Device for monitoring environmental states of a microscope sample with an electron microscope sample holder

Patent metadata

Field	Value
Publication number	US-9818578-B2
Application number	US-201514626234-A
Country	US
Kind code	B2
Filing date	Feb 19, 2015
Priority date	Feb 19, 2014
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.

First claim

The invention claimed is:

1. An electron microscope sample holder comprising:
a specimen tip defining a cell;
a sample support assembly for positioning in the cell, the sample support assembly comprising a first sample support device and a second sample support device that covers the first sample support device when the sample support devices are positioned in the cell; and
a fiber optic sensor assembly comprising a fiber optic cable and a sensor end carried by the fiber optic cable, the sensor end positioned in the cell of the specimen tip, wherein the second sample support device covers the sensor end when the sample support devices are positioned in the cell.

2. The electron microscope sample holder according to claim 1 , wherein the second sample support device is larger than the first sample support device such that the second sample support device covers and overhangs beyond the sides of the first sample support device when the sample support devices are positioned in the cell.

3. The electron microscope sample holder according to claim 2 , wherein the second sample support device covers and overhangs the sensor end when the sample support devices are positioned in the cell.

4. The electron microscope sample holder according to claim 3 , further comprising a first O-ring and a second O-ring, wherein the first sample support device is positioned atop the first O-ring and surrounded by the second O-ring when the sample support devices are positioned in the cell.

5. The electron microscope sample holder according to claim 4 , wherein:
the first O-ring has a first diameter;
the second O-ring has a second diameter that is greater than the first diameter; and
when the sample support devices are positioned in the cell, the first O-ring contacts the first sample support device and the second O-ring contacts the second sample support device.

6. The electron microscope sample holder according to claim 5 , wherein the sensor end is positioned between the first O-ring and second O-ring.

7. The electron microscope sample holder according to claim 6 , wherein:
the first sample support device has four sides; and
the second sample support device has four sides each of which overhangs a corresponding one of the four sides of the first sample support device.

8. The electron microscope sample holder according to claim 3 , wherein the first sample support device has a first thin membrane region, and the second sample support device has a second thin membrane region aligned with the first thin membrane region when the sample support assembly is positioned in the cell.

9. The electron microscope sample holder according to claim 8 , wherein the first sample support device comprises a first MEMS chip, and the wherein the second sample support device comprises a second MEMS chip.

10. The electron microscope sample holder according to claim 8 , wherein at least one of the first sample support device and second sample support device comprises a stimulus device.

11. The electron microscope sample holder according to claim 10 , wherein the stimulus sample support device is configured to provide at least one of heating, cooling, voltage, electrical current, mechanical stress, and mechanical strain.

12. The electron microscope sample holder according to claim 1 , further comprising a barrel on which the specimen tip is mounted, wherein the fiber optic cable extends from the sensor end through the barrel.

13. The electron microscope sample holder of claim 12 , wherein at least one fluidic pathway in fluid communication with the cell extends along the barrel.

14. The electron microscope sample holder of claim 13 , wherein the at least one fluidic pathway extends to the cell and defines at least one of a fluid ingress and a fluid egress of the cell.

15. The electron microscope sample holder of claim 14 , wherein the sensor end of the fiber optic sensor assembly is positioned in the cell proximal to the at least one of a fluid ingress and a fluid egress of the cell.

16. The electron microscope sample holder of claim 12 , wherein the electron microscope sample holder further comprises:
a first fluid pathway extending along the barrel to an ingress of the cell; and
a second fluid pathway extending along the barrel to an egress of the cell.

17. The electron microscope sample holder of claim 16 , wherein the sensor end of the fiber optic sensor assembly is positioned in the cell proximal the ingress of the cell, and wherein the electron microscope sample holder further comprises a second fiber optic sensor assembly comprising:
a second fiber optic cable and a second sensor end carried by the second fiber optic cable, the second sensor end positioned in the cell of the specimen tip, wherein at least the second sample support device covers the second sensor end when the sample support assembly is positioned in the cell.

18. The electron microscope sample holder of claim 17 , wherein the second sensor end is positioned in the cell proximal the egress.

19. The electron microscope sample holder of claim 1 , wherein the sensor end of the fiber optic sensor assembly comprises an intrinsic fiber optic sensor.

20. The electron microscope sample holder of claim 1 , wherein the fiber optic sensor assembly measures at least one of pressure, temperature, and pH.

Assignees

• Protochips Inc

Inventors

• Gardiner Daniel Stephen
• Carpenter William Bradford
• Damiano Jr John
• Walden Ii Franklin Stampley
• Nackashi David P

Classifications

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J2237/2001

  Maintaining constant desired temperature · CPC title

• H01J2237/206

  Modifying objects while observing · CPC title

• H01J2237/2003

  Environmental cells · CPC title

• H01J37/3178

  for applying thin layers on objects · CPC title