Heat transfer system for an inductively coupled plasma device

Patent metadata

Field	Value
Publication number	US-9820370-B2
Application number	US-201615066345-A
Country	US
Kind code	B2
Filing date	Mar 10, 2016
Priority date	Mar 10, 2015
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

An inductively coupled plasma generating device is configured to include a plasma torch, a high frequency induction coil and a high frequency power source. In addition, a heat transfer member, in which a first terminal is connected to the high frequency induction coil and a second terminal is connected to a cooling block, is disposed in the inductively coupled plasma generating device. The second terminal of the heat transfer member is located above the first terminal, thereby causing condensed operating fluid to fall and move toward the first terminal due to the action of gravity. Accordingly, it is possible to achieve excellent cooling capacity by improving circulation and mobility of the operating fluid.

First claim

What is claimed is:

1. An inductively coupled plasma analysis device configured to obtain an atomic emission line by using inductively coupled plasma so as to excite or ionize an element, the inductively coupled plasma analysis device comprising:
a plasma torch to which carrier gas containing a target element is guided, the plasma torch including an opening from which plasma is generated;
a high frequency induction coil wound around the plasma torch;
a horizontal input block or an axial input block configured to receive a part of light of the plasma generated in the plasma torch;
a spectroscope configured to detect the light having passed through the horizontal input block or the axial input block;
a heat transfer member having a first terminal and a second terminal, the first terminal being connected to the high frequency induction coil; and
a cooling block connected to the second terminal of the heat transfer member,
wherein operating fluid is enclosed in the heat transfer member, the operating fluid being evaporated through the first terminal by heat generated by the high frequency induction coil to form steam, the steam of the operating fluid moving toward the second terminal so as to move the heat generated by the high frequency induction coil toward the second terminal, and the steam being condensed at the second terminal so that the condensed operating fluid moves toward the first terminal,
wherein at least one of an exhaust duct chimney and the axial input block is disposed above the plasma torch such that the at least one of the exhaust duct chimney and the axial input block overlaps the opening of the plasma torch in a vertical direction, the exhaust duct chimney configured to exhaust heat of the plasma generated in the plasma torch and/or a reaction product, and
wherein the cooling block is connected to the at least one of the exhaust duct chimney and the axial input block.

2. The inductively coupled plasma analysis device according to claim 1 , wherein the heat transfer member comprises a heat pipe in which the operating fluid is enclosed.

3. The inductively coupled plasma analysis device according to claim 1 , wherein the cooling block directly contacts the at least one of the exhaust duct chimney and the axial input block.

Assignees

• Hitachi High-Tech Science Corp

Inventors

• Nakagawa Yoshitomo
• Ikku Yutaka

Classifications

• H05H1/28 Primary

  Cooling arrangements · CPC title

• H05H1/30 Primary

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/28 takes precedence) · CPC title

• G01N21/73

  using plasma burners or torches · CPC title

• H01J49/105

  using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP] · CPC title

• H05H1/46

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title