MEMS device

Patent metadata

Field	Value
Publication number	US-9819253-B2
Application number	US-201214438315-A
Country	US
Kind code	B2
Filing date	Oct 25, 2012
Priority date	Oct 25, 2012
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

According to the present invention there is provided a device comprising a MEMS die and, a single magnet, wherein the MEMS die cooperates with the magnet, such that the MEMS die is submerged in a magnetic field provided by the magnet; wherein the magnet is a single multi-pole magnet.

First claim

The invention claimed is:

1. A device comprising:
a magnet comprising multiple-poles;
a MEMS die comprising an actuation coil, the MEMS die to cooperate with the magnet such that the actuation coil is submerged in a magnetic field provided by the magnet;
a MEMS mirror, the MEMS mirror comprising a first and a second reflective surface, the magnet comprising an aperture adjacent to the MEMS mirror to allow light to pass through the aperture to either the first or the second surface; and
the magnet comprising a first portion, which has a first direction of magnetization, and a second portion, which has a second direction of magnetization.

2. A device according to claim 1 , comprising ferromagnetic material disposed around a periphery of the magnet to reduce the amount of magnetic field leaked from the device.

3. A device according to claim 2 , the ferromagnetic material extends above a plane defined by the MEMS die.

4. A device according to claim 1 , the magnet comprising one or more chamfered edges to reduce the size of the device.

5. A device according to claim 1 , comprising a second MEMS die to cooperate with the magnet such that the second MEMS die is submerged in a magnetic field provided by the magnet.

6. A device according to claim 1 , the magnet comprising a u shaped cross section.

7. A device according to claim 6 , the magnet comprising one or more flanges.

8. A device according to claim 6 , the MEMS die at least partially surrounded by the magnet.

9. A device according to claim 1 , the magnet comprising a third portion having a third direction of magnetization, a fourth portion having a fourth direction of magnetization, and a fifth portion having a fifth direction of magnetization substantially equal to the first direction of magnetization.

10. A device according to claim 1 , the magnet comprising one or more channeled areas and one or more non-channeled areas, each of the one or more channeled areas comprising a thickness that is less than a thickness of the one or more non-channeled areas.

11. A device comprising:
a magnet, the magnet comprising:
a first portion having a first direction of magnetization,
a second portion disposed proximate to the first portion, the second portion having a second direction of magnetization substantially opposite to the first direction of magnetization,
a third portion disposed proximate to the second portion, the third portion having a direction of magnetization substantially equal to the second direction of magnetization, and
a fourth portion disposed proximate to the third portion, the fourth portion having a direction of magnetization substantially equal to the first direction of magnetization,
a fifth portion disposed proximate to the fourth portion, the fifth portion having a direction of magnetization substantially equal to the second and third directions of magnetization, the second portion, the third portion and the fourth portion comprising areas of reduced thickness to define a first channel at an interface between the second portion and the third portion and a second channel at an interface between the third portion and the fourth portion;

a MEMS die comprising an actuation coil, the MEMS die to cooperate with the magnet such that the actuation coil is submerged in a magnetic field provided by the magnet.

12. A device according to claim 11 , comprising a second MEMS die to cooperate with the magnet such that the second MEMS die is submerged in a magnetic field provided by the magnet.

13. A device according to claim 11 , comprising a MEMS mirror, the MEMS mirror comprising a first and a second reflective surface, the magnet comprising an aperture adjacent to the MEMS mirror to allow light to pass through the aperture to either the first or the second surface.

14. A device comprising:
a magnet, the magnet comprising:
a first portion having a first direction of magnetization;
a second portion having a second direction of magnetization;
a third portion having a direction of magnetization substantially equal to the second direction of magnetization;
a fourth portion having a direction of magnetization substantially equal to the first direction of magnetization;
a fifth portion having a direction of magnetization substantially equal to the second direction of magnetization;
a sixth portion having a direction of magnetization substantially equal to the first direction of magnetization;
a seventh portion having a direction of magnetization substantially equal to the second direction of magnetization; and
an eighth portion having a direction of magnetization substantially equal to the first direction of magnetization; and

a MEMS die comprising a first actuation coil and a second actuation coil, the first actuation coil disposed adjacent to a first interface between the first and second portions of the magnet and adjacent to a second interface between the third and fourth portions of the magnet, the second actuation coil disposed adjacent to a third interface between the fifth and sixth portions of the magnet and adjacent to a fourth interface between the seventh and eighth portions of the magnet, the MEMS die to cooperate with the magnet such that the first and second actuation coils are submerged in a magnetic field provided by the magnet.

15. A device comprising:
a magnet, the magnet comprising:
a first triangular cross sectioned portion to generate a first magnetic field, the first triangular cross sectioned portion comprising a first sub-portion having a first direction of magnetization and a second sub-portion having a second direction of magnetization; and
a second triangular cross sectioned portion to generate a second magnetic field, the second triangular cross sectioned portion comprising a third sub-portion having a third direction of magnetization and a fourth sub-portion having a fourth direction of magnetization;

a first MEMS die, the first MEMS die to cooperate with the first triangular cross sectioned portion such that the first MEMS die is at least partially submerged in the first magnetic field; and
a second MEMS die optically coupled to the first MEMS die, the second MEMS die to cooperate with the second triangular cross sectioned portion such that the second MEMS die is at least partially submerged in the second magnetic field.

Assignees

• Intel Corp

Inventors

• Gamet Julien
• Khechana Faouzi
• Abele Nicolas

Classifications

• H02K33/18 Primary

  with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets · CPC title

• H02K1/17

  Stator cores with permanent magnets · CPC title

• H02K1/34

  Reciprocating, oscillating or vibrating parts of the magnetic circuit · CPC title

• G02B26/0833 Primary

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title