Self-limiting silicide in highly scaled fin technology

Patent metadata

Field	Value
Publication number	US-9812357-B2
Application number	US-201615077037-A
Country	US
Kind code	B2
Filing date	Mar 22, 2016
Priority date	May 19, 2014
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

A method of forming a metal semiconductor alloy on a fin structure that includes forming a semiconductor material layer of a polycrystalline crystal structure material or amorphous crystal structure material on a fin structure of a single crystal semiconductor material, and forming a metal including layer on the semiconductor material layer. Metal elements from the metal including layer may then b intermixed metal elements with the semiconductor material layer to provide a metal semiconductor alloy contact on the fin structure. A core of the fin structure of the single crystal semiconductor material is substantially free of the metal elements from the metal including layer.

First claim

What is claimed is:

1. A method of forming a metal semiconductor alloy on a fin structure comprising:
forming a semiconductor material layer of a polycrystalline crystal structure material or amorphous crystal structure material on a fin structure of a single crystal semiconductor material;
forming a metal including layer on the semiconductor material layer of the polycrystalline crystal structure material or the amorphous crystal structure material; and
intermixing metal elements from the metal including layer with the semiconductor material layer to provide a metal semiconductor alloy contact on the fin structure, wherein a core of the fin structure of the single crystal semiconductor material is substantially free of the metal elements from the metal including layer.

2. The method of claim 1 , wherien the fin structure has a width of 10 nm or less.

3. The method of claim 1 , wherein the semiconductor material layer of the polycrystalline crystal structure material or the amorphous crystal structure material obstructs diffusion of the metal element from the metal including layer into the fin structure.

4. The method of claim 1 , wherein forming the semiconductor material of the polycrystalline crystal structure material or the amorphous crystal structure material on the fin structure comprises growing the semiconductor material using an in-situ doping deposition method, wherein the in-situ doping method introduces a p-type or n-type dopant to the semiconductor material being grown to promote the formation of the polycrystalline crystal structure material or the amorphous crystal structure material.

5. The method of claim 4 , wherien the semiconductor material has a silicon or silicon germanium material composition.

6. The method of claim 5 , wherein the dopant gas for introducing the n-type or p-type dopant to the semiconductor material in the in-situ doping deposition method is selected from the group consisting of diborane (B 2 H 6 ), phosphine (PH 3 ), arsine (AsH 3 ) and a combination thereof.

7. The method of claim 1 , wherein a composition of the metal layer is selected from the group consisting of Ni, Ti, Co, Pt, Ta, W, Pt, Pd and other like materials.

8. The method of claim 1 , wherien the metal layer is deposited using a physical vapor deposition method.

9. The method of claim 1 , wherein the metal semiconductor alloy is selected from the group consisting of nickel silicide (NiSix), erbium silicide, nickel platinum silicide(NiPtySix), platinum silicide (PtSi), cobalt silicide (CoSix),tantalum silicide (TaSix), titanium silicide (TiSix) and combinations thereof.

10. The method of claim 1 , wherein said intermixing of the metal elements from the metal including layer with the semiconductor material layer to provide the metal semiconductor alloy contact comprises an annealing temperature ranging from 350° C. to 800° C.

11. The method of claim 1 , wherein the intermixing of the metal element from the metal including layer with the semiconductor material layer to provide the metal semiconductor alloy contact provides a remaining portion of the metal including layer that has not reacted with the semiconductor material layer, the method further comprising removing the remaining portion of the metal including layer using an etch that is selective to the metal semiconductor alloy contact.

12. The method of claim 1 , wherein the core of the fin structure of the single crystal semiconductor material that is substantially free of the metal elements from the metal including layer is not alloyed with the metal elements from the metal including layer.

13. A semiconductor device comprising:
a fin structure comprising a source region, a drain region and a channel region, the channel region is between the source region, wherein at least the drain region and the source region of the fin structure have a width of 10 nm or less and are comprised of a single crystalline silicon including material;
a gate structure present on the channel region of the fin structure; and
metal semiconductor alloy contacts on the source region and the drain region of the fin structure, wherein a semiconductor element of the metal semiconductor alloy comprises amorphous silicon or polycrystalline silicon, and wherein metal elements from the metal semiconductor alloy contacts are not present in the source region and the drain region of the fin structure.

14. The semiconductor device of claim 13 , wherein the metal semiconductor alloy contact has a composition that is selected from the group consisting of nickel silicide (NiSix), erbium silicide, nickel platinum silicide(NiPtySix), platinum silicide (PtSi), cobalt silicide (CoSix),tantalum silicide (TaSix), titanium silicide (TiSix) and combinations thereof.

15. The semiconductor device of claim 14 , wherein the metal semiconductor alloy contact has a thickness ranging from 5 nm to 35 nm.

16. The semiconductor device of claim 14 , wherein the fin structure including the source region and the drain region is monocrystalline silicon.

Assignees

• IBM

Inventors

• Cheng Kangguo
• Doris Bruce B
• Hashemi Pouya
• Khakifirooz Ali
• Reznicek Alexander

Classifications

• H10P14/3456

  Polycrystalline · CPC title

• H10P14/3454

  Amorphous · CPC title

• H10P14/3438

  Doping during depositing · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/418

  the conductive layers comprising transition metals · CPC title