Method for manufacturing an electrochemical component comprising a lithium metal anode and an ion-conductive inorganic material layer
US-2024234676-A9 · Jul 11, 2024 · US
US9822438B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9822438-B2 |
| Application number | US-201514672515-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 30, 2015 |
| Priority date | Apr 2, 2014 |
| Publication date | Nov 21, 2017 |
| Grant date | Nov 21, 2017 |
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The invention relates to a method for producing a coated cutting tool in which a coating with at least one oxide layer is applied to a base layer by means of a PVD method. The method includes voltage-pulsed sputtering of at least one cathode metal selected from the group of aluminum, scandium, yttrium, silicon, zinc, titanium, zirconium, hafnium, chromium, niobium, and tantalum, as well as mixtures and alloys thereof in the presence of a reactive gas; and the depositing of at least one oxide layer formed by converting the reactive gas with the sputtered cathode metal onto the base body. The cathode metal includes at least aluminum. Dinitrogen oxide is used as the reactive gas. The at least one oxide layer is in the form of an oxide, mixed oxide, or oxide mixture of the at least one cathode metal.
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What is claimed is: 1. A cutting tool with a base body and a coating, characterized in that the coating has one or more oxide layers wherein at least one oxide layer is produced according to the method comprising the steps of: voltage-pulsed sputtering of aluminum and at least one cathode metal selected from the group consisting of magnesium, aluminum, scandium, yttrium, silicon, zinc, titanium, zirconium, hafnium, chromium, niobium, tantalum, as well as mixtures and alloys thereof in the presence of a reactive gas; and depositing of at least one oxide layer formed by converting the reactive gas with the sputtered aluminum and cathode metal onto the base body, wherein dinitrogen oxide is used as the reactive gas, and wherein the at least one oxide layer is formed in the form of a mixed oxide of aluminum and the at least one cathode metal in a mixture with an oxynitride of the cathode metal, aluminum or a combination thereof. 2. The cutting tool according to claim 1 , characterized in that a base coating comprising titanium aluminum nitride is applied directly to the base body. 3. The cutting tool according to claim 2 , wherein the base coating contains 50 to 60 atomic % aluminum. 4. The cutting tool according to claim 1 , characterized in that the at least one oxide layer comprises aluminum oxidynitride enriched with portions of the at least one cathode metal. 5. The cutting tool according to claim 1 , characterized in that the coating further comprises multiple oxide layers. 6. The cutting tool of claim 5 , wherein the multiple oxide layers alternate with one or more nitrides or carbon nitrides of the metals Ti, Zr, Hf, Cr, Nb, and Ta, or with titanium aluminum nitride. 7. The cutting tool according to claim 5 , characterized in that the multiple oxide layers have a gradient with an aluminum content decreasing from the base body in the direction of the outermost oxide layer. 8. The cutting tool according to claim 1 , characterized in that the coating has a cover layer formed from the oxide layer. 9. The cutting tool according to claim 8 , characterized in that the cover layer has a coating thickness ranging from about 0.1 to about 0.5 μm. 10. The cutting tool according to claim 9 , characterized in that the coating consists of a titanium aluminum nitride layer applied directly to the base body and the cover layer formed from the oxide layer. 11. The cutting tool according claim 1 , wherein the at least one cathode metal is silicon. 12. The cutting tool according claim 1 , wherein the at least one cathode metal is titanium. 13. The cutting tool according claim 1 , wherein the at least one cathode metal is zirconium. 14. The cutting tool according claim 1 , wherein the at least one cathode metal is chromium. 15. The cutting tool according to claim 1 , wherein the aluminum and at least one cathode metal are present in the oxide layer at a ratio (Al:M) ranging 98:2 to 70:30. 16. The cutting tool of claim 4 , wherein the aluminum oxynitride is enriched with portions of at least one other cathode metal selected from the group of consisting of Mg, Sc, Y, Si, Zn, Ti, Zr, Hf, Cr, Nb, and Ta, as well as combinations thereof. 17. A cutting tool with a base body and a coating, characterized in that the coating has one or more oxide layers wherein at least one oxide layer is produced according to the method comprising the steps of: voltage-pulsed sputtering of at least one cathode metal selected from the group consisting of magnesium, aluminum, scandium, yttrium, silicon, zinc, titanium, zirconium, hafnium, chromium, niobium, tantalum, as well as mixtures and alloys thereof in the presence of a reactive gas; and depositing of at least one oxide layer formed by converting the reactive gas with the sputtered cathode metal onto the base body, wherein the cathode metal comprises at least aluminum, wherein dinitrogen oxide is used as the reactive gas, and wherein the at least one oxide layer is formed in the form of an oxide or oxide mixture of the at least one cathode metal in a mixture with one or more oxynitrides of the cathode metal. 18. The method of claim 17 , wherein the cathode metal further comprises silicon. 19. The method of claim 17 , wherein the cathode metal further comprises titanium. 20. The method of claim 17 , wherein the cathode metal further comprises chromium. 21. The method of claim 17 , wherein the cathode metal further comprises zirconium.
using reactive gases other than O2, H2O, N2, NH3 or CH4 · CPC title
coatings specially adapted for cutting tools or wear applications · CPC title
Oxides (C23C14/10 takes precedence) · CPC title
including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides · CPC title
Oxynitrides · CPC title
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