Method and chemistry for selenium electrodeposition

Patent metadata

Field	Value
Publication number	US-9822458-B2
Application number	US-201414459156-A
Country	US
Kind code	B2
Filing date	Aug 13, 2014
Priority date	Sep 9, 2010
Publication date	Nov 21, 2017
Grant date	Nov 21, 2017

Abstract

Techniques for electrodepositing selenium (Se)-containing films are provided. In one aspect, a method of preparing a Se electroplating solution is provided. The method includes the following steps. The solution is formed from a mixture of selenium oxide; an acid selected from the group consisting of alkane sulfonic acid, alkene sulfonic acid, aryl sulfonic acid, heterocyclic sulfonic acid, aromatic sulfonic acid and perchloric acid; and a solvent. A pH of the solution is then adjusted to from about 2.0 to about 3.0. The pH of the solution can be adjusted to from about 2.0 to about 3.0 by adding a base (e.g., sodium hydroxide) to the solution. A Se electroplating solution, an electroplating method and a method for fabricating a photovoltaic device are also provided.

First claim

What is claimed is:

1. An electroplating method, comprising the steps of:
preparing a selenium electroplating solution by the steps of:
forming the solution from a mixture comprising selenium oxide, an acid selected from the group consisting of alkane sulfonic acid, alkene sulfonic acid, aryl sulfonic acid, heterocyclic sulfonic acid, aromatic sulfonic acid and perchloric acid and a solvent;
adjusting a pH of the solution to from about 2.0 to about 3.0, wherein the solution is free of metals, and the selenium oxide is an only plating element present in the solution such that the solution is configured to electroplate an elemental selenium film wherein selenium in the film is present in a non-alloy form,

providing a substrate; and
electroplating the elemental selenium film on the substrate using the solution as a plating bath.

2. The method of claim 1 , further comprising the step of:
annealing the film at a temperature of from about 100° C. to about 300° C. for a duration of from about 30 minutes to about 60 minutes.

3. The method of claim 1 , wherein the step of adjusting the pH of the solution comprises the step of:
adding a base to the solution, after the forming step has been performed, to adjust the pH of the solution to from about 2.0 to about 3.0.

4. The method of claim 3 , wherein the base comprises sodium hydroxide.

5. The method of claim 1 , wherein the acid is the alkane sulfonic acid, and wherein the alkane sulfonic acid is methanesulfonic acid.

6. The method of claim 1 , wherein the selenium oxide comprises selenium dioxide.

7. The method of claim 1 , further comprising the step of:
adding one or more additives to the solution after the pH of the solution has been adjusted.

8. The method of claim 7 , wherein the step of adding the one or more additives to the solution comprises the step of:
after the pH of the solution has been adjusted, adding at least one organic additive to the solution at a concentration of from about 1 part per million to about 10,000 parts per million.

9. The method of claim 8 , wherein the at least one organic additive has one or more nitrogen atoms and one or more sulfur atoms.

10. The method of claim 9 , wherein the at least one organic additive is selected from the group consisting of thiourea and thiazine.

Assignees

• IBM

Inventors

• Ahmed Shafaat
• Deligianni Hariklia

Classifications

• C25D9/04 Primary

  with inorganic materials · CPC title

• C25D3/54

  of metals not provided for in groups C25D3/04 - C25D3/50 · CPC title

• C25D3/56

  of alloys · CPC title

• C25D5/50

  by heat-treatment · CPC title

• Y02E10/541

  CuInSe2 material PV cells · CPC title