Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US9823400B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9823400-B2 |
| Application number | US-201514854456-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 15, 2015 |
| Priority date | Oct 11, 2011 |
| Publication date | Nov 21, 2017 |
| Grant date | Nov 21, 2017 |
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There is provided a cured-film formation composition that forms a cured film having excellent photoreaction efficiency and solvent resistance, and high adhesion, an orientation material for photo-alignment, and a retardation material formed with the orientation material.
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The invention claimed is: 1. A cured-film formation composition comprising: a component (A) that is a compound selected from the group consisting of wherein X 1 is a single bond or is a C 1-18 alkylene group, a phenylene group, a biphenylene group, or a cyclohexylene group bonded through a covalent bond, an ether bond, an ester bond, an amide bond, an amino bond, or a urea bond; the alkylene group, the phenylene group, and the biphenylene group optionally substituted with one or more substituents that are selected from a halogen atom and a cyano group and are the same as or different from each other; X 2 is a hydrogen atom, a cyano group, a C 1-18 alkyl group, a phenyl group, a biphenyl group, or a cyclohexyl group; the C 1-18 alkyl group, the phenyl group, the biphenyl group, and the cyclohexyl group optionally bonded through a covalent bond, an ether bond, an ester bond an ainide bond, an amino bond, or a urea bond; and the phenyl group and the biphenyl group optionally substituted with any one of a halogen atom and a cyano group; and R 1 , R 2 , R 3 , R 4 , R 5 , R 6 ,R 7 , and R 8 are independently a hydrogen atom, a C 1-4 alkyl group, a C 1-4 alkoxy group, a halogen atom, a trifluoromethyl group, or a cyano group; a component (B) that is a hydrophilic polymer (excluding a melamine formaldehyde resin, a phenol novolac resin, cyclodextrin, and polyester polycarboxylic acid) having one or more substituents selected from a hydroxy group, a carboxy group, and an amino group; and a component (C) that is a cross-linking agent that reacts with the component (A) and the component (B) and reacts at a temperature lower than a sublimation temperature of the component (A), wherein when the component (B) is an acrylic polymer, the cured-film formation composition further comprises a component (E) that is an adhesion enhancing component. 2. The cured-film formation composition according to claim 1 , wherein the component (B) is at least one hydrophilic polymer selected from the group consisting of polyether polyol, polyester polyol, polycarbonate polyol, and polycaprolactone polyol. 3. The cured-film formation composition according claim 1 , wherein the component (B) is cellulose or a derivative of cellulose. 4. The cured-film formation composition according to claim 1 , wherein the component (B) is an acrylic polymer having at least one of a polyethylene glycol ester group and a C 2-5 hydroxyalkyl ester group, and at least one of a carboxy group and a phenolic hydroxy group. 5. The cured-film formation composition according to claim 1 , wherein the component (B) is an acrylic copolymer obtained by polymerization reaction of monomers containing at least one of a monomer having a polyethylene glycol ester group and a monomer having a C 2-5 hydroxyalkyl ester group and at least one of a monomer having a carboxy group and a monomer having a phenolic hydroxy group. 6. The cured-film formation composition according to claim 1 , wherein the cross-linking agent of the component (C) is a cross-linking agent having a methylol group or an alkoxymethylol group. 7. The cured-film formation composition according to claim 1 , further comprising: a cross-linking catalyst as a component (D). 8. The cured-film formation composition according to claim 1 , wherein the component (E) is hydroxy-group-containing multifunctional acrylate. 9. The cured-film formation composition according to claim 1 , wherein the component (E) is an inorganic particle. 10. The cured-film formation composition according to claim 1 , wherein the component (E) is ethyl acetate. 11. The cured-film formation composition according to claim 1 , wherein a ratio of the component (A) to the component (B) is 5:95 to 60:40 in a mass ratio. 12. The cured-film formation composition according to claim 1 , wherein 10 parts by mass to 100 parts by mass of the cross-linking agent of the component (C) is contained based on 100 parts by mass of the total amount of the component (A) and the component (B). 13. The cured-film formation composition according to claim 7 , wherein 0.01 parts by mass to 10 parts by mass of the cross-linking catalyst of the component (D) is contained based on 100 parts by mass of the total amount of the component (A) and the component (B). 14. The cured-film formation composition according to claim 8 , wherein 0.1 parts by mass to 20 parts by mass of the hydroxy-group-containing multifunctional acrylate of the component (E) is contained based on 100 parts by mass of total amount of the component (A) and the component (B). 15. The cured-film formation composition according to claim 9 , wherein 10 parts by mass to 50 parts by mass of the inorganic particle of the component (E) is contained based on 100 parts by mass of the total amount of the component (A) and the component (B). 16. An orientation material obtained with the cured-film formation composition as claimed in claim 1 . 17. A retardation material formed with a cured film that is obtained from the cured-film formation composition as claimed in claim 1 . 18. The cured-film formation composition according to claim 1 , wherein the compound of component (A) is 19. The cured-film formation composition according to claim 1 , wherein the compound of component (A) is 20. The cured-film formation composition according to claim 1 , wherein the compound of component (A) is
characterised by the presence of specified groups {, e.g. terminal or pendant functional groups} · CPC title
containing carboxyl groups · CPC title
Photosensitive materials (G03F7/12, G03F7/14 take precedence) · CPC title
Birefringent or phase retarding elements (G02B5/3008, G02B5/3016 take precedence; systems for polarisation control G02B27/286; manufacturing phase modulating patterns by lithographic processes G03F7/001) · CPC title
containing nitrogen atoms · CPC title
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