Data tuning for fast computation and polygonal manipulation simplification

Patent metadata

Field	Value
Publication number	US-9818168-B2
Application number	US-201615078456-A
Country	US
Kind code	B2
Filing date	Mar 23, 2016
Priority date	Mar 24, 2015
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

A data tuning software application platform relating to the ability to apply maskless lithography patterns to a substrate in a manufacturing process is disclosed in which the application processes graphical objects and configures the graphical objects for partition into a plurality of trapezoids. The trapezoids may be selectively merged in order to minimize the trapezoid count while limiting the loss of edge fidelity.

First claim

What is claimed is:

1. A method for patterning a substrate using write beams and tuning data for parallel image processing, comprising:
loading mask data into a memory cell and controlling tilting of a plurality of mirrors using the mask data;
delivering light to a surface of the substrate;
processing one or more graphical objects to generate a plurality of convex polygons;
forming an edge list for representing each of the plurality of convex polygons;
storing the edge list in an image processing unit;
determining locations at which a first selection of the plurality of convex polygons can be merged with a second selection of the plurality of convex polygons;
merging the first selection of the plurality of convex polygons with the second selection of the plurality of convex polygons to reduce the number of convex polygons within the plurality of convex polygons stored in the image processing unit, wherein the merging limits the loss of edge fidelity of the convex polygons;
creating an error amount based on the merging of convex polygons and comparing the error amount against an acceptable error amount; and
storing image data generated from the image processing unit.

2. The method of claim 1 , wherein processing one or more graphical objects comprises:
identifying transitions at the boundaries of the one or more graphical objects according to a scan direction; and
partitioning the one or more graphical objects into the plurality of convex polygons.

3. The method of claim 1 , further comprising:
scanning the plurality of convex polygons according to a predetermined scan direction after storing the edge list;
processing at least a first portion of each of the plurality of convex polygons after scanning the plurality of convex polygons; and
analyzing merge locations before merging.

4. The method of claim 1 , further comprising scanning the portion of the convex polygons, wherein the scanning comprises at least one of scanning the portion of the convex polygon along a column and scanning the portion of the convex polygon along a row.

5. The method of claim 1 , wherein the merging reduces the number of convex polygons within the plurality of convex polygons.

6. The method of claim 1 , wherein the image processing unit comprises control logic configured to selectively merge individual convex polygons.

7. The method of claim 6 , wherein the control logic is configured to synchronize operations of the plurality of convex polygons.

8. A computer system for patterning a substrate using write beams and performing data tuning for parallel image processing, comprising:
a processor; and
a memory storing instructions that, when executed by the processor, cause the computer system to:
load mask data into a memory cell and control tilting of a plurality of mirrors using the mask data;
deliver light to a surface of the substrate;
process one or more graphical objects to generate a plurality of convex polygons;
form an edge list for representing each of the plurality of convex polygons;
store the edge list in an image processing unit;
determine locations at which a first selection of the plurality of convex polygons can be merged with a second selection of the plurality of convex polygons;
merge the first selection of the plurality of convex polygons with the second selection of the plurality of convex polygons to reduce the number of convex polygons within the plurality of convex polygons stored in the image processing unit, wherein the merging limits the loss of edge fidelity of the convex polygons;
create an error amount based on the merging of convex polygons and comparing the error amount against an acceptable error amount; and
store image data generated from the image processing unit.

9. The computer system of claim 8 , wherein processing one or more graphical objects comprises:
identifying transitions at the boundaries of the one or more graphical objects according to a scan direction; and
partitioning the one or more graphical objects into the plurality of convex polygons.

10. The computer system of claim 8 , further comprising:
scanning the plurality of convex polygons according to a predetermined scan direction after storing the edge list;
processing at least a first portion of each of the plurality of convex polygons after scanning the plurality of convex polygons; and
analyzing merge locations before merging.

11. The computer system of claim 8 , further comprising scanning the portion of the convex polygons, wherein the scanning comprises at least one of scanning the portion of the convex polygon along a column and scanning the portion of the convex polygon along a row.

12. The computer system of claim 8 , wherein the merging reduces the number of convex polygons within the plurality of convex polygons.

13. The computer system of claim 8 , wherein the image processing unit comprises control logic configured to selectively merge individual convex polygons.

14. The computer system of claim 13 , wherein the control logic is configured to synchronize operations of the plurality of convex polygons.

15. A non-transitory computer-readable medium storing instructions that, when executed by a processor, cause a computer system to control the patterning of a substrate using write beams and to tune data for parallel image processing, by performing the steps of:
loading mask data into a memory cell and control tilting of a plurality of mirrors using the mask data;
delivering light to a surface of the substrate;
processing one or more graphical objects to generate a plurality of convex polygons;
forming an edge list for representing each of the plurality of convex polygons;
storing the edge list in an image processing unit;
determining locations at which a first selection of the plurality of convex polygons can be merged with a second selection of the plurality of convex polygons;
merging the first selection of the plurality of convex polygons with the second selection of the plurality of convex polygons to reduce the number of convex polygons within the plurality of convex polygons stored in the image processing unit, wherein the merging limits the loss of edge fidelity of the convex polygons;
creating an error amount based on the merging of convex polygons and comparing the error amount against an acceptable error amount; and
storing image data generated from the image processing unit.

16. The non-transitory computer-readable medium of claim 15 , wherein processing one or more graphical objects comprises:
identifying transitions at the boundaries of the one or more graphical objects according to a scan direction; and
partitioning the one or more graphical objects into the plurality of convex polygons.

17. The non-transitory computer-readable medium of claim 15 , further comprising:
scanning the plurality of convex polygons according to a predetermined scan direction after storing the edge list;
processing at least a first portion of each of the plurality of convex polygons after scanning the plurality of convex polygons; and
analyzing merge locations before merging.

18. The non-transitory computer-readable medium of claim 15 , further comprising scanning the portion of the convex polygons, wherein the scanning comprises at least one of scanning the portion of the convex polygon along a column and scanning the portion of the convex polygon along a row.

19. The non-transitory computer-readable medium of claim 15 , wherein the merging reduces the number of convex polygons within the pluralit

Assignees

• Applied Materials Inc

Inventors

• Laidig Thomas L

Classifications

• G06T11/23

  using straight lines or curves · CPC title

• G06T1/20 Primary

  Processor architectures; Processor configuration, e.g. pipelining · CPC title

• G03F7/70

  Microphotolithographic exposure; Apparatus therefor (photo-masks G03F1/00) · CPC title

• G03F7/70008

  Production of exposure light, i.e. light sources · CPC title

• G03F7/70091

  Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA] · CPC title