Method of patterning a stack

Patent metadata

Field	Value
Publication number	US-9809887-B2
Application number	US-201615052701-A
Country	US
Kind code	B2
Filing date	Feb 24, 2016
Priority date	Jun 30, 2011
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

The embodiments disclose a method of fabricating a stack, including replacing a metal layer of a stack imprint structure with an oxide layer, patterning the oxide layer stack using chemical etch processes to transfer the pattern image and cleaning etch residue from the stack imprint structure to substantially prevent contamination of the metal layers.

First claim

What is claimed is:

1. A method comprising:
patterning a resist layer disposed over an oxide layer to form a plurality features associated with a bit-patterned medium;
etching a portion of the oxide layer that is not a layer within the formed plurality of features to expose an amorphous carbon layer disposed underneath the oxide layer;
etching the resist layer of the formed plurality of features and the exposed amorphous carbon layer, wherein the etching the resist layer of the formed plurality of features exposes the oxide layer disposed underneath the resist layer of the formed plurality of features, and wherein the etching the exposed amorphous carbon layer exposes a magnetic layer disposed underneath the amorphous carbon layer; and
etching the exposed magnetic layer to form a patterned magnetic layer.

2. The method of claim 1 further comprising:
cleaning the exposed oxide layer to expose the amorphous carbon layer disposed underneath the exposed oxide layer.

3. The method of claim 2 further comprising:
subsequent to cleaning the exposed oxide layer, cleaning the exposed amorphous carbon layer disposed underneath the exposed oxide layer.

4. The method of claim 1 further comprising:
subsequent to the patterning the resist layer, removing resist scum using O2 reactive ion beam etching.

5. The method of claim 1 , wherein the patterned resist layer masks a portion of the oxide layer during the etching of the portion of the oxide layer.

6. The method of claim 1 , wherein the oxide layer prevents metallic-residue contamination of the amorphous carbon layer during patterning.

7. The method of claim 1 , wherein the oxide layer is susceptible to fluorine-bearing gas etching conditions, wherein the fluorine-bearing gas is selected from CHF3, CF4, and C4F8.

8. The method of claim 1 , wherein the oxide layer comprises an oxide selected from Ta2O5 and SiO2.

9. A method comprising:
patterning a resist layer disposed over an oxide layer, wherein the oxide layer is disposed over an amorphous carbon layer, and wherein the amorphous carbon layer is disposed over a magnetic layer, wherein the patterning forms a plurality features associated with a bit-patterned medium;
etching a portion of the resist layer;
subsequent to the etching the portion of the resist layer, etching a remainder of the resist and a portion of the oxide layer; and
subsequent to etching the remainder of the resist and the portion of the oxide layer, etching a portion of the amorphous carbon layer and the magnetic layer to form the plurality of features associated with the bit-patterned medium on the magnetic layer.

10. The method of claim 9 , wherein the iteratively etching comprises:
etching a portion of the oxide layer that is not a layer within the formed plurality of features to expose an amorphous carbon layer disposed underneath the oxide layer.

11. The method of claim 9 , wherein the iteratively etching comprises:
etching the resist layer of the formed plurality of features and the exposed amorphous carbon layer, wherein the etching the resist layer of the formed plurality of features exposes the oxide layer disposed underneath the resist layer of the formed plurality of features, and wherein the etching the exposed amorphous carbon layer exposes a magnetic layer disposed underneath the amorphous carbon layer.

12. The method of claim 11 further comprising:
cleaning the exposed oxide layer to expose the amorphous carbon layer disposed underneath the exposed oxide layer.

13. The method of claim 10 further comprising:
cleaning the exposed amorphous carbon layer disposed underneath an exposed oxide layer.

14. The method of claim 9 further comprising:
subsequent to the patterning the resist layer, removing resist scum using 02 reactive ion beam etching.

15. The method of claim 9 , wherein the resist layer, the oxide layer, the amorphous carbon layer, each forms a mask for a layer directly disposed underneath during the iterative etching process.

16. The method of claim 9 , wherein the oxide layer prevents metallic-residue contamination of the amorphous carbon layer during patterning.

17. A method comprising:
forming an amorphous carbon layer over a magnetic layer;
forming an oxide layer over the amorphous carbon layer;
forming a resist layer over the oxide layer;
patterning the resist layer to form a plurality features associated with a bit-patterned medium;
etching a portion of the oxide layer that is not a layer within the formed plurality of features to expose the amorphous carbon layer disposed underneath the oxide layer;
etching the resist layer of the formed plurality of features and the exposed amorphous carbon layer, wherein the etching the resist layer of the formed plurality of features exposes the oxide layer disposed underneath the resist layer of the formed plurality of features, and wherein the etching the exposed amorphous carbon layer exposes a magnetic layer disposed underneath the amorphous carbon layer; and
etching the exposed magnetic layer to form a patterned magnetic layer.

18. The method of claim 17 further comprising:
cleaning the exposed oxide layer to expose the amorphous carbon layer disposed underneath the exposed oxide layer.

19. The method of claim 18 further comprising:
subsequent to cleaning the exposed oxide layer, cleaning the exposed amorphous carbon layer disposed underneath the exposed oxide layer.

20. The method of claim 17 , wherein the oxide layer prevents metallic-residue contamination of the amorphous carbon layer during patterning.

Assignees

• Seagate Technology Llc

Inventors

• Feldbaum Michael R
• Hwu Justin Jia-Jen
• Kuo David S
• Gauzner Gennady
• Lee Kim Yang
• Wang Li-Ping

Classifications

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• Y10T428/265

  1 mil or less · CPC title

• G11B5/855

  Coating only part of a support with a magnetic layer · CPC title

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title