to the first micro-ring waveguide; and
providing a first drain waveguide in optical communication with the first micro-ring waveguide; wherein the drain wavequide comprises at least one branched drain wavequide configured to isolate a wavelength corresponding to the input signal.

2. The method of claim 1 , wherein applying the first precursor material comprises applying one or more of:
a semiconductor material having at least one active portion that generates electromagnetic radiation; and
a light outcoupling substance.

3. The method of claim 1 , wherein applying the first precursor material comprises applying one or more of a sol-gel material, a hydrocarbon polymer, a fluorinated polymer, and a silicon containing polymer.

4. The method of claim 1 , wherein applying the first precursor material comprises selecting a micro-contact printing stamp with an internal radius in a range of about 5 μm to about 1000 μm.

5. The method of claim 1 , wherein applying the first precursor material comprises selecting a micro-contact printing stamp having an internal radius based upon a wavelength to be isolated by the first micro-ring waveguide, wherein the wavelength is defined by mλ=2πnR, where m is the propagation mode number, n is the index of refraction of the first precursor material, and R is the internal radius of the first micro-ring waveguide.

6. The method of claim 1 , wherein curing the first precursor material comprises curing by one or more of a thermal cure, a photoinitiation cure, and a chemical catalyst initiation cure.

7. The method of claim 1 , wherein applying the first precursor material to the substrate with the first micro-contact printing stamp comprises applying with a micro-contact printing stamp comprising one or more silicone polymers or one or more elastomeric polymers.

8. The method of claim 1 , further comprising integrating the optical apparatus with a microelectronic chip.

9. The method of claim 1 , wherein applying the first precursor material to the substrate comprises applying to either a flexible substrate or a rigid substrate.

10. The method of claim 1 , further comprising applying a second precursor material on to the first precursor material with a second micro-contact printing stamp.

11. The method of claim 10 , wherein applying the second precursor material comprises applying a second precursor material having a lower refractive index than the first precursor material.

12. The method of claim 1 , wherein applying the first precursor material to the substrate further comprises applying one or more of the source waveguide and the drain waveguide to the substrate with the first micro-contact printing stamp.

13. The method of claim 1 , wherein providing the drain waveguide comprising coupling the drain waveguide to the first micro-ring waveguide and configuring the drain waveguide to carry an output signal from the first micro-ring waveguide.

14. The method of claim 1 , wherein curing the first precursor material on the substrate to form the first micro-ring waveguide comprises curing the first precursor material to form a core of the first micro-ring waveguide.

15. The method of claim 14 , further comprising:
applying a second precursor material to the core with a second micro-contact printing stamp; and
curing the second precursor material to form a cladding of the first micro-ring waveguide.

16. The method of claim 1 , further comprising:
providing a second drain waveguide;
applying the first precursor material to the substrate with a third micro-contact printing stamp, wherein the third micro-contact printing stamp is configured to apply the first precursor material to the substrate in the form of a second micro-ring waveguide, wherein a radius of the second micro-ring waveguide is different from a radius of the first micro-ring waveguide;
curing the first precursor material to form the second micro-ring waveguide, wherein a characteristic frequency of the second micro-ring waveguide and the first micro-ring waveguide are different; and
optically coupling the source and second drain waveguides to the second micro-ring waveguide.

Assignees

• Empire Technology Dev Llc

Inventors

• Casasanta Iii Vincenzo

Classifications

• G02B6/122

  Basic optical elements, e.g. light-guiding paths · CPC title

• G02B6/13

  Integrated optical circuits characterised by the manufacturing method · CPC title

• G02B2006/12069

  Organic material · CPC title

• G02F1/225 Primary

  in an optical waveguide structure · CPC title

• G02F1/065

  in an optical waveguide structure · CPC title