Six-axis force-torque sensor
US-9423308-B2 · Aug 23, 2016 · US
US9823141B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9823141-B2 |
| Application number | US-201615005353-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 25, 2016 |
| Priority date | Jun 12, 2015 |
| Publication date | Nov 21, 2017 |
| Grant date | Nov 21, 2017 |
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A sensing device has a first substrate, a second substrate, a plurality of sets of first electrodes, a plurality of second electrodes, a plurality of first axis signal lines, a plurality of second axis signal lines, and a plurality of second signal lines. The second substrate is above the first substrate and has a reset structure. The second electrodes are on the first surface of the second substrate in array. Each set of first electrodes is on the first substrate in array, corresponding to one of the plurality of second electrodes, and having at least one first axis electrode and at least one second axis electrode. The first axis electrode and the second axis electrode both partially overlap with the corresponding second electrode.
Opening claim text (preview).
What is claimed is: 1. A sensing device, comprising: a first substrate; a second substrate above the first substrate, having at least one reset structure between the first substrate and a body of the second substrate; M*N second electrodes on a first surface of the second substrate in array, M and N being integers greater than two; M*N sets of first electrodes on the first substrate in array, wherein a (i, j)th set of first electrodes corresponds to a (i, j)th second electrode of second electrodes, i is an integer greater than zero and less than M, j is an integer greater than zero and less than N, and the (i, j)th set of first electrodes further comprises: a first one of first axis electrodes and a second one of first axis electrodes partially overlapping the corresponding second electrode; and a first one of second axis electrodes and a second one of second axis electrodes partially overlapping the corresponding second electrode; (M+1) first axis signal lines, with said first axis signal lines extending in a first direction, wherein an ith first axis signal line thereof is connected to the second ones of the first axis electrodes from an (i−1, 1)th set of the first electrodes to an (i−1, N)th set of the first electrodes and the first ones of the first axis electrodes from a (i, 1)th set of the first electrodes to a (i, N)th set of the first electrodes respectively; (N+1) second axis signal lines, with said second axis signal lines extending in a second direction, wherein an jth second axis signal line thereof is connected to the second ones of the second axis electrodes from an (1, j−1)th set of the first electrodes to an (N, j−1)th set of the first electrodes and the first ones of the second axis electrodes from a (1,j)th set of the first electrodes to a (N, j)th set of the first electrodes respectively; and a plurality of second signal lines extending along a third direction and connected to the plurality of second electrodes respectively; wherein the first direction, the second direction and the third direction are different from each other. 2. The sensing device of claim 1 , wherein the at least one reset structure is a soft dielectric sandwiched between the body of the second substrate and the first substrate. 3. The sensing device of claim 1 , wherein the second substrate further comprises a plurality of pressing parts, and the at least one reset structure is a plurality of reset structures, and the plurality of reset structures surround each of the plurality of pressing parts, and the plurality of second electrodes are on the plurality of pressing parts. 4. The sensing device of claim 1 , wherein the at least one reset structure is a plurality of reset structures, and the plurality of reset structures are sandwiched between the body of the second substrate and the first substrate, and the plurality of reset structures are neighboring to the plurality of second electrodes but do not overlap the plurality of second electrodes. 5. The sensing device of claim 1 , further comprising a processing module electrically connected to the plurality of first axis signal lines, the plurality of second axis signal lines, and the plurality of second signal lines, for determining a shift of one of the plurality of second electrodes according to a signal of one of the plurality of first axis signal lines, a signal of one of the plurality of second axis signal lines, and a signal of one of the plurality of second signal lines. 6. The sensing device of claim 5 , wherein the processing module further calculates a corresponding force value and a corresponding force direction according to the shift. 7. The sensing device of claim 1 , wherein each of the M*N second electrodes is cross-shaped.
for measuring force distributions, e.g. using force arrays (G01L1/148 takes precedence) · CPC title
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