Method for calibrating a micromechanical sensor element and a system for calibrating a micromechanical sensor element

Patent metadata

Field	Value
Publication number	US-9804192-B2
Application number	US-201514968335-A
Country	US
Kind code	B2
Filing date	Dec 14, 2015
Priority date	Dec 15, 2014
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

A method for calibrating a micromechanical sensor element, a piece of primary information describing a motion-state of the micromechanical sensor element being ascertained by the micromechanical sensor element during a first time interval, a piece of reference information describing the motion-state of the micromechanical sensor element being ascertained during a second time interval on the basis of an acoustic signal emitted by a sound source, the first time interval and the second time interval overlapping at least partially with respect to time, and the reference information being compared with the primary information in order to calibrate the micromechanical sensor element.

First claim

What is claimed is:

1. A method for calibrating a micromechanical sensor element, the method comprising:
ascertaining a piece of primary information, describing a motion-state of the micromechanical sensor element, by the micromechanical sensor element during a first time interval;
ascertaining a piece of reference information, which describes the motion-state of the micromechanical sensor element, during a second time interval based on a first acoustic signal, which is emitted by a sound source, and based on a second acoustic signal, which is received by a sound receiver, wherein the first time interval and the second time interval at least partially overlap with respect to time; and
comparing the reference information with the primary information to calibrate the micromechanical sensor element.

2. The method of claim 1 , wherein the motion-state of the micromechanical sensor element is one of changed and maintained during the first time interval and the second time interval.

3. The method of claim 1 , wherein the second acoustic signal is received by a sound receiver, which is rigidly connected to the micromechanical sensor element.

4. The method of claim 1 , wherein a second acoustic signal is received by a plurality of interconnected microphones or by a directional microphone, and/or the first acoustic signal is emitted by multiple sound sources.

5. The method of claim 1 , wherein an acoustic signal, which is correlated with itself, is used as the first acoustic signal.

6. The method of claim 1 , wherein an acoustic signal of an external sound source and/or an acoustic signal of an internal sound source, which is rigidly connected to the micromechanical sensor element, is used as the first acoustic signal.

7. The method of claim 1 , wherein the calibration is carried out by a control and processing unit.

8. The method of claim 1 , wherein an ultrasonic signal is used as the first acoustic signal.

9. The method of claim 1 , wherein a rotation rate sensor, an acceleration sensor, and/or a magnetic field sensor is calibrated as the micromechanical sensor element.

10. A system for calibrating a micromechanical sensor, comprising:
a micromechanical sensor element;
a sound source;
a sound receiver; and
a control and processing unit, for calibrating the micromechanical sensor element, being configured to perform the following:
ascertaining a piece of primary information, describing a motion-state of the micromechanical sensor element, by the micromechanical sensor element during a first time interval;
ascertaining a piece of reference information, which describes the motion-state of the micromechanical sensor element, during a second time interval based on a first acoustic signal, which is emitted by a sound source, and based on a second acoustic signal, which is received by a sound receiver, wherein the first time interval and the second time interval at least partially overlap with respect to time; and
comparing the reference information with the primary information to calibrate the micromechanical sensor element.

Assignees

• Bosch Gmbh Robert

Inventors

• Geisler Dominik
• Claus Thomas
• Hahn Jochen

Classifications

• G01P21/00 Primary

  Testing or calibrating of apparatus or devices covered by the preceding groups · CPC title