Protected sensor field effect transistors
US-9494550-B1 · Nov 15, 2016 · US
US9823210B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9823210-B2 |
| Application number | US-201514951094-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 24, 2015 |
| Priority date | Jul 10, 2012 |
| Publication date | Nov 21, 2017 |
| Grant date | Nov 21, 2017 |
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A method for manufacturing a biosensor includes forming an electrode layer on a flexible foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.
Opening claim text (preview).
The invention claimed is: 1. A method for the manufacture of a biosensor, comprising providing a foil layer; forming an electrode layer positioned on the foil layer; forming a first hydrogel layer positioned over the foil layer and having an opening through which a portion of the electrode layer is exposed; and forming a second hydrogel layer positioned in the opening and in contact with the electrode layer, the second hydrogel layer including an immobilized bio-recognition element, wherein: the second hydrogel layer is arranged partly on and in direct contact with the first hydrogel layer and partly on and in direct contact with the electrode layer; and the second hydrogel layer contacts the electrode layer in a region where the opening in the first hydrogel layer exposes the electrode layer. 2. The method according to claim 1 , wherein forming the first hydrogel layer comprises: depositing a first photo-definable hydrogel material directly on the electrode layer; and exposing a portion of the electrode layer by lithographically patterning the first photo-definable hydrogel material. 3. The method according to claim 2 , wherein forming the second hydrogel layer comprises: depositing a second photo-definable hydrogel material directly on the first hydrogel layer and directly on a portion of the electrode layer exposed by the patterning of the first hydrogel layer; exposing to radiation a region of the second photo-definable hydrogel material directly deposited on the portion of the electrode layer exposed by the patterning of the first hydrogel layer; and removing portions of the second photo-definable hydrogel material that were not exposed to the radiation. 4. The method according to claim 1 , wherein forming the second hydrogel layer comprises: depositing a photo-definable hydrogel material only on a region closely surrounding a portion of the electrode layer exposed by the opening; and exposing the photo-definable hydrogel material to radiation. 5. The method according to claim 4 , wherein depositing the photo-definable hydrogel material comprises printing the photo-definable hydrogel material over the first hydrogel layer and the electrode layer. 6. The method according to claim 1 , wherein providing the foil layer comprises positioning the foil layer on a support substrate, the method further comprising removing the support substrate after forming the second hydrogel layer. 7. The method according to claim 1 , comprising: forming an adhesive layer on the foil layer prior to forming the first hydrogel layer, and forming the first hydrogel layer over and in contact with the adhesive layer. 8. The method according to claim 7 , wherein forming the adhesive layer comprises: plasma treating the foil layer; immersing the foil layer in a silane solution; rinsing the foil layer in a solvent; and heating the foil layer. 9. The method according to claim 8 , wherein the plasma treating, immersing, rinsing, and heating are performed in the presence of a photoresist mask formed on the electrode layer, the method further comprising removing the photoresist mask after forming the adhesive layer. 10. The method according to claim 1 , wherein a portion of the first hydrogel layer is positioned between a portion of the second hydrogel layer and the electrode layer. 11. The method according to claim 1 , wherein: the first hydrogel layer is a first photo-definable hydrogel membrane; and the second hydrogel layer is a second photo-definable hydrogel membrane. 12. A method, comprising: providing a foil layer; forming an electrode layer positioned on the foil layer; forming a first hydrogel layer positioned over the foil layer and having an opening through which a portion of the electrode layer is exposed; and forming a second hydrogel layer positioned in the opening and in contact with the electrode layer, the second hydrogel layer including an immobilized bio-recognition element. 13. The method of claim 12 , further comprising: forming an adhesive layer positioned between and in contact with the foil layer and the first hydrogel layer. 14. The method of claim 12 , wherein the opening in the first hydrogel layer is one of a plurality of openings in the first hydrogel layer through which respective portions of the electrode layer are exposed, and wherein the second hydrogel layer is in contact with the electrode layer through fewer than all of the plurality of openings in the first hydrogel layer. 15. The method of claim 12 , wherein the foil layer is a polymeric foil. 16. The method of claim 12 , wherein the electrode layer is a layer of an electrically conductive polymer. 17. The method of claim 12 , wherein the electrode layer comprises a titanium seed layer in contact with the foil layer and a gold layer positioned over the titanium seed layer. 18. A method for manufacturing a biosensor, comprising forming an electrode layer over a substrate; forming a first hydrogel layer positioned over the substrate and having an opening through which a portion of the electrode layer is exposed; and forming a second hydrogel layer positioned in the opening and in contact with the electrode layer, the second hydrogel layer including an immobilized bio-recognition element. 19. The method according to claim 18 , wherein forming the first hydrogel layer comprises: depositing a first photo-definable hydrogel material directly on the electrode layer; and forming the opening by lithographically patterning the first photo-definable hydrogel material and exposing a portion of the electrode layer. 20. The method according to claim 19 , wherein forming the second hydrogel layer comprises: depositing a second photo-definable hydrogel material directly on the first hydrogel layer and directly on the portion of the electrode region exposed by the patterning of the first photo-definable hydrogel material; exposing to radiation a region of the second photo-definable hydrogel material directly deposited on the portion of the electrode region exposed by the patterning of the first photo-definable hydrogel material; and removing portions of the second photo-definable hydrogel material that were not exposed to the radiation. 21. The method according to claim 18 , wherein forming the second hydrogel layer comprises: depositing a second photo-definable hydrogel material only on a region closely surrounding the portion of the electrode region exposed by the patterning of the first photo-definable hydrogel material; and exposing the second photo-definable hydrogel material to radiation. 22. The method according to claim 18 , further comprising: forming a foil on the substrate, wherein forming the first hydrogel layer includes forming the first hydrogel layer on the foil, the foil being positioned between the first hydrogel layer and the substrate; and removing the substrate after forming the second hydrogel layer.
Electrolytic cell components · CPC title
Cells and electrode assemblies · CPC title
Biochemical electrodes {, e.g. electrical or mechanical details for in vitro measurements} · CPC title
Analytical elements · CPC title
Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface · CPC title
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