Vacuum powered deposition apparatus

Patent metadata

Field	Value
Publication number	US-9816172-B2
Application number	US-201314010407-A
Country	US
Kind code	B2
Filing date	Aug 26, 2013
Priority date	Mar 14, 2013
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

A vacuum powered deposition apparatus including a driving unit, a linear motion unit coupled to the driving unit and configured to move linearly according to operation of the driving unit, and an angle restriction unit coupled to the linear motion unit and configured to move in a direction perpendicular to that of the linear motion unit according to movement of the linear motion unit.

First claim

What is claimed is:

1. An apparatus for restricting a deposition angle of deposition materials, the apparatus comprising:
a driving unit;
a linear motion unit coupled to the driving unit, the linear motion unit configured to move linearly in a first direction according to operation of the driving unit, and comprising a plurality of projection units projecting from the linear motion unit;
an angle restriction unit coupled to the linear motion unit and configured to adjust the deposition angle of deposition materials sprayed from a deposition source unit by moving in a vertical direction, which comprises a component of direction that is perpendicular to the first direction of the linear motion unit, according to movement of the linear motion unit;
an auxiliary guide unit comprising a guide at least partially surrounding the projection units, and configured to guide movement of the linear motion unit in the first direction;
a fixing unit configured to enable the angle restriction unit to slide; and
a side shield configured to be disposed inside the fixing unit,
wherein the linear motion unit comprises a guide unit configured to guide a part of the angle restriction unit when the angle restriction unit moves, the guide unit comprising:
a first guide;
a second guide comprising a first end coupled to the first guide and extending diagonally from the first guide; and
a third guide coupled to a second end of the second guide and vertically offset from the first guide.

2. The apparatus of claim 1 , wherein the driving unit comprises:
a driving force generation unit configured to generate a driving force; and
a rotation unit coupled to the driving force generation unit and configured to rotate.

3. The apparatus of claim 2 , wherein the rotation unit comprises a spur gear.

4. The apparatus of claim 2 , wherein the linear motion unit comprises a motion block coupled to the rotation unit and configured to move linearly when the rotation unit rotates.

5. The apparatus of claim 1 , wherein the guide unit defines holes having an oval shape.

6. The apparatus of claim 1 , wherein the angle restriction unit of claim 1 comprises:
an angle restriction plate configured to move linearly upward and downward; and
a sliding unit coupled to the angle restriction plate and to the linear motion unit, and configured to slide to thereby move in the vertical direction that comprises the component of direction that is perpendicular to the first direction of the linear motion unit when the linear motion unit moves.

7. The apparatus of claim 6 , wherein the angle restriction unit further comprises a blocking unit between the angle restriction plate and the sliding unit.

8. The apparatus of claim 6 , further comprising a linear guide unit between the fixing unit and the sliding unit, and configured to guide the sliding unit.

9. The apparatus of claim 1 , wherein the auxiliary guide unit faces the linear motion unit.

10. The apparatus of claim 9 , wherein the auxiliary guide unit comprises:
a fixing bracket; and
the guide at an external surface of the fixing bracket.

11. The apparatus of claim 10 , further comprising a reinforcement rib at the external surface of the fixing bracket.

12. The apparatus of claim 1 , further comprising an indication unit configured to indicate a location of the angle restriction unit.

13. The apparatus of claim 12 , wherein the indication unit comprises:
a motion unit at the angle restriction unit and configured to move with the angle restriction unit; and
a location display unit fixed at an external side and configured to indicate a location of the motion unit.

14. The apparatus of claim 1 , further comprising a cover unit for covering the driving unit and a part of the linear motion unit.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Young-Uk
• Han Jeong-Won

Classifications

• Y10T74/18056

  Rotary to or from reciprocating or oscillating · CPC title

• C23C14/00 Primary

  Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material · CPC title

• Y10T74/18096

  Shifting rack · CPC title

• C23C14/24 Primary

  Vacuum evaporation · CPC title

• H01L51/001

  Electricity · mapped topic