Array substrate, manufacturing method thereof, display device, thin-film transistor (TFT) and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-9818775-B2
Application number	US-201715443028-A
Country	US
Kind code	B2
Filing date	Feb 27, 2017
Priority date	May 27, 2014
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

An array substrate, a manufacturing method thereof, a display device, a thin-film transistor (TFT) and a manufacturing method thereof are disclosed. The method for manufacturing the TFT comprises: forming a pattern of an active layer and a gate insulating layer provided with a metal film on a base substrate; patterning the metal film by one patterning process, and forming patterns of a gate electrode, a source electrode, a drain electrode, a gate line and a data line; forming a passivation layer on the base substrate; patterning the passivation layer by one patterning process, and forming a source contact hole, a drain contact hole and a bridge structure contact hole; and forming a transparent conductive film on the base substrate, and removing partial transparent conductive film to form a source contact portion, a drain contact portion ( 214 ), a pixel electrode and a bridge structure. The manufacturing method can reduce the number of the patterning processes.

First claim

The invention claimed is:

1. An array substrate, comprising:
an active layer disposed on a base substrate;
a gate insulating layer for covering the active layer;
a gate electrode, a source electrode, a drain electrode, a gate line and a data line disposed on the gate insulating layer and arranged in a same layer, in which the gate line or the data line is disconnected at an intersection of the gate line and the data line;
a passivation layer for covering the gate electrode, the source electrode, the drain electrode, the gate line and the data line;
a source contact hole, a drain contact hole and bridge structure contact holes disposed in the passivation layer and the gate insulating layer, in which the source electrode and the active layer are partially exposed by the source contact hole, the drain electrode and the active layers are partially exposed by the drain contact hole, the disconnected gate line or data line is partially exposed by the bridge structure contact holes; and
a source contact portion, a drain contact portion, a pixel electrode and a bridge structure arranged in the same layer, in which the source contact portion is disposed in the source contact hole and electrically connected with the source electrode and the active layer, the drain contact portion disposed in the drain contact hole and electrically connected with the drain electrode and the active layer, the pixel electrode disposed on the passivation layer on the drain electrode and electrically connected with the drain electrode through the drain contact portion, the bridge structure disposed in the bridge structure contact holes and on the passivation layer and electrically connected with the disconnected gate line or data line.

2. The array substrate according to claim 1 , further comprising: a storage electrode arranged in the same layer with the active layer.

3. The array substrate according to claim 1 , wherein the passivation layer is made from an acrylic material.

4. The array substrate according to claim 1 , wherein a thickness of the source contact portion, the drain contact portion, the pixel electrode and the bridge structure is 20 nm to 150 nm.

5. The array substrate according to claim 1 , further comprising: a buffer layer disposed between the base substrate and the active layer.

6. The array substrate according to claim 1 , further comprising: a pixel define layer for covering the source contact portion, the drain contact portion and the bridge structure.

7. The array substrate according to claim 6 , wherein the pixel define layer is made from an acrylic material.

8. A display device, comprising the array substrate according to claim 1 .

9. The display device according to claim 8 , wherein the display device is a liquid crystal display (LCD) device or an organic light-emitting diode (OLED) display device.

10. A thin-film transistor (TFT), comprising:
an active layer disposed on a base substrate;
a gate insulating layer for covering the active layer;
a gate electrode, a source electrode and a drain electrode disposed on the gate insulating layer and arranged in the same layer;
a passivation layer for covering the gate electrode, the source electrode and the drain electrode;
a source contact hole and a drain contact hole disposed in the passivation layer and the gate insulating layer, in which the source electrode and the active layer are partially exposed by the source contact hole, and the drain electrode and the active layer are partially exposed by the drain contact hole; and
a source contact portion and a drain contact portion arranged in the same layer, in which the source contact portion is disposed in the source contact hole and electrically connected with the source electrode and the active layer, and the drain contact portion is disposed in the drain contact hole and electrically connected with the drain electrode and the active layer.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Long Chunping
• Im Jang Soon
• Liu Chien Hung

Classifications

• H10P30/204

  into Group IV semiconductors · CPC title

• H10P30/22

  using masks · CPC title

• H10P30/21

  of electrically active species · CPC title

• H10D84/01

  Manufacture or treatment · CPC title

• H01L27/1255

  Electricity · mapped topic