Gas laser oscillator capable of estimating sealability of gas container
US-2015372441-A1 · Dec 24, 2015 · US
Gas laser oscillator having auxiliary electrodes
US9819139B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9819139-B2 |
| Application number | US-201615284749-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 4, 2016 |
| Priority date | Oct 5, 2015 |
| Publication date | Nov 14, 2017 |
| Grant date | Nov 14, 2017 |
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- Title
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Abstract
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A gas laser oscillator includes laser gas circulation paths including first and second paths; a first discharge tube provided in the first path; a second discharge tube provided in the second path; a laser power supply for supplying a first high frequency power to the first discharge tube and supplying a second high frequency power having a different phase from the first high frequency power to the second discharge tube; and a matching unit including a first coil and a first capacitor, and a second coil and a second capacitor. Each value of the first coil, the first capacitor, the second coil, and the second capacitor is determined such that the difference between the peak value of a voltage applied to the first discharge tube and the peak value of a voltage applied to the second discharge tube falls within a predetermined range.
First claim
Opening claim text (preview).
What is claimed is: 1. A gas laser oscillator comprising: a plurality of laser gas circulation paths including a first path and a second path; a first discharge tube provided in the first path; a second discharge tube provided in the second path; a laser power supply for supplying a first high frequency power to the first discharge tube and supplying a second high frequency power having a different phase from the first high frequency power to the second discharge tube; and a matching unit including a first coil and a first capacitor to be used for impedance matching with a discharge load in the first path, and a second coil and a second capacitor to be used for impedance matching with a discharge load in the second path, wherein each value of the first coil, the first capacitor, the second coil, and the second capacitor is determined such that a difference between a peak value of a voltage applied to the first discharge tube and a peak value of a voltage applied to the second discharge tube falls within a range from 500 V to 1000 V. 2. A gas laser oscillator comprising: a plurality of laser gas circulation paths including a first path and a second path; a first discharge tube provided in the first path; a second discharge tube provided in the second path; a laser power supply for supplying a first high frequency power to the first discharge tube and supplying a second high frequency power having a different phase from the first high frequency power to the second discharge tube; and a matching unit including a first coil and a first capacitor to be used for impedance matching with a discharge load in the first path, and a second coil and a second capacitor to be used for impedance matching with a discharge load in the second path, wherein each value of the first coil, the first capacitor, the second coil, and the second capacitor is determined such that the difference between the peak value of a voltage applied to the first discharge tube and the peak value of a voltage applied to the second discharge tube falls within a predetermined range, and wherein an auxiliary electrode is provided in the vicinity of only one of the first discharge tube and the second discharge tube to which the voltage having the higher peak value is applied.
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Classifications
with auxiliary ionisation, e.g. double discharge excitation · CPC title
Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} · CPC title
Details of the driver electronics and electric discharge circuits · CPC title
- H01S3/097Primary
by gas discharge of a gas laser · CPC title
Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers (tandem arrangements of separate gas lasers H01S3/2366) · CPC title
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- What does patent US9819139B2 cover?
- A gas laser oscillator includes laser gas circulation paths including first and second paths; a first discharge tube provided in the first path; a second discharge tube provided in the second path; a laser power supply for supplying a first high frequency power to the first discharge tube and supplying a second high frequency power having a different phase from the first high frequency power to…
- Who is the assignee on this patent?
- Fanuc Corp
- What technology area does this patent fall under?
- Primary CPC classification H01S3/097. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Nov 14 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).