Magnetoresistive angle sensor with linear sensor elements

Patent metadata

Field	Value
Publication number	US-9816838-B2
Application number	US-201514833707-A
Country	US
Kind code	B2
Filing date	Aug 24, 2015
Priority date	Aug 24, 2015
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

A magnetic sensor may comprise a first linear output sensing element configured to sense a first component of an external magnetic field associated with a first axis. The first linear output sensing element may provide a first output voltage corresponding to the first component of the external magnetic field. The magnetic sensor may also comprise a second linear output sending component configured to sense a second component of the external magnetic field associated with a second axis. The second axis may be substantially orthogonal to the first axis. The second linear output sensing element may provide a second output voltage corresponding to the second component of the external magnetic field. The first output voltage and the second output voltage may be provided to determine an angle, associated with the external magnetic field, corresponding to a plane including the first axis and the second axis.

First claim

What is claimed is:

1. A magnetic sensor, comprising:
a first linear output sensing element configured to:
sense a first component of an external magnetic field,
the first component of the external magnetic field being associated with a first axis, and

provide a first output voltage corresponding to the first component of the external magnetic field; and

a second linear output sensing element configured to:
sense a second component of the external magnetic field,
the second component of the external magnetic field being associated with a second axis,
the second axis being substantially orthogonal to the first axis,

the first output voltage being used as a supply voltage of the second linear output sensing element, and

provide a second output voltage corresponding to the second component of the external magnetic field,
the first output voltage and the second output voltage being provided to determine an angle associated with the external magnetic field,
the angle corresponding to a plane including the first axis and the second axis.

2. The magnetic sensor of claim 1 , further comprising:
a third linear output sensing element configured to:
sense a third component of the external magnetic field,
the third component of the external magnetic field being associated with a third axis,
the third axis being substantially orthogonal to the first axis and substantially orthogonal the second axis; and

provide a third output voltage corresponding to the third component of the external magnetic field,
the third output voltage being provided to determine another angle associated with the external magnetic field,
the other angle corresponding to a plane including the first axis and the third axis, or
the other angle corresponding to a plane including the second axis and the third axis.

3. The magnetic sensor of claim 2 , where the first output voltage, the second output voltage, and the third output voltage are provided to determine a position associated with the external magnetic field.

4. The magnetic sensor of claim 2 , where the first linear output sensing element, the second linear output sensing element, and the third linear output sensing element are located on a single integrated circuit.

5. The magnetic sensor of claim 4 , where the single integrated circuit has a length of approximately ten micrometers per side of the single integrated circuit.

6. The magnetic sensor of claim 2 , where the first linear output sensing element, the second linear output sensing element, and the third linear output sensing element sense the respective first, second, and third components of the external magnetic field based on a tunnel magnetoresistance (TMR) effect, a giant magnetoresistance (GMR) effect, or an anisotropic magnetoresistance (AMR) effect.

7. The magnetic sensor of claim 1 , where the angle is determined by dividing the second output voltage by the first output voltage to determine a value, and computing an inverse tangent of the value to determine the angle.

8. A method, comprising:
sensing, by a first linear output element, a first component of a magnetic field,
the first component of the magnetic field being associated with a first direction;

outputting, by the first linear output element, a first voltage corresponding to the first component of the magnetic field;
sensing, by a second linear output element, a second component of the magnetic field,
the second component of the magnetic field being associated with a second direction,
the second direction being approximately ninety degrees with respect to the first direction;
the first voltage being used as a supply voltage of the second linear output element; and

outputting, by the second linear output element, a second voltage corresponding to the second component of the magnetic field,
the first voltage and the second voltage being provided to calculate a first angle associated with the magnetic field,
the first angle being associated with a plane associated with the first direction and the second direction.

9. The method of claim 8 , further comprising:
sensing, by a third linear output element, a third component of the magnetic field,
the third component of the magnetic field being associated with a third direction,
the third direction being approximately ninety degrees with respect to the

first direction and approximately ninety degrees with respect to the second direction, and

outputting, by the third linear output element, a third voltage corresponding to the third component of the magnetic field,
the third voltage being provided to calculate a second angle associated with the magnetic field,
the second angle being associated with a plane associated with the first direction and the third direction, and

the third voltage being provided to calculate a third angle associated with the magnetic field,
the third angle being associated with a plane associated with the second direction and the third direction.

10. The method of claim 9 , where the first angle is determined by dividing the second voltage by the first voltage to determine a first value, and computing an inverse tangent of the first value to determine the first angle,
where the second angle is determined by dividing the third voltage by the first voltage to determine a second value, and computing an inverse tangent of the second value to determine the second angle, and
where the third angle is determined by dividing the third voltage by the second voltage to determine a third value, and computing an inverse tangent of the third value to determine the third angle.

11. The method of claim 9 , where the first voltage, the second voltage, and the third voltage are provided to determine a position associated with a magnet that produces the magnetic field.

12. The method of claim 8 , where the first angle is greater than or equal to zero degrees and less than or equal to three hundred and sixty degrees.

13. The method of claim 9 , where the first linear output element, the second linear output element, and the third linear output element sense the respective first, second, and third components of the magnetic field based on a tunnel magnetoresistance (TMR) effect, a giant magnetoresistance (GMR) effect, or an anisotropic magnetoresistance (AMR) effect.

14. The method of claim 8 , where the first angle is used to measure an angular speed associated with the magnetic field.

15. An apparatus, comprising:
a first linear sensing element configured to:
sense a first component of an external magnetic field,
the first component of the external magnetic field corresponding to a first axis,

provide a first voltage corresponding to the first component of the external magnetic field;

a second linear sensing element configured to:
sense a second component of the external magnetic field,
the second component of the external magnetic field corresponding to a second axis,
the second axis being approximately orthogonal to the first axis,
the first voltage being used as a supply voltage of the second linear sensing element, and

provide a second voltage corresponding to the second component of the external magnetic field; and

a third linear sensing element configured to:
sense a third component of the external magnetic field,
the third component of the external magnetic field corresponding to a third axis,
the third axis being approximately orthogonal to both the first axis and the second axis, and

provide a third voltage corresponding to the third component of the external magnetic field,
the first voltage, the second voltage,

Assignees

• Infineon Technologies Ag

Inventors

• Jost Franz

Classifications

• G01D5/20 Primary

  by varying inductance, e.g. by a movable armature · CPC title

• G01R33/098

  comprising tunnel junctions, e.g. tunnel magnetoresistance sensors · CPC title

• G01R33/09

  Magnetoresistive devices · CPC title

• G01R33/093 Primary

  using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00) · CPC title