System and method for creating catalyst OBD limit parts for exhaust aftertreatment applications
US-9528420-B2 · Dec 27, 2016 · US
US9823229B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9823229-B2 |
| Application number | US-201414569727-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 14, 2014 |
| Priority date | Aug 21, 2014 |
| Publication date | Nov 21, 2017 |
| Grant date | Nov 21, 2017 |
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A hydrogen sensor and a method for manufacturing the same are provided. The hydrogen sensor includes a metal oxide layer formed over a substrate, and a catalytic pattern that is formed over the metal oxide layer. Further, a protective layer is formed over the catalytic pattern.
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What is claimed is: 1. A hydrogen sensor, comprising: a substrate; a metal oxide layer formed over the substrate; a catalytic pattern formed over the metal oxide layer; a protective layer formed over the metal oxide layer and the catalytic pattern; a second recess formed over an upper surface of the metal oxide layer; and wherein the catalytic pattern is disposed within the second recess. 2. The hydrogen sensor according to claim 1 , further comprising: at least one first recess formed at an upper portion of the metal oxide layer among the catalytic patterns. 3. The hydrogen sensor according to claim 1 , wherein a top surface of the metal oxide layer is formed in a substantially embossed shape. 4. The hydrogen sensor according to claim 3 , wherein the catalytic pattern is disposed at a lower portion among the substantially embossed metal oxide layers. 5. The hydrogen sensor according to claim 1 , wherein: the metal oxide layer includes one selected from the group consisting of: vanadium, niobium, tantalum, chromium, molybdenum, and tungsten, and the catalytic pattern includes at least one selected from the group consisting of: palladium, iridium, ruthenium, platinum, rhodium, gold, and silver.
using catalysis · CPC title
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