Method for evaluating silica glass crucible, method for producing silicon single crystals

Patent metadata

Field	Value
Publication number	US-9809902-B2
Application number	US-201214365523-A
Country	US
Kind code	B2
Filing date	Oct 31, 2012
Priority date	Dec 22, 2011
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

The present invention provides a method for evaluating a vitreous silica crucible which can measure a three-dimensional shape of the inner surface of the crucible in a non-destructive manner. According to the present invention, A method for evaluating a vitreous silica crucible, including the steps of: moving an internal ranging section along an inner surface of the vitreous silica crucible in a contactless manner; measuring a distance between the internal ranging section and the inner surface as a distance from the inner surface, by subjecting the inner surface of the crucible to irradiation with laser light and then detecting a reflected light from the inner surface, the laser light being emitted from the internal ranging section in an oblique direction with respect to the inner surface, and the measurement being conducted at a plurality of measuring points along a course of a movement of the internal ranging section; and obtaining a three-dimensional shape of the inner surface of the crucible, by associating three-dimensional coordinates of each of the measuring points with the distance from the inner surface, is provided.

First claim

The invention claimed is:

1. A method for evaluating a vitreous silica crucible having a cylindrical sidewall portion having an opening with a rim portion, a mortar-shaped bottom portion, and a corner portion connecting the sidewall portion and the bottom portion, said corner portion having a curvature larger than a curvature of the bottom portion, wherein the crucible comprises a transparent vitreous silica layer at an inner surface side, and a bubble containing layer at an outer surface side, said method comprising the steps of:
moving an internal ranging section along an inner surface of all portions of the vitreous silica crucible constituted by the sidewall portion, the corner portion, and the mortar-shaped bottom portion, in a contactless manner;
measuring a distance between the internal ranging section and the inner surface of the transparent vitreous silica layer as a distance from the inner surface, by subjecting the inner surface of the crucible to irradiation with single laser light and then detecting a reflected light from the inner surface, the laser light being emitted from the internal ranging section in an oblique direction with respect to the inner surface, and the measurement being conducted at a plurality of measuring points along a course of a movement of the internal ranging section, wherein the plurality of measuring points include points at the sidewall portion, the corner portion, and the bottom portion;
obtaining a three-dimensional shape of the inner surface of the crucible, by associating three-dimensional coordinates of each of the measuring points with the distance from the inner surface;
measuring a distance between the internal ranging section and an interface between the transparent vitreous silica layer and the bubble containing layer, as a distance from the interface by using the single laser light and detecting light reflected by the interface with the internal ranging section;
obtaining a three-dimensional shape of the interface by associating three-dimensional coordinates of each of the measuring points with the distance from the interface;
wherein the single laser light emitted from the internal ranging section is partially reflected at the inner surface of the transparent vitreous silica layer and partially reflected at the interface so that two peaks corresponding to the reflected lights from the inner surface and the interface are observed when the reflected lights are measured by a laser displacement gauge provided in the internal ranging section, wherein the internal ranging section is moved closer to or away from the inner surface and/or the internal ranging section is tilted to alter the outgoing direction of the laser light so as to search a position and an angle which allows the observation of the two peaks;

moving an external ranging section along an outer surface of all portions of the vitreous silica crucible constituted by the sidewall portion, the corner portion, and the mortar-shaped bottom portion, in a contactless manner;
measuring a distance between the external ranging section and the outer surface as a distance from the outer surface, by subjecting the outer surface of the crucible to irradiation with laser light and then detecting a reflected light from the outer surface, the laser light being emitted from the external ranging section in an oblique direction with respect to the outer surface, and the measurement being conducted at a plurality of measuring points along a course of a movement of the external ranging section, wherein the plurality of measuring points include points at the sidewall portion, the corner portion, and the bottom portion;
obtaining a three-dimensional shape of the outer surface of the crucible, by associating three-dimensional coordinates of each of the measuring points with the distance from the outer surface;
determining a shape of the crucible based on the three-dimensional shape of the inner surface and the three-dimensional shape of the outer surface of the crucible; and
evaluating the crucible based on whether the shape of the crucible determined from the three-dimensional shape of the inner surface and the three-dimensional shape of the outer surface is a shape within a range defined as being between a shape of a crucible having minimum thickness satisfying a predetermined dimension tolerance and a shape of a crucible having maximum thickness satisfying the predetermined dimension tolerance.

2. The method of claim 1 , wherein an angle of incidence of the laser light emitted from the internal ranging section is 30 to 60 degrees with respect to the inner surface.

3. The method of claim 1 , wherein the internal ranging section is fixed to an internal robot arm configured to move the internal ranging section in a three-dimensional manner.

4. The method of claim 3 , wherein the crucible is placed so as to cover the internal robot arm.

5. The method of claim 1 , wherein the external ranging section is fixed to an external robot arm configured to move the external ranging section in a three-dimensional manner.

6. The method of claim 1 , further comprising the step of:
determining a three-dimensional distribution of an infrared absorption spectrum by measuring the infrared absorption spectrum at a plurality of measuring points on the three-dimensional shape of the inner surface.

7. The method of claim 1 , further comprising the step of:
determining a three-dimensional distribution of a Raman spectrum by measuring the Raman spectrum at a plurality of measuring points on the three-dimensional shape of the inner surface.

8. The method of claim 1 , further comprising the step of:
determining a three-dimensional distribution of a bubble distribution by measuring the bubble distribution at a sidewall of the crucible corresponding to each of a plurality of measuring points, the plurality of measuring points being arranged on the three-dimensional shape of the inner surface of the crucible.

9. The method of claim 8 , wherein a bubble content rate is measured by using a confocal microscope.

10. The method of claim 1 , further comprising the step of:
determining a three-dimensional distribution of a surface roughness of the inner surface by measuring the surface roughness at a plurality of measuring points on the three-dimensional shape of the inner surface.

11. A method of claim 1 , further comprising the steps of:
moving an external ranging section along an outer surface of the vitreous silica crucible;
measuring a distance between the external ranging section and the outer surface as a distance from the outer surface, by subjecting the outer surface of the crucible to irradiation with laser light and then detecting a reflected light from the outer surface, the laser light being emitted from the external ranging section in an oblique direction with respect to the outer surface, and the measurement being conducted at a plurality of measuring points along a course of a movement of the external ranging section;
obtaining a three-dimensional shape of the outer surface of the crucible, by associating three-dimensional coordinates of each of the measuring points with the distance from the outer surface; and
determining a three-dimensional distribution of a surface roughness of the outer surface by measurement conducted at a plurality of measuring points on the three-dimensional shape of the outer surface.

12. The method of claim 10 , wherein the surface roughness is measured by using a confocal microscope.

13. The method of claim 1 , further comprising the step of:
determining a three-dimensional position of a foreign substance, by:
obtaining an image at each of a pluralit

Assignees

• Sumco Corp

Inventors

• Sudo Toshiaki
• Sato Tadahiro
• Kitahara Ken
• Kitahara Eriko
• Kodama Makiko

Classifications

• G01B11/005

  coordinate measuring machines · CPC title

• G01J5/58

  using absorption; using extinction effect · CPC title

• G01B11/06

  for measuring thickness {; e.g. of sheet material (thickness measurement by thermal means G01B21/085)} · CPC title

• C30B15/26 Primary

  using television detectors; using photo or X-ray detectors · CPC title

• G01B11/24

  for measuring contours or curvatures · CPC title