Pseudo differential pressure sensing bridge configuration

Patent metadata

Field	Value
Publication number	US-9804048-B2
Application number	US-201615001970-A
Country	US
Kind code	B2
Filing date	Jan 20, 2016
Priority date	Jan 20, 2016
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

Apparatus and associated methods relate to generating a signal indicative of a differential pressure using a first absolute pressure sensor and a second absolute pressure sensor, each having a positive relation transducer configured to generate an electrical signal that increases in response to increasing pressure and a negative relation transducer configured to generate an electrical signal that decreases in response to increasing pressure. The first and second positive relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a first leg of a Wheatstone bridge at a first output node. The first and second negative relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a second leg of a Wheatstone bridge at a second output node. Both positive and both negative relation transducers are connected to a first and a second bias node of the Wheatstone bridge, respectively.

First claim

The invention claimed is:

1. A pseudo differential pressure sensor comprising:
a first absolute pressure sensor; and
a second absolute pressure sensor,
wherein each of the first and the second absolute pressure sensors comprises:
an elastically deformable membrane configured to deform in response to exposure to an environment having a pressure;
a first piezoresistor located on the elastically deformable membrane at a first region where increasing the pressure of the environment produces an increasing tensile strain in the first piezoresistor; and
a second piezoresistor located on the elastically deformable membrane at a second region where increasing the pressure of the environment produces an increasing compressive strain in the second piezoresistor, and

wherein the first and the second piezoresistors of both the first and the second absolute pressure sensors are electrically connected as a Wheatstone bridge having a first voltage divider leg and a second voltage divider leg, the first voltage divider leg including the first piezoresistor of the first absolute pressure sensor series connected to the first piezoresistor of the second absolute pressure sensor at a first output node, the second voltage divider leg including the second piezoresistor of the first absolute pressure sensor series connected to the second piezoresistor of the second absolute pressure sensor at a second output node.

2. The pseudo differential pressure sensor of claim 1 , wherein the first and the second output nodes are configured to provide a first and a second output signal, respectively, each of the first and the second output signals indicative of a difference between a first pressure of a first environment exposed to the first absolute pressure sensor and a second pressure of a second environment exposed to the second absolute pressure sensor, the first output signal having an inverse relation with the second output signal.

3. The pseudo differential pressure sensor of claim 2 , wherein, in response to application of a bias voltage applied across the first voltage divider leg of the Wheatstone bride, a first output signal at the first output node increases in response to an increase in the difference between the first pressure and the second pressure.

4. The pseudo differential pressure sensor of claim 2 , wherein, in response to application of a bias voltage applied across the second voltage divider leg of the Wheatstone bride, a second output signal decreases in response to an increase in the difference between the first pressure and the second pressure.

5. The pseudo differential pressure sensor of claim 2 , further comprising a control system configured to supply a bias voltage across each of the first and the second voltage divider legs of the Wheatstone bridge and to receive the first output signal and the second output signal.

6. The pseudo differential pressure sensor of claim 5 , wherein the control system is further configured to evaluate whether each of the first and the second output signals are within a predetermined signal range corresponding to a normal operating range.

7. The pseudo differential pressure sensor of claim 6 , wherein, upon determining that only one of the first and the second output signals is within the predetermined signal range, the control system generates a measurement signal indicative of the difference between the first pressure and the second pressure based on the one of first and the second output signals that is within the predetermined signal range.

8. The pseudo differential pressure sensor of claim 1 , wherein the first region where increasing pressure produces an increasing tensile strain in the first piezoresistor is on a surface region of the elastically deformable membrane that becomes increasing convex in response to increasing pressure.

9. The pseudo differential pressure sensor of claim 1 , wherein the second region where increasing the pressure of the environment produces an increasing compressive strain in the second piezoresistor is on a surface region of the elastically deformable membrane that becomes increasing concave in response to increasing pressure.

10. A pseudo differential pressure sensor comprising:
a first absolute pressure sensor; and
a second absolute pressure sensor,
wherein each of the first and the second absolute pressure sensors comprises:
an elastically deformable membrane configured to deform in response to an exposure to an environment having a pressure;
a first piezoresistor located on a first surface region of the elastically deformable membrane that becomes increasingly convex in response to increasing pressure; and
a second piezoresistor located on a second surface region of the elastically deformable membrane that becomes increasingly convex in response to increasing pressure, and

wherein the first and the second piezoresistors of both the first and the second absolute pressure sensors are electrically connected as a Wheatstone bridge having a first voltage divider leg and a second voltage divider leg, the first voltage divider leg including the first piezoresistor of the first absolute pressure sensor series connected to the first piezoresistor of the second absolute pressure sensor at a first output node, the second voltage divider leg including the second piezoresistor of the first absolute pressure sensor series connected to the second piezoresistor of the second absolute pressure sensor at a second output node.

11. The pseudo differential pressure sensor of claim 10 , wherein the first and the second output nodes are configured to provide a first and a second output signal, respectively, each of the first and the second output signals indicative of a difference between a first pressure of a first environment exposed to the first absolute pressure sensor and a second pressure of a second environment exposed to the second absolute pressure sensor, the first output signal having an inverse relation with the second output signal.

12. The pseudo differential pressure sensor of claim 11 , wherein, when a bias voltage is applied across the first voltage divider leg of the Wheatstone bride, a first output signal at the first output node increases in response to an increase in the difference between the first pressure and the second pressure.

13. The pseudo differential pressure sensor of claim 11 , wherein, when a bias voltage is applied across the second voltage divider leg of the Wheatstone bride, a second output signal decreases in response to an increase in the difference between the first pressure and the second pressure.

14. The pseudo differential pressure sensor of claim 11 , further comprising a control system configured to supply a bias voltage across each of the first and the second voltage divider legs of the Wheatstone bridge and to receive the first output signal and the second output signal.

15. The pseudo differential pressure sensor of claim 14 , wherein the control system is further configured to evaluate whether each of the first and the second output signals are within a predetermined signal range corresponding to a normal operating range.

16. The pseudo differential pressure sensor of claim 15 , wherein, if only one of the first and the second output signals is within the predetermined signal range, then the control system generates a measurement signal indicative of the difference between the first pressure and the second pressure based on the one of first and the second output signals that is within the predetermined signal range.

17. A method of generating a signal indicative of a difference betw

Assignees

• Rosemount Aerospace Inc

Inventors

• Zhang Weibin

Classifications

• G01L13/00

  Devices or apparatus for measuring differences of two or more fluid pressure values · CPC title

• G01L9/0052 Primary

  of piezoresistive elements (circuits therefor G01L9/06) · CPC title

• G01L9/0055 Primary

  bonded on a diaphragm · CPC title

• G01L9/06

  of piezo-resistive devices · CPC title

• G01L13/025

  using diaphragms · CPC title