Optical configuration for measurement device

Patent metadata

Field	Value
Publication number	US-9803972-B2
Application number	US-201514973431-A
Country	US
Kind code	B2
Filing date	Dec 17, 2015
Priority date	Dec 17, 2015
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

A scanning probe is provided for use with a coordinate measuring machine. The scanning probe includes a rotary position detection configuration which outputs X and Y position signals indicative of a rotation of a stylus coupling portion about a rotation center, and an axial position detection configuration which outputs a Z position signal indicative of the position of the stylus coupling portion along the axial direction. The Z position signal is substantially insensitive to motion of the axial detection deflector in at least one direction that is transverse to the axial direction. The X, Y and Z position signals may be processed to determine a 3 D position of a contact portion of the stylus, which may include utilizing the Z position signal in combination with known trigonometry of the scanning probe to remove axial motion cross coupling components from the X and Y position signals.

First claim

The invention claimed is:

1. A scanning probe for a coordinate measuring machine, the scanning probe comprising:
a stylus suspension portion, comprising:
a stylus coupling portion that is configured to be rigidly coupled to a stylus; and
a stylus motion mechanism that is configured to enable axial motion of the stylus coupling portion along an axial direction, and rotary motion of the stylus coupling portion about a rotation center; and

a stylus position detection portion, comprising:
a light source configuration;
a rotary position detection configuration, comprising:
a rotary detection beam path configured to receive light from the light source configuration;
a rotary detection deflector that is located along the rotary detection beam path and that is coupled to the stylus suspension portion; and
a rotary detector portion that receives a variable-deflection light beam from the rotary detection deflector and outputs X and Y position signals indicative of rotation of the stylus coupling portion about the rotation center; and

an axial position detection configuration, comprising:
an axial detection beam path configured to receive light from the light source configuration;
an axial detection deflector that is located along the axial detection beam path and that is coupled to the stylus suspension portion to move in the axial direction in response to the axial motion, wherein the axial detection deflector also moves in at least one direction transverse to the axial direction in response to the rotary motion; and
an axial detector portion that receives a variable-deflection light beam from the axial detection deflector and outputs a Z position signal indicative of a position of the stylus coupling portion along the axial direction, wherein the axial position detection configuration is configured such that the Z position signal is substantially insensitive to motion of the axial detection deflector in the at least one direction that is transverse to the axial direction.

2. The scanning probe of claim 1 , wherein the axial detector portion comprises a Z position photodetector that outputs the Z position signal responsive to a position of a spot or line formed on the Z position photodetector by the variable-deflection light beam from the axial detection deflector.

3. The scanning probe of claim 2 , wherein the axial position detection configuration is further configured such that the variable-deflection light beam from the axial detection deflector is at least partially focused by the axial detection deflector to form the spot or line formed on the Z position photodetector, and motion of the axial detection deflector along a first direction transverse to the axial direction alters the spot or line focus without substantially altering an effective position of the spot or line on the Z position photodetector.

4. The scanning probe of claim 3 , wherein the axial detection deflector comprises a lens.

5. The scanning probe of claim 3 , wherein the axial position detection configuration is further configured such that:
the variable-deflection light beam from the axial detection deflector is at least partially focused by the axial detection deflector to form the spot on the Z position photodetector;
the Z position signal is responsive to a position of the spot along a single sensitive axis of the Z position photodetector; and
motion of the axial detection deflector along a second direction transverse to the axial direction alters a position of the spot formed on the Z position photodetector along a direction that is orthogonal to the sensitive axis of the Z position photodetector.

6. The scanning probe of claim 1 , wherein the axial detection deflector and the rotary detection deflector are rigidly coupled to one another.

7. The scanning probe of claim 1 , wherein the axial detection deflector and the rotary detection deflector are rigidly coupled to the stylus coupling portion.

8. The scanning probe of claim 1 , wherein the scanning probe further comprises a housing, and the light source configuration, the axial detector portion and the rotary detector portion are rigidly coupled to the housing.

9. The scanning probe of claim 8 , wherein the X and Y position signals in combination with the Z position signal enables determination of an absolute 3D position of the stylus coupling portion relative to the housing.

10. The scanning probe of claim 1 , further comprising a beamsplitter that is configured to split light from a light source of the light source configuration into an axial detection light beam along the axial detection beam path and a rotary detection light beam along the rotary detection beam path.

11. The scanning probe of claim 1 , wherein the light source configuration comprises:
a first light source that is configured to provide an axial detection light beam along the axial detection beam path; and
a second light source that is configured to provide a rotary detection light beam along the rotary detection beam path.

12. The scanning probe of claim 1 , wherein the rotary detector portion comprises an X-Y position photodetector that outputs the X position signal responsive to a position along a first axis of the X-Y position photodetector of a spot formed on the X-Y position photodetector by the variable-deflection light beam from the rotary detection deflector; and that outputs the Y position signal responsive to a position along a second axis of the X-Y position photodetector of the spot formed on the X-Y position photodetector by the variable-deflection light beam from the rotary detection deflector.

13. The scanning probe of claim 12 , wherein:
the rotary detection deflector is coupled to the stylus suspension portion to move in response to the rotary motion, and the axial detection deflector also moves in the axial direction in response to the axial motion; and
the rotary position detection configuration is nominally configured such that when there is no rotation of the stylus coupling portion about the rotation center, the X and Y position signals are substantially insensitive to motion of the rotary detection deflector along the axial direction.

14. The scanning probe of claim 12 , wherein the rotary position detection configuration is configured such that the variable-deflection light beam from the rotary detection deflector is at least partially focused by the rotary detection deflector to form the spot formed on the X-Y position photodetector.

15. The scanning probe of claim 14 , wherein the rotary detection deflector comprises a concave mirror.

16. The scanning probe of claim 1 , wherein:
the rotary detection deflector comprises a concave mirror having an optical axis oriented along the axial direction, and is located along a portion of the rotary detection beam path that extends along the axial direction, and the rotary motion moves the rotary detection deflector transverse to its optical axis; and
the axial detection deflector comprises a lens having an optical axis oriented transverse to the axial direction, and is located along a portion of the axial detection beam path that extends along the transverse direction, and the axial motion moves the axial detection deflector transverse to its optical axis.

17. The scanning probe of claim 16 , wherein:
the rotary detector portion comprises an X-Y position photodetector having a surface plane;
the rotary position detection configuration further comprises a reflective surface that receives the variable-deflection light beam reflected from the rotary detection deflector, and reflects the variable-de

Assignees

• Mitutoyo Corp

Inventors

• Sesko David William

Classifications

• G01B11/005 Primary

  coordinate measuring machines · CPC title

• G01B11/007 Primary

  feeler heads therefor · CPC title

• G01B5/012 Primary

  Contact-making feeler heads therefor · CPC title