Pattern measurement device and computer program for evaluating patterns based on centroids of the patterns

Patent metadata

Field	Value
Publication number	US-9804107-B2
Application number	US-201415103894-A
Country	US
Kind code	B2
Filing date	Nov 17, 2014
Priority date	Dec 27, 2013
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

The purpose of the present invention is to provide a pattern measurement device for quantitatively evaluating a pattern formed using a directed self-assembly (DSA) method with high accuracy. The present invention is a pattern measurement device for measuring distances between patterns formed in a sample, wherein the centroids of a plurality of patterns included in an image are determined; the inter-centroid distances, and the like, of the plurality of centroids are determined; and on the basis of the inter-centroid distances, and the like, of the plurality of centroids, a pattern meeting a specific condition is distinguished from patterns different from the pattern meeting the specific condition or information is calculated about the number of the patterns meeting the specific condition, the size of an area including the patterns meeting the specific condition, and the number of imaginary lines between the patterns meeting the specific condition.

First claim

The invention claimed is:

1. A pattern measurement device comprising:
a calculation device that measures a dimension between patterns formed in a sample, by using data which is obtained by irradiating the sample with a beam,
wherein
the calculation device
obtains centroids of a plurality of patterns contained in the data;
obtains at least one of an inter-centroid distance of the plurality of patterns, angle information of imaginary lines which link the plurality of centroids to each other, and area information of a closed shape formed by the imaginary lines; and
distinguishes at least one of a pattern which meets a specific condition, an area including the pattern which meets the specific condition, and an imaginary line between patterns meeting the specific condition, from at least one of a pattern different from the pattern which meets the specific condition, an area other than the area including the pattern which meets the specific condition, and an imaginary line between patterns other than the patterns meeting the specific condition, on the basis of at least one of the inter-centroid distance, the angle information, and the area information which have been obtained, or
calculates information regarding at least one of the number of patterns meeting the specific condition, a size of the area including the patterns which meet the specific condition, and the number of imaginary lines between the patterns meeting specific condition.

2. The pattern measurement device according to claim 1 , wherein
the pattern is formed by self-assembly of molecules.

3. The pattern measurement device according to claim 1 , wherein
the calculation device obtains the centroid on the basis of an edge or contour line information of the pattern.

4. The pattern measurement device according to claim 1 , wherein
the calculation device obtains at least one of a relative angle between the imaginary lines and a reference line functioning as a reference, and a relative angle between the imaginary lines, as the angle information.

5. The pattern measurement device according to claim 1 , wherein
the calculation device obtains an area difference between a reference figure and the closed shape formed by the imaginary lines.

6. The pattern measurement device according to claim 1 , further comprising:
a display device that distinguishes and displays at least one of the pattern meeting the specific condition, the area including the pattern which meet the specific condition, and the imaginary line between the patterns meeting the specific condition, from at least one of the pattern other than the pattern meeting the specific condition, the area different from the area including the pattern which meet the specific condition, and the imaginary line between the patterns other than the patterns meeting the specific condition.

7. The pattern measurement device according to claim 1 , further comprising:
a display device that displays at least one of the inter-centroid distance of the plurality of patterns, the angle information of imaginary lines which link the plurality of centroids, and the area information of the closed shape formed by the imaginary lines.

8. The pattern measurement device according to claim 1 , further comprising:
a display device that displays distribution of at least one of the inter-centroid distance of the plurality of patterns, the angle information of imaginary lines which link the plurality of centroids, and the area information of the closed shape formed by the imaginary lines, in accordance with a value of the at least one.

9. The pattern measurement device according to claim 1 , further comprising:
a display device that distinguishes and displays at least one of the pattern meeting the specific condition, the area including the pattern meeting the specific condition, and the imaginary line between the patterns meeting specific condition, from at least one of the pattern different from the pattern meeting the specific condition, the area other than the area including the pattern meeting the specific condition, and the imaginary line between the patterns other than the patterns meeting the specific condition.

10. The pattern measurement device according to claim 1 , wherein
the calculation device performs grouping of at least one of the patterns meeting specific condition, and the imaginary lines between the patterns meeting specific condition.

11. A non-transitory computer-readable medium storing a program causing a computer to measure dimensions between patterns formed in a sample, by using data which is obtained by irradiating the sample with a beam,
wherein
the program causes the computer to:
obtain centroids of a plurality of patterns contained in the data;
obtain at least one of an inter-centroid distance of the plurality of patterns, angle information of imaginary lines which link the plurality of centroids to each other, and area information of a closed shape formed by the imaginary lines; and
distinguish at least one of a pattern which meets a specific condition, an area including the pattern which meets the specific condition, and an imaginary line between patterns meeting the specific condition, from at least one of a pattern different from the pattern which meets the specific condition, an area other than the area including the pattern which meets the specific condition, and an imaginary line between patterns other than the patterns meeting the specific condition, on the basis of at least one of the inter-centroid distance, the angle information, and the area information which have been obtained, or
calculate information regarding at least one of the number of patterns meeting the specific condition, a size of the area including the pattern which meet the specific condition, and the number of imaginary lines between the patterns meeting the specific condition.

Assignees

• Hitachi High Tech Corp

Inventors

• Sugiyama Akiyuki
• Isawa Miki
• Yamaguchi Satoru
• HOMMI Motonobu

Classifications

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• G01B2210/56

  Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth · CPC title

• G01N23/2206 Primary

  Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement · CPC title

• G01N23/2251

  using incident electron beams, e.g. scanning electron microscopy [SEM] · CPC title

• G01B15/00 Primary

  Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons (characterised by the use of optical techniques G01B9/00, G01B11/00) · CPC title