Zero- and low-field transport detection system

Patent metadata

Field	Value
Publication number	US-9810756-B2
Application number	US-201314050615-A
Country	US
Kind code	B2
Filing date	Oct 10, 2013
Priority date	Oct 11, 2012
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

A sensing apparatus for detecting and determining the magnitude of a static magnetic field has a first set of coils capable of producing a sweeping, quasi static, magnetic field when driven by a direct current and a second set of coils, for magnetic field modulation, positioned between the first set of coils capable of producing a low-frequency (audio), oscillating magnetic field when driven by an oscillating current. The magnetic fields induce a current through the semiconductor device which sampled to identify changes as a function of sweeping, quasi static magnetic field. To create an apparatus for detecting and identifying atomic scale defects in fully processed devices, a radio frequency circuit with a resonant component is added which provides an oscillating electromagnetic field in a direction perpendicular to that of the static magnetic field produced by the first set of coils.

First claim

We claim:

1. A sensing apparatus for detecting and determining the magnitude of a static magnetic field, the apparatus comprising;
a first set of coils capable of producing a sweeping, quasi static, magnetic field when driven by a direct current;
a second set of coils, for magnetic field modulation, positioned between the first set of coils capable of producing an oscillating magnetic field when driven by an oscillating current;
a precision, bipolar current controller which drives current through the first set of coils to create a linearly sweeping magnetic field;
a signal generator which drives an oscillating current through the second set of coils to create an oscillating magnetic field to modulate the field produced by the first set of coils;
a voltage biased, semiconducting device with a known, low magnetic field magnetoresistance properties positioned in between both sets of coils and having a semiconducting device current;
an analog front end which conditions the semiconducting device current before being sampled;
an analog-to-digital converter which samples the conditioned semiconducting device current; and
a signal processing unit capable of demodulating the conditioned sampled semiconducting device current and recording changes in this signal as a function of sweeping, quasi static magnetic field.

2. The sensing apparatus of claim 1 wherein the first set of coils are Helmholtz coils.

3. The sensing apparatus of claim 1 , wherein the second set of coils are Helmholtz coils.

4. The sensing apparatus of claim 1 , wherein the semiconducting device contains many defects to increase the magnetoresistance response at low magnetic fields.

5. The sensing apparatus of claim 1 , wherein the analog front end biases the semiconducting device with a DC voltage and conditions the device current using current-to-voltage conversion, amplification, high pass and low pass/antialiasing filtering.

6. The sensing apparatus of claim 1 , wherein the signal processing unit is a personal computer, microprocessor, or microcontroller.

7. The sensing apparatus of claim 1 , wherein the signal processing unit self-calibrates itself with the already known parameters of the measured magnetoresistance response.

8. The sensing apparatus of claim 1 , wherein the signal processing unit calculates the static magnetic field by measuring the shift in the measured magnetoresistance response of the semiconducting device away from zero magnetic field.

9. An apparatus for detecting and identifying atomic scale defects in fully processed devices, the apparatus comprising;
a first set of coils capable of producing a sweeping, quasi static, magnetic field when driven by a direct current;
a second set of coils, for magnetic field modulation, positioned between the first set of coils capable of producing an oscillating magnetic field when driven by an oscillating current, the second set of coils spaced far enough apart to enclose a voltage biased, semiconducting device with an unknown resonant and zero-field magnetoresistance response and through which a semiconducting device current passes;
a precision, bipolar current controller which drives current through the first set of coils to create a linearly sweeping magnetic field;
a signal generator which drives an oscillating current through the second set of coils to create an oscillating magnetic field to modulate the field produced by the first set of coils;
a radio frequency circuit with a resonant component which provides an oscillating electromagnetic field in a direction perpendicular to that of the static magnetic field produced by the first set of coils;
an analog front end which conditions the semiconducting device current before being sampled;
an analog-to-digital converter which samples the conditioned semiconducting device current; and
a signal processing unit capable of demodulating the conditioned sampled semiconducting device current and recording changes in this signal as a function of sweeping, quasi static magnetic field.

10. The defect detection apparatus of claim 9 , wherein the first set of coils are Helmholtz coils.

11. The defect detection apparatus of claim 9 , wherein the second set of coils are Helmholtz coils.

12. The defect detection apparatus of claim 9 , wherein the resonant component is a surface coil, a solenoid, or a micro strip resonator.

13. The defect detection apparatus of claim 9 , wherein the device under observation exhibits spin dependent transport phenomenon such as recombination, tunneling, scattering, and or hopping.

14. The defect detection apparatus of claim 9 , wherein the device under observation is a diode, capacitor, bipolar junction transistor, metal oxide semiconducting field effect transistor, solar cell, or a memresistor.

15. The defect detection apparatus of claim 9 , wherein the analog front end biases the device with a DC or AC voltage and conditions the device current using current-to-voltage conversion, amplification, high pass and low pass/antialiasing filtering.

16. The defect detection apparatus of claim 9 , wherein the signal processing device is a personal computer, microprocessor, or microcontroller.

17. The defect detection apparatus of claim 9 , wherein the resonant and magnetoresistance spectrum provide information about the defect under observation.

18. The defect detection apparatus of claim 9 , wherein the ratio of the integrated intensities of the half-field to full-field signals provide information about the defect density of the device under study.

Assignees

• Cochrane Corey
• Lenahan Patrick M
• Penn State Res Found

Inventors

• Cochrane Corey
• Lenahan Patrick M

Classifications

• G01N24/10 Primary

  by using electron paramagnetic resonance (G01N24/12 takes precedence) · CPC title

• G01R33/323

  Detection of MR without the use of RF or microwaves, e.g. force-detected MR, thermally detected MR, MR detection via electrical conductivity, optically detected MR · CPC title

• G01R33/24

  for measuring direction or magnitude of magnetic fields or magnetic flux · CPC title

• G01R33/385 Primary

  using gradient magnetic field coils · CPC title