Systems and methods for measuring physical characteristics of semiconductor device elements using structured light

Patent metadata

Field	Value
Publication number	US-9810641-B2
Application number	US-201414469830-A
Country	US
Kind code	B2
Filing date	Aug 27, 2014
Priority date	Sep 3, 2013
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

A method of determining a physical characteristic of an adhesive material on a semiconductor device element using structured light is provided. The method includes the steps of: (1) applying a structured light pattern to an adhesive material on a semiconductor device element; (2) creating an image of the structured light pattern using a camera; and (3) analyzing the image of the structured light pattern to determine a physical characteristic of the adhesive material. Additional methods and systems for determining physical characteristics of semiconductor devices and elements using structured light are also provided.

First claim

What is claimed:

1. A thermo-compression bonding machine comprising:
a bond head assembly for performing a thermo-compression bonding process;
a dispenser for dispensing an adhesive material onto a first semiconductor device element;
a support structure for supporting the first semiconductor device element including the adhesive material, the thermocompression bonding machine being adapted to bond a second semiconductor device element to the first semiconductor device element, the second semiconductor device element including conductive pillars configured to be thermo-compressively bonded to conductive structures of the first semiconductor device element, the adhesive material being configured to be provided between the first semiconductor device element and the second semiconductor device element;
a structured light source for providing a structured light pattern on the adhesive material;
a camera for creating an image of the structured light pattern on the adhesive material; and
image processing hardware and software for analyzing the image to determine a physical characteristic of the adhesive material, and to determine if the physical characteristic is within a predetermined specification.

2. The thermo-compression bonding machine of claim 1 wherein the adhesive material is selected from the group consisting of an epoxy material, a non-conductive paste material, and a curable liquid material.

3. The thermo-compression bonding machine of claim 1 wherein the structured light pattern includes at least one of a parallel bar pattern and a grid pattern.

4. The thermo-compression bonding machine of claim 1 wherein the thermo-compression bonding machine is configured to adjust an aspect of dispensing of the adhesive material by the dispenser for a subsequent semiconductor device element if it is determined that the physical characteristic is not within the predetermined specification, and wherein the aspect is adjusted using a closed loop process whereby the adjusted aspect is determined automatically at least partially based on the determined physical characteristic.

5. The thermo-compression bonding machine of claim 1 wherein the physical characteristic includes at least one of a volume of the adhesive material, and a distribution of a volume of the adhesive material.

6. The thermo-compression bonding machine of claim 1 wherein the thermo-compression bonding machine is configured to adjust an aspect of dispensing of the adhesive material by the dispenser for a subsequent semiconductor device element if it is determined that the physical characteristic is not within the predetermined specification.

7. The thermo-compression bonding machine of claim 1 wherein the adhesive material is a fillet portion of an adhesive provided between the first semiconductor device element and the second semiconductor device element.

8. A thermo-compression bonding machine comprising:
a bond head assembly for performing a thermo-compression bonding process;
a support structure for supporting a first semiconductor device, the thermocompression bonding machine adapted to bond a second semiconductor device element to the first semiconductor device element, the second semiconductor device element including conductive pillars configured to be thermo-compressively bonded to conductive structures of the first semiconductor device element, the adhesive material being configured to be provided between the first semiconductor device element and the second semiconductor device element;
a structured light source for providing a structured light pattern;
a camera for indirectly viewing the structured light pattern using a reflective surface of the first semiconductor device element, the camera generating an image of the structured light pattern; and
image processing hardware and software for analyzing the image to determine a flatness characteristic of the first semiconductor device element.

9. The thermo-compression bonding machine of claim 8 wherein the structured light pattern includes at least one of a parallel bar pattern and a grid pattern.

10. The thermo-compression bonding machine of claim 8 wherein the structured light source includes a digital fringe projector.

11. The thermo-compression bonding machine of claim 8 wherein the image processing hardware and software is configured to determine if the flatness characteristic is within a predetermined specification.

12. The thermo-compression bonding machine of claim 8 further comprising a diffuser screen for receiving the structured light pattern from the structured light source.

13. The thermo-compression bonding machine of claim 8 further comprising at least one of a pick tool and a place tool for securing the first semiconductor device element while the camera indirectly views the structured light pattern.

Assignees

• Kulicke & Soffa Ind Inc

Inventors

• Sood Deepak
• Wang Zhijie
• Colosimo Jr Thomas J
• Rauth David A
• Tang Shu-Guo

Classifications

• G06T2207/10152

  Varying illumination · CPC title

• G01N21/8422

  Investigating thin films, e.g. matrix isolation method · CPC title

• G06T7/0006

  using a design-rule based approach · CPC title

• G01N21/8806

  Specially adapted optical and illumination features · CPC title

• G01N2021/8829

  Shadow projection or structured background, e.g. for deflectometry · CPC title